Flexible highly sensitive hydrogen gas sensor based on a TiO₂ thin film on polyimide foil

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• 作者：O. Kr&scaron ; ko ; ^{ondrej.krsko@fmph.uniba.sk}Author Vitae ; T. Plecenik ; ^{tomas.plecenik@fmph.uniba.sk}Author Vitae ; T. RochAuthor Vitae ; B. GrančičAuthor Vitae ; L. SatrapinskyyAuthor Vitae ; M. Truchlý ; Author Vitae ; P. ĎurinaAuthor Vitae ; M. GregorAuthor Vitae ; P. Kú ; &scaron ; Author Vitae ; A. PlecenikAuthor Vitae
• 关键词：Hydrogen ; Gas sensor ; Flexible ; TiO2
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：240
• 期：Complete
• 页码：1058-1065
• 全文大小：2734 K
• 卷排序：240

文摘

A flexible semiconductor gas sensor of hydrogen is presented. The sensor is based on a TiO2 thin film on polyimide foil. The sensor is capable of room-temperature operation with response of 104 for 1% H2. Bending the sensor 1000 times over diameter of 10 mm did not reduce its performance.