微电子厂房结构微振动响应研究
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摘要
基于某微电子厂房微振动实测数据,采用有限元分析软件SAP2000对结构微振动响应进行模拟分析,得出工作平台上一些点的加速度时程曲线及相应的反应谱,并与实测响应值加以对比。结果表明,无论实测数据还是模拟结果,水平方向基底输入加速度在工作平台上都得到一定程度的放大;实测反应谱曲线与相应的模拟曲线形状相似,峰值均出现在结构相应方向的自振周期附近;阻尼比是影响结构微振动响应的主要参数之一。
On the basis of experimental data,this paper simulated the structural microvibration response of a micro-electronics workshop by using the finite element analysis software SAP2000.It obtained the acceleration time-history curves and corresponding response spectra,which were compared with those from experiment.The results indicate that for both the experimental data and the simulated ones,on the working platform the accelerations at the base of the structure in the horizontal directions have been amplified;the acceleration spectra from the experimental data are similar in shape to the simulated ones,with their peak values in accordance with the fundamental periods of the structure in the corresponding directions;the damping ratio is one of the major factors affecting the microvibration response of the structure.
On the basis of experimental data,this paper simulated the structural microvibration response of a micro-electronics workshop by using the finite element analysis software SAP2000.It obtained the acceleration time-history curves and corresponding response spectra,which were compared with those from experiment.The results indicate that for both the experimental data and the simulated ones,on the working platform the accelerations at the base of the structure in the horizontal directions have been amplified;the acceleration spectra from the experimental data are similar in shape to the simulated ones,with their peak values in accordance with the fundamental periods of the structure in the corresponding directions;the damping ratio is one of the major factors affecting the microvibration response of the structure.
引文
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[7]郭安薪,徐幼麟,李惠.高科技厂房精密仪器工作平台的微振动混合控制[J].地震工程与工程振动,2004,24(1):161-165.
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[10]刘勺斌,杨洪波,刘洋,等.基于Stewart平台的空间光学仪器主动隔振系统研究[J].噪声与振动控制,2008(2):10-14.
[11]胡晓勇,熊峰.高科技厂房结构微振响应分析[J].地震工程与工程振动,2006(4):56-62.
[2]Yoshioka H,Takahashi Y,Katayama K,et al.An Active Microvi-bration Isolation System for Hi-TechManufacturing Facilities[J].Journal of Vibration and Acoustics ASME,2001,123:269-275.
[3]王玲玲,李耀刚,陈冠国.振动主动控制技术的研究现状及发展趋势[J].农机化研究,2005(5):30-32.
[4]杨智春,徐幼麟.高科技设施的微振动一体化主动控制[J].西北工业大学学报,2003,21(6):646-647.
[5]张士峰,张辉.高精度测量的被动隔振研究[J].现代机械,2006(4):3-5.
[6]王健林,胡小唐,朱明武.用于超微定位机构的被动隔振系统的研究[J].机械设计,1999(7).
[7]郭安薪,徐幼麟,李惠.高科技厂房精密仪器工作平台的微振动混合控制[J].地震工程与工程振动,2004,24(1):161-165.
[8]张春良,梅德庆,陈子辰.微制造平台混合隔振的动力学研究[J].浙江大学学报(工学版),2003,37(4).
[9]Romdhane L.Design and analysis of a hybrid serial-parallel ma-nipulator[J].Mechanism and Machine Theory,1999,34:1037-1055.
[10]刘勺斌,杨洪波,刘洋,等.基于Stewart平台的空间光学仪器主动隔振系统研究[J].噪声与振动控制,2008(2):10-14.
[11]胡晓勇,熊峰.高科技厂房结构微振响应分析[J].地震工程与工程振动,2006(4):56-62.
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