扫描探针显微镜的隔振技术研究
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摘要
扫描探针显微镜(SPM)等超精密加工与检测仪器容易受到外界环境微小振动等干扰,致使仪器在通常条件下无法达到要求的指标。为此,结合主动隔振和被动隔振技术研究对外界微小振动扰动有效隔离方法。以本原纳米仪器有限公司制作的CSPM4000扫描探针显微镜作为实验对象进行试验,探讨利用主动隔振系统来降低超精密仪器对于外部试验环境的苛刻要求,进而改善超精密仪器的试验性能。实验结果显示隔振试验装置具有较好的隔振效果,可满足使用要求。
Scanning probe microscope (SPM) and other ultra precise machining and detective equipment are easily influenced by micro vibration disturbance in environment leading to achieve the target required difficultly in common condition. Therefore, effective isolation method is investigated by combining active and passive vibration isolation technology for out small disturbance. Taking CSPM4000 scanning probe microscope produced by Benyuan nano instrument Co., Ltd as object, it is investigated to use active vibration isolation for reducing strict requirement in exterior experimental environment, and to improve experimental performance of ultra precise instruments. Then experimental results show that vibration isolation devices act obvious effect and satisfy requirement.
Scanning probe microscope (SPM) and other ultra precise machining and detective equipment are easily influenced by micro vibration disturbance in environment leading to achieve the target required difficultly in common condition. Therefore, effective isolation method is investigated by combining active and passive vibration isolation technology for out small disturbance. Taking CSPM4000 scanning probe microscope produced by Benyuan nano instrument Co., Ltd as object, it is investigated to use active vibration isolation for reducing strict requirement in exterior experimental environment, and to improve experimental performance of ultra precise instruments. Then experimental results show that vibration isolation devices act obvious effect and satisfy requirement.
引文
[1]袁哲俊.纳米科学与技术[M].哈尔滨:哈尔滨工业大学出版社,2005.
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[4]郭安薪,徐幼麟,李惠.高科技厂房精密仪器工作平台的微振混合控制[J].地震工程与工程振动,2004,24(1):161-165.
[5]Y.L.Xu,A.X.Guo.Microvibration control of coupled high tech equipment-building systems in vertical direction[J].International Journal of Solids and Structures,2006,43:6521-6534.
[6]Y.L.Xu,Z.C.Yang,J.Chen,et al.Microvibration control platform for high technology facilities subject to traffic-in-duced ground motion[J].Engineering Structures,2006,25:1069-1082.
[7]Eugene I.Rivin.Vibration isolation of precision equipment[J].Precision Engineering,1995,17:41-56.
[8]Uwe Stobener,Halcyonics GmbH.Active vibration isolation for highly sensitive measurement equipment[A].Adaptronic Congress[C].Gttingen,May2006.
[9]Brad M.Beadle,Stefan Hurlebaus,Lothar Gaul,et al.Active control strategies for vibration isolation[J].Solid Mechanics and its Applications,2005,130:91-100.
[10]B.M.Beadle,S.Hurlebaus,U.Stobener,et al.Modeling and parameter identification of an active anti-Vibration sys-tem[A].SPIE International Symposia in Smart Structures&Materials/NDE[C],San Diego,March2005.
[11]T.Müller,S.Hurlebaus,U.Stobener.et al.Modeling and control techniques of an active vibration isolation system[A].International Modal Analysis Conference IMAC XXIII[C],Orlando,2005.
[12]Jia-Yush Yena,Kuo-Jung Lana,John A.Kramar.Active vibration isolation of a large stroke scanning probe micro-scope by using discrete sliding mode control[J].sensors and actuators,2005,21(1):243-500.
[13]Wensheng Hua,et al.Low-frequency active vibration isola-tion for advanced LIGO[A].Proceedings of the SPIE-The International Society for Optical Engineering[C].23-24June2004.
[14]Huai-San Wang,et al.Active Vibration Suppression Scheme of Magnet Girders[A].International workshop on mechani-cal engineering design of synchrotron radiation equipment and instrumentation[C].2006May24-26,Egret Himeji,Hyogo,Japan.
[15]Ryuhei Sugahara,et al.Performance of an active vibration isolation system[A].Proceedings of the8th International Workshop on Accelerator Alignment(IWAA2004)[C].4-7Oct2004,Geneva,Switzerland.
[16]M.J.Balas.Direct Velocity Feedback Control of Large Space Structures[J].Journal of Guidance and Control,1979,2(3):252-253.
[2]HIA S W.Engineering of single molecules with a scanning tunneling microscope tip[J].Superlattices and Microstruc-tures,2002,31(1):63-72.
[3]袁哲俊.使用SPM的纳米级加工技术新进展[J].纳米技术与精密工程,2004,2(1):45-49.
[4]郭安薪,徐幼麟,李惠.高科技厂房精密仪器工作平台的微振混合控制[J].地震工程与工程振动,2004,24(1):161-165.
[5]Y.L.Xu,A.X.Guo.Microvibration control of coupled high tech equipment-building systems in vertical direction[J].International Journal of Solids and Structures,2006,43:6521-6534.
[6]Y.L.Xu,Z.C.Yang,J.Chen,et al.Microvibration control platform for high technology facilities subject to traffic-in-duced ground motion[J].Engineering Structures,2006,25:1069-1082.
[7]Eugene I.Rivin.Vibration isolation of precision equipment[J].Precision Engineering,1995,17:41-56.
[8]Uwe Stobener,Halcyonics GmbH.Active vibration isolation for highly sensitive measurement equipment[A].Adaptronic Congress[C].Gttingen,May2006.
[9]Brad M.Beadle,Stefan Hurlebaus,Lothar Gaul,et al.Active control strategies for vibration isolation[J].Solid Mechanics and its Applications,2005,130:91-100.
[10]B.M.Beadle,S.Hurlebaus,U.Stobener,et al.Modeling and parameter identification of an active anti-Vibration sys-tem[A].SPIE International Symposia in Smart Structures&Materials/NDE[C],San Diego,March2005.
[11]T.Müller,S.Hurlebaus,U.Stobener.et al.Modeling and control techniques of an active vibration isolation system[A].International Modal Analysis Conference IMAC XXIII[C],Orlando,2005.
[12]Jia-Yush Yena,Kuo-Jung Lana,John A.Kramar.Active vibration isolation of a large stroke scanning probe micro-scope by using discrete sliding mode control[J].sensors and actuators,2005,21(1):243-500.
[13]Wensheng Hua,et al.Low-frequency active vibration isola-tion for advanced LIGO[A].Proceedings of the SPIE-The International Society for Optical Engineering[C].23-24June2004.
[14]Huai-San Wang,et al.Active Vibration Suppression Scheme of Magnet Girders[A].International workshop on mechani-cal engineering design of synchrotron radiation equipment and instrumentation[C].2006May24-26,Egret Himeji,Hyogo,Japan.
[15]Ryuhei Sugahara,et al.Performance of an active vibration isolation system[A].Proceedings of the8th International Workshop on Accelerator Alignment(IWAA2004)[C].4-7Oct2004,Geneva,Switzerland.
[16]M.J.Balas.Direct Velocity Feedback Control of Large Space Structures[J].Journal of Guidance and Control,1979,2(3):252-253.
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