振动测量用叉指式硅微加速度计性能研究
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摘要
硅MEMS加速度仪可以用于地震以及各种工程振动的测量,目前其精度较低,温度灵敏度较高,为了掌握MEMS加速度计的特性,提高其实用性能,本文介绍了一种叉指式硅微机械加速度计(FMSA)表头微结构和系统的工作原理,推导了微结构梁的刚度,利用ANSYS有限元软件分析了FM-SA加速度计的静态特性、动态特性和温度特性,验证了推导的正确性,说明微结构参数是决定FMSA加速度计性能的主要因素,为改进加速度计性能提供了依据,并对其在振动观测领域实际应用提供了理论指导。
Micro-electromechanical silicon accelerometer can be applied to various vibration measurements.For comprehending its performance and improving its precision,this paper describes the microstructure and operation principle of a finger-shaped micro-electromechanical silicon accelerometer.The stiffness of microstructure was calculated theoretically.The static,dynamic and thermal characteristics were analyzed by using ANSYS software and the accuracy of theoretical model was verified.It is shown that the microstructure dimension is the main factor causing the performance of FMSA.The paper provides a theory for improving the performance of accelerometer.
Micro-electromechanical silicon accelerometer can be applied to various vibration measurements.For comprehending its performance and improving its precision,this paper describes the microstructure and operation principle of a finger-shaped micro-electromechanical silicon accelerometer.The stiffness of microstructure was calculated theoretically.The static,dynamic and thermal characteristics were analyzed by using ANSYS software and the accuracy of theoretical model was verified.It is shown that the microstructure dimension is the main factor causing the performance of FMSA.The paper provides a theory for improving the performance of accelerometer.
引文
[1]杨学山,黄振平.MJ型微振加速度仪[J].世界地震工程,1997,13(1):39-46.
[2]李彩华,孔庆彦.水库大坝地震监测系统(二)变极距型电容加速度传感器[J].水电自动化与大坝监测,2006,30(3):45-47.
[3]金星,马强,李山有.利用数字化速度记录实时仿真位移与加速度时程[J].地震工程与工程振动,2004,24(6):10-38.
[4]杜美琪.加速度计静态标定方法及设备[J].地震工程与工程振动,1996,16(2):128-133.
[5]Cimoo S.Commercial vision of silicon based inertial sensors[C]//1997 International Conference on Solid-state Sensors and Actuators Chicago.AIAA.1997:839-842.
[6]Allen J J,et al.Integrated Micro Electro Mechanical sensor development for inertial applications[J].IEEE AES,1998:618-622.
[7]Qamar A S,Michael M,John C I I.Applying MEMS technology to field,flight and space deployable systems[J].IEEE.2001:246-255.
[8]Barbour N,Connelly J,Gilmore J,et al.Micromechanical silicon instrument and system development at draper laboratory[C]//AIAAGuidanceNavigation and Control Conference San Diego:AIAA.1996:1-7.
[9]Zoran D.Noise sources in microelectromechanical systems[C]//22nd International Conference on Microelectronics.Serbia:IEEE.2000:85-96.
[10]李明,周百令.硅微加速度计有限元模型与动态分析研究[J].东南大学学报,1999,29(5):81-85.
[11]秦君华,董景新.一种叉齿式微硅加速度计的设计与分析[J].宇航学报,2002,23(1):83-86.
[12]Michael D P.Design of micromechanical inertial sensors[doctor][D].Los Angeles:University of California,2001.
[13]徐洪强,陈花玲.叉指式微加速度计静电-机械耦合场分析[J].传感器技术,2004,23(7):27-33.
[14]Kourepenis A,Borenstein J,Connelly J,et al.Performance of MEMS inertial sensors[J].IEEE,1998:1-8.
[2]李彩华,孔庆彦.水库大坝地震监测系统(二)变极距型电容加速度传感器[J].水电自动化与大坝监测,2006,30(3):45-47.
[3]金星,马强,李山有.利用数字化速度记录实时仿真位移与加速度时程[J].地震工程与工程振动,2004,24(6):10-38.
[4]杜美琪.加速度计静态标定方法及设备[J].地震工程与工程振动,1996,16(2):128-133.
[5]Cimoo S.Commercial vision of silicon based inertial sensors[C]//1997 International Conference on Solid-state Sensors and Actuators Chicago.AIAA.1997:839-842.
[6]Allen J J,et al.Integrated Micro Electro Mechanical sensor development for inertial applications[J].IEEE AES,1998:618-622.
[7]Qamar A S,Michael M,John C I I.Applying MEMS technology to field,flight and space deployable systems[J].IEEE.2001:246-255.
[8]Barbour N,Connelly J,Gilmore J,et al.Micromechanical silicon instrument and system development at draper laboratory[C]//AIAAGuidanceNavigation and Control Conference San Diego:AIAA.1996:1-7.
[9]Zoran D.Noise sources in microelectromechanical systems[C]//22nd International Conference on Microelectronics.Serbia:IEEE.2000:85-96.
[10]李明,周百令.硅微加速度计有限元模型与动态分析研究[J].东南大学学报,1999,29(5):81-85.
[11]秦君华,董景新.一种叉齿式微硅加速度计的设计与分析[J].宇航学报,2002,23(1):83-86.
[12]Michael D P.Design of micromechanical inertial sensors[doctor][D].Los Angeles:University of California,2001.
[13]徐洪强,陈花玲.叉指式微加速度计静电-机械耦合场分析[J].传感器技术,2004,23(7):27-33.
[14]Kourepenis A,Borenstein J,Connelly J,et al.Performance of MEMS inertial sensors[J].IEEE,1998:1-8.
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