近场光学显微镜光纤探针的研制
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摘要
近场光学显微镜的发明(Scanning Near-field Optical Microscope，SNOM或Near-field Scanning Optical Microscope，NSOM)，标志着传统显微镜分辨率衍射极限已被突破，使人类在今后可以用光学方法在小于亚微米的尺度上观察和研究物体的外观形貌和内在性质。
本文围绕着近场光学显微镜的关键部件——光学探针进行论述。介绍了不同光学探针的特性及其制作工艺。其中着重阐述了热拉伸与化学腐蚀相结合制备AF／PSTM(原子力／光子扫描隧道显微镜)双功能弯曲光纤探针的方法，从仪器和实验参数两个方面研究了如何改善光纤探针性能(包括尖端直径、锥角、悬力臂直径等因素)并得到实验验证。将双功能弯曲光纤探针应用于AF／PSTM系统中，可同时获得样品的光学与形貌图像，实现图像分解。
SNOM (Scanning Near-field Optical Microscope, or NSOM, Near-field Scanning Optical Microscope) successfully extended the resolution of conventional optical microscope beyond the diffraction limit. It can be used to observe and study sample's topography and internal characters in submicron scale by optical method.
This paper is related to the optical probe, which is the key element of NSOM. All kinds of characters and fabricating methods of different optical probes is introduced. The main point of this paper is about a fabricating method of bi-functional bend optical fiber probe, namely a heated pulling combining chemical etching method. We have improved the method on the equipment and the experiment parameter and got the better probe capability (such as the diameter of apex, the cone angle and the diameter of cantilever). The bi-functional bend optical fiber probe is used in our newly developed AF/PSTM system. The optical images and topographic images are obtained simultaneously and the image separation is realized.
本文围绕着近场光学显微镜的关键部件——光学探针进行论述。介绍了不同光学探针的特性及其制作工艺。其中着重阐述了热拉伸与化学腐蚀相结合制备AF／PSTM(原子力／光子扫描隧道显微镜)双功能弯曲光纤探针的方法，从仪器和实验参数两个方面研究了如何改善光纤探针性能(包括尖端直径、锥角、悬力臂直径等因素)并得到实验验证。将双功能弯曲光纤探针应用于AF／PSTM系统中，可同时获得样品的光学与形貌图像，实现图像分解。
SNOM (Scanning Near-field Optical Microscope, or NSOM, Near-field Scanning Optical Microscope) successfully extended the resolution of conventional optical microscope beyond the diffraction limit. It can be used to observe and study sample's topography and internal characters in submicron scale by optical method.
This paper is related to the optical probe, which is the key element of NSOM. All kinds of characters and fabricating methods of different optical probes is introduced. The main point of this paper is about a fabricating method of bi-functional bend optical fiber probe, namely a heated pulling combining chemical etching method. We have improved the method on the equipment and the experiment parameter and got the better probe capability (such as the diameter of apex, the cone angle and the diameter of cantilever). The bi-functional bend optical fiber probe is used in our newly developed AF/PSTM system. The optical images and topographic images are obtained simultaneously and the image separation is realized.
引文
[1] D.W. Pohl, W. Denk, M. Lanz, Optical stethoscopy: Image recording with resolution λ/20, Appl. Phys. Lett. 1984, 44 (7):651-653
[2] 郭宁，姚骏恩，吴世法等，光子扫描隧道显微镜的研制与样品的显微成像技术，物理，1993，12：742-746
[3] 吴世法，原子力与光子扫描隧道组合显微镜图像分解方法，中国发明专利ZL 96 1 11979．9，CN1177738A，1998
[4] 吴世法，潘石，章健，刘伟，王景芝，黄玉起，AF／PSTM图像分解方法及其数值模拟结果，中国工程科学，2001，8：33-36
[5] G.A. Valaskovic, M. Holton and G. H. Morrison, Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes. Appl. Opt., 1995, 34:1215
[6] D. Zeisel, S. Nettesheim, B. Dutoit and R. Zenobi. Pulsed laser-induced desorption and optical imaging on a nanometer scale with scanning near-field microscopy using chemically etched fiber tips, Appl. Phys. Lett., 1996, 68:2491
[7] E. H. Synge, A suggest method for extending microscopic resolution into ultra-microscopic resolution, Phil. Mag., 1928, 6:356-362
[8] R.J. Moon, Science, 1950, 112:384
[9] J.A. O'Keefe, J. Opt. Soc. Am., 1956, 46:359
[10] E.A. Ash and G. Nichols. Super-resolution aperture scanning microscope, Nature, 1972, 237:510-512
[11] R. C. Reddick, R. J. Warmack and T. L. Ferrel. New form of scanning optical microscopy, Phys. Rev., 1989, B39:767-770
[12] A. Haeootanian, E. Berzig, M. Isaacson, and A. Lewis, Appl. Phys. Lett. 1986, 49:674
[13] E. Betzig and J. Trauman, T. D. Harris, T. S. Winer, and R. L. Kostelak, Science, 1991, 251:1648
[14] E. Betzig and R. J. Chichester, Science, 1992, 262:1422
[15] 朱星，近场光学与近场光学显微镜，北京大学学报(自然科学版)，33(3)：394
[16] 吴世法，简国树，潘石，纳米分辨近场光学显微镜显微成象技术现状，中国图形图像学报，2000，5(A)：8
[17] T. L. Ferrel, R. J. Warmack, and R. C. Reddick, Photon scanning tunneling microscopy, United states Patent No: 5 018 865, 1991 5 28
[18] 吴世法，近代成像技术与图像处理，国防工业出版社
[19] S. Alexander, et al., J. Apply. Phys., 1989, 65:164
[20] 张树霖，近场光学显微镜及其应用，科学出版社，2000，47-69
[21] C. Mihaliea, W. Scholz, S. Werner, S. Munster and R. kassing, Appl. Phys. Lett., 1995, 68:3531
[22] M. Specht, J. Pedamig, W. Heckl and T. Hansch. Phys. Rev. Lett., 1992, 68:476
[23] T. Leinhos, T. Stopka, and E. Oesterschulze, Appl. Phys. A-Mat. Sci., 1992, 60:2957
[24] D. Bohm, Quantum Theory, Prentice Hall, Englewood Cliffs, NJ, 1951,614-619
[25] K. S. Yee, IEEE Trans. Antennas Propagat., 1966, AP14:302
[26] 周庆，朱星，李宏福，近场光学中光纤探针的光强分布，物理学报，2000，49(2)：210-214
[27] 黄祝明，张国平，光纤锥探针传输特性的研究，物理与工程，2002，12(2)：45-47
[28] A．W．Snyder，J．Love，光波导理论(中译本)，人民邮电出版社，1991，第19章
[29] T. Saiki, S. Mononobe, M. Ohtsu et al. Tailoring a high-transmission fiber probe for photon scanning tunneling microscope. Appl. Phys. Lett., 1996, 68(19): 2612
[30] S. Mononobe, M. Naya, T. Saiki et al. Reproducible fabrication of a fiber probe with a nanometric pro-trusion for near-field optics. Appl. Opt., 1997, 36(7): 1496
[31] M. N. Islam, X. K. Zhao et al., High-efficiency and high-resolution fiber-optic probes for nearfield imaging an dspectroscopy, Appl. Phys. Lett., 1997, 71(20):2886
[32] LiuXiumei, WangJia and LiDacheng. Simple device and reproducible approach for
producing high efficiency optical fiber tips for a scanning near-field optical microscope. Rev. of Scient., Instrum., 1998, 69(9):3439-3440
[33] H. Muramatsu, N. Chiba, N. Yamamoto, et.al., Multi-functional SNOM/AFM probe with accurately controlled low spring constant, Ultramicroscopy, 1998, 71:73-79
[34] S. Mononobe, M. Ohtsu, Fabrication of a Pencil-Shaped Fiber Probe for Near-Field Optics by Selective Chemical Etching, J. Lightwave Technology, 1996, 14(10): 2231-2235
[35] S. Mononobe, T. Saiki, S.Koshihara and M. Ohtsu. Opt. Commun., 1998, 146
[36] W．B．艾伦，纤维光学，轻工业出版社，1981
[37] M．玻恩，E．沃而夫 著，光学原理(上册)，科学出版社，1978，第554页
[38] E. Betzig, P. L. Finn, J. S. Weiner, Combined Shear Force and Near-field Scanning Optical Microscopy, Appl Phys Lett, 1992, 60(20):2484-2486
[2] 郭宁，姚骏恩，吴世法等，光子扫描隧道显微镜的研制与样品的显微成像技术，物理，1993，12：742-746
[3] 吴世法，原子力与光子扫描隧道组合显微镜图像分解方法，中国发明专利ZL 96 1 11979．9，CN1177738A，1998
[4] 吴世法，潘石，章健，刘伟，王景芝，黄玉起，AF／PSTM图像分解方法及其数值模拟结果，中国工程科学，2001，8：33-36
[5] G.A. Valaskovic, M. Holton and G. H. Morrison, Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes. Appl. Opt., 1995, 34:1215
[6] D. Zeisel, S. Nettesheim, B. Dutoit and R. Zenobi. Pulsed laser-induced desorption and optical imaging on a nanometer scale with scanning near-field microscopy using chemically etched fiber tips, Appl. Phys. Lett., 1996, 68:2491
[7] E. H. Synge, A suggest method for extending microscopic resolution into ultra-microscopic resolution, Phil. Mag., 1928, 6:356-362
[8] R.J. Moon, Science, 1950, 112:384
[9] J.A. O'Keefe, J. Opt. Soc. Am., 1956, 46:359
[10] E.A. Ash and G. Nichols. Super-resolution aperture scanning microscope, Nature, 1972, 237:510-512
[11] R. C. Reddick, R. J. Warmack and T. L. Ferrel. New form of scanning optical microscopy, Phys. Rev., 1989, B39:767-770
[12] A. Haeootanian, E. Berzig, M. Isaacson, and A. Lewis, Appl. Phys. Lett. 1986, 49:674
[13] E. Betzig and J. Trauman, T. D. Harris, T. S. Winer, and R. L. Kostelak, Science, 1991, 251:1648
[14] E. Betzig and R. J. Chichester, Science, 1992, 262:1422
[15] 朱星，近场光学与近场光学显微镜，北京大学学报(自然科学版)，33(3)：394
[16] 吴世法，简国树，潘石，纳米分辨近场光学显微镜显微成象技术现状，中国图形图像学报，2000，5(A)：8
[17] T. L. Ferrel, R. J. Warmack, and R. C. Reddick, Photon scanning tunneling microscopy, United states Patent No: 5 018 865, 1991 5 28
[18] 吴世法，近代成像技术与图像处理，国防工业出版社
[19] S. Alexander, et al., J. Apply. Phys., 1989, 65:164
[20] 张树霖，近场光学显微镜及其应用，科学出版社，2000，47-69
[21] C. Mihaliea, W. Scholz, S. Werner, S. Munster and R. kassing, Appl. Phys. Lett., 1995, 68:3531
[22] M. Specht, J. Pedamig, W. Heckl and T. Hansch. Phys. Rev. Lett., 1992, 68:476
[23] T. Leinhos, T. Stopka, and E. Oesterschulze, Appl. Phys. A-Mat. Sci., 1992, 60:2957
[24] D. Bohm, Quantum Theory, Prentice Hall, Englewood Cliffs, NJ, 1951,614-619
[25] K. S. Yee, IEEE Trans. Antennas Propagat., 1966, AP14:302
[26] 周庆，朱星，李宏福，近场光学中光纤探针的光强分布，物理学报，2000，49(2)：210-214
[27] 黄祝明，张国平，光纤锥探针传输特性的研究，物理与工程，2002，12(2)：45-47
[28] A．W．Snyder，J．Love，光波导理论(中译本)，人民邮电出版社，1991，第19章
[29] T. Saiki, S. Mononobe, M. Ohtsu et al. Tailoring a high-transmission fiber probe for photon scanning tunneling microscope. Appl. Phys. Lett., 1996, 68(19): 2612
[30] S. Mononobe, M. Naya, T. Saiki et al. Reproducible fabrication of a fiber probe with a nanometric pro-trusion for near-field optics. Appl. Opt., 1997, 36(7): 1496
[31] M. N. Islam, X. K. Zhao et al., High-efficiency and high-resolution fiber-optic probes for nearfield imaging an dspectroscopy, Appl. Phys. Lett., 1997, 71(20):2886
[32] LiuXiumei, WangJia and LiDacheng. Simple device and reproducible approach for
producing high efficiency optical fiber tips for a scanning near-field optical microscope. Rev. of Scient., Instrum., 1998, 69(9):3439-3440
[33] H. Muramatsu, N. Chiba, N. Yamamoto, et.al., Multi-functional SNOM/AFM probe with accurately controlled low spring constant, Ultramicroscopy, 1998, 71:73-79
[34] S. Mononobe, M. Ohtsu, Fabrication of a Pencil-Shaped Fiber Probe for Near-Field Optics by Selective Chemical Etching, J. Lightwave Technology, 1996, 14(10): 2231-2235
[35] S. Mononobe, T. Saiki, S.Koshihara and M. Ohtsu. Opt. Commun., 1998, 146
[36] W．B．艾伦，纤维光学，轻工业出版社，1981
[37] M．玻恩，E．沃而夫 著，光学原理(上册)，科学出版社，1978，第554页
[38] E. Betzig, P. L. Finn, J. S. Weiner, Combined Shear Force and Near-field Scanning Optical Microscopy, Appl Phys Lett, 1992, 60(20):2484-2486