AlTiCrN coatings deposited by hybrid HIPIMS/DC magnetron co-sputtering

详细信息    查看全文

• 作者：Hui Zhou^a ; Jun Zheng^a ; ^{zhengj510@163.com} ; Binhua Gui^a ; Dongsen Geng^b ; Qimin Wang^b
• 关键词：AlTiCrN coatings ; Hybrid coating process ; High power impulse magnetron sputtering ; Coating microstructure ; Tribological behavior
• 刊名：Vacuum
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：136
• 期：Complete
• 页码：129-136
• 全文大小：4042 K
• 卷排序：136

文摘

The AlTiCrN coatings with different Cr contents were deposited from AlTi and Cr targets using a hybrid coating process combining HIPIMS and DCMS. The hardness of the AlTiCrN coatings varied as a function of Cr content, with peak hardness and elastic modulus of 33.7 GPa and 469.5 GPa being obtained at 8.9 at.% Cr. Investigation of the high temperature tribological behavior by changing the Cr content and test temperatures.