大型机件测距系统精度分析
|
摘要
为了提高无导轨大尺寸测量系统的精度,以具有较强稳定度和抗干扰能力的双纵模热稳频He-Ne激光器为光源,采用数字滤波提高信噪比,利用小波变换具有空间局部化的特性和表征信号奇异性的能力,在适当尺度下刻画大尺寸测量信号的过零点,进行小波锐化,以提高节点对准精度。研究结果表明:室外时拍频频率稳定度可达10-7;系统节点对准误差小于30μm;小波锐化能把双纵模无导轨大尺寸拍频干涉仪的测量精度从60μm提高到30μm。
The frequency-stabilized He-Ne laser with thermoregulation was used as the light source,which operates on the double longitudinal modes,has high frequency stability and good anti-disturbance performance. Numeral filter was used to raise signal-to-noise. Using the wavelet transform with the characteristic of spatial localization and signal singularity detection ability,the local zero point of single from the large size measurement system were accurately detected on appropriate scale and edged. The precision of ranger of laser no-guide larger size was raised. Experiment results show that the beat-frequency stability can reach 10-7 in open air,error of node orientation is lower than 30 μm and wavelet transform can increase non-guide beat-wave ranger's precision from 60 μm to 30 μm.
The frequency-stabilized He-Ne laser with thermoregulation was used as the light source,which operates on the double longitudinal modes,has high frequency stability and good anti-disturbance performance. Numeral filter was used to raise signal-to-noise. Using the wavelet transform with the characteristic of spatial localization and signal singularity detection ability,the local zero point of single from the large size measurement system were accurately detected on appropriate scale and edged. The precision of ranger of laser no-guide larger size was raised. Experiment results show that the beat-frequency stability can reach 10-7 in open air,error of node orientation is lower than 30 μm and wavelet transform can increase non-guide beat-wave ranger's precision from 60 μm to 30 μm.
引文
[1]Gelmini E,Minoni U,Docchio F.Tunable,double2wavelength heterodyne detection interferometer for absolute distance measurements[J].Opt Lett,1994,19(3):213-215.
[2]Schwider J.Phase shifting interferometry:Reference phase error reduction[J].Appl Opt,1989,28(18):3889-3892.
[3]Dandiker R,Thalmann R,ProguèD.Two-wavelength laser interferometry using super heterodyne detection[J].Opt Lett,1988,13(5):339-341.
[4]LI Bin,LIANG Jin-wen.Measurement of large internal diameters based on dual-wavelength heterodyne interferometer[J].Precision Engineering,1997,21(1):36-42.
[5]冯其波,梁晋文.3.39μm双波长拍波干涉仪绝对测量大直径方法的研究[J].中国激光,1994,21(11):897-903.FENG Qi-bo,LIANG Jin-wen.Study of absolute measurement of large diameters by a3.39μm dual wavelength beat wave interferometer[J].Chinese Lasers,1994,21(11):897-903.
[6]周秀云,周肈飞,张涛.石油机械大尺寸零件精密测量装置研究[J].西南石油大学学报,2007,29(4):145-148.ZHOU Xiu-yun,ZHOU Zhao-fei,ZHANG Tao.Large size precision measurement device for petroleum machine[J].Journal of Southwest Petroleum University,2007,29(4):145-148.
[7]周秀云,张涛.双纵模双频激光精密测距仪的研究[J].机械,2004,31(12):14-15.ZHOU Xiu-yun,ZHANG Tao.Precision ranger finder of two-longitudinal modes and two frequencies laser[J].Machine,2004,31(12):14-15.
[8]张涛,周肇飞,周秀云.实用双纵模激光精密测量仪[J].四川大学学报:工程科学版,2001,33(3):89-91.ZHANG Tao,ZHOU Zhao-fei,ZHOU Xiu-yun,et al.Practical precise range based on the laser with two longitudinal modes[J].Journal of Sichuan University:Engineering Science Edition,2001,33(3):89-91.
[9]周肇飞,张涛,朱目成.双纵模激光拍频干涉仪的研究[J].中国激光,2005,32(1):101-104.ZHOU Zhao-fei,ZHANG Tao,ZHU Mu-cheng.Research on the laser beat-wave interferometry[J].Chinese Journal of Lasers,2005,32(1):101-104.
[10]朱目成,周肇飞,张涛.He-Ne拍波激光干涉仪的研究[J].激光技术,2004,28(5):531-533.ZHU Mu-cheng,ZHOU Zhao-fei,ZHANG Tao.Research of the He-Ne laser beat-wave interferometer[J].Laser Technology,2004,28(5):531-533.
[11]蔡鹏,周肈飞,张涛,等.双纵模热稳频激光源的模糊PID控制研究[J].四川大学学报:工程科学版,2006,38(1):154-158.CAI Peng,ZHOU Zhao-fei,ZHANG Tao,et al.Fuzzy PID control of thermal frequency-stabilizing laser light source with double-longitudinal mode[J].Journal of Sichuan University:Engineering Science Edition,2006,38(1):154-158.
[12]尹伯彪,杨春生,张涛,等.双纵模热稳频模糊控制方法的研究[J].中国测试技术,2003,29(3):15-16,44.YIN Bo-biao,YANG Chun-sheng,ZHANG Tao,et al.The studying on the fuzzy controlling method of the frequency stabilization of dual-wavelength laser[J].China Measurement Technology,2003,29(3):15-16,44.
[13]迟桂纯.激光在计量测试技术中的应用[M].成都:成都科技大学出版社,1994.CHI Gui-chun.Laser applying in test and measurement technology[M].Chengdu:University of Science and Technology Chengdu Press,1994.
[14]刘春生,张晓春.实用小波分析[M].徐州:中国矿业大学出版社,2002:92-101.LIU Chun-sheng,ZHANG Xiao-chun.Practicality wavelet analysis[M].Xuzhou:China University of Mining Technology Press,2002:92-101.
[15]王文明,钟掘,谭建平.基于自适应滤波的铸轧板形检测信号分析[J].中国有色金属学报,2001,11(6):1013-1016.WANG Wen-ming,ZHONG Jue,TANG Jian-ping.Roll casting flatness detection signal analysis based on adaptive filtering[J].The Chinese Journal of Nonferrous Metal,2001,11(6):1013-1016.
[16]中国生,徐国元,江文武.基于小波变换的爆破地震信号去噪的应用[J].中南大学学报:自然科学版,2006,37(1):155-159.ZHONG Guo-sheng,XU Guo-yuan,JIANG Wen-wu.Application of de-noising in blasting seismic signals based on wavelet transform[J].Journal of Central South University:Science and Technology,2006,37(1):155-159.
[2]Schwider J.Phase shifting interferometry:Reference phase error reduction[J].Appl Opt,1989,28(18):3889-3892.
[3]Dandiker R,Thalmann R,ProguèD.Two-wavelength laser interferometry using super heterodyne detection[J].Opt Lett,1988,13(5):339-341.
[4]LI Bin,LIANG Jin-wen.Measurement of large internal diameters based on dual-wavelength heterodyne interferometer[J].Precision Engineering,1997,21(1):36-42.
[5]冯其波,梁晋文.3.39μm双波长拍波干涉仪绝对测量大直径方法的研究[J].中国激光,1994,21(11):897-903.FENG Qi-bo,LIANG Jin-wen.Study of absolute measurement of large diameters by a3.39μm dual wavelength beat wave interferometer[J].Chinese Lasers,1994,21(11):897-903.
[6]周秀云,周肈飞,张涛.石油机械大尺寸零件精密测量装置研究[J].西南石油大学学报,2007,29(4):145-148.ZHOU Xiu-yun,ZHOU Zhao-fei,ZHANG Tao.Large size precision measurement device for petroleum machine[J].Journal of Southwest Petroleum University,2007,29(4):145-148.
[7]周秀云,张涛.双纵模双频激光精密测距仪的研究[J].机械,2004,31(12):14-15.ZHOU Xiu-yun,ZHANG Tao.Precision ranger finder of two-longitudinal modes and two frequencies laser[J].Machine,2004,31(12):14-15.
[8]张涛,周肇飞,周秀云.实用双纵模激光精密测量仪[J].四川大学学报:工程科学版,2001,33(3):89-91.ZHANG Tao,ZHOU Zhao-fei,ZHOU Xiu-yun,et al.Practical precise range based on the laser with two longitudinal modes[J].Journal of Sichuan University:Engineering Science Edition,2001,33(3):89-91.
[9]周肇飞,张涛,朱目成.双纵模激光拍频干涉仪的研究[J].中国激光,2005,32(1):101-104.ZHOU Zhao-fei,ZHANG Tao,ZHU Mu-cheng.Research on the laser beat-wave interferometry[J].Chinese Journal of Lasers,2005,32(1):101-104.
[10]朱目成,周肇飞,张涛.He-Ne拍波激光干涉仪的研究[J].激光技术,2004,28(5):531-533.ZHU Mu-cheng,ZHOU Zhao-fei,ZHANG Tao.Research of the He-Ne laser beat-wave interferometer[J].Laser Technology,2004,28(5):531-533.
[11]蔡鹏,周肈飞,张涛,等.双纵模热稳频激光源的模糊PID控制研究[J].四川大学学报:工程科学版,2006,38(1):154-158.CAI Peng,ZHOU Zhao-fei,ZHANG Tao,et al.Fuzzy PID control of thermal frequency-stabilizing laser light source with double-longitudinal mode[J].Journal of Sichuan University:Engineering Science Edition,2006,38(1):154-158.
[12]尹伯彪,杨春生,张涛,等.双纵模热稳频模糊控制方法的研究[J].中国测试技术,2003,29(3):15-16,44.YIN Bo-biao,YANG Chun-sheng,ZHANG Tao,et al.The studying on the fuzzy controlling method of the frequency stabilization of dual-wavelength laser[J].China Measurement Technology,2003,29(3):15-16,44.
[13]迟桂纯.激光在计量测试技术中的应用[M].成都:成都科技大学出版社,1994.CHI Gui-chun.Laser applying in test and measurement technology[M].Chengdu:University of Science and Technology Chengdu Press,1994.
[14]刘春生,张晓春.实用小波分析[M].徐州:中国矿业大学出版社,2002:92-101.LIU Chun-sheng,ZHANG Xiao-chun.Practicality wavelet analysis[M].Xuzhou:China University of Mining Technology Press,2002:92-101.
[15]王文明,钟掘,谭建平.基于自适应滤波的铸轧板形检测信号分析[J].中国有色金属学报,2001,11(6):1013-1016.WANG Wen-ming,ZHONG Jue,TANG Jian-ping.Roll casting flatness detection signal analysis based on adaptive filtering[J].The Chinese Journal of Nonferrous Metal,2001,11(6):1013-1016.
[16]中国生,徐国元,江文武.基于小波变换的爆破地震信号去噪的应用[J].中南大学学报:自然科学版,2006,37(1):155-159.ZHONG Guo-sheng,XU Guo-yuan,JIANG Wen-wu.Application of de-noising in blasting seismic signals based on wavelet transform[J].Journal of Central South University:Science and Technology,2006,37(1):155-159.
版权所有：© 2023 中国地质图书馆 中国地质调查局地学文献中心