高精度硅微简谐振子的设计与制作工艺
摘要
介绍了MOEMS加速度地震检波器中敏感元件——简谐振子的工作和设计原理,并详细讨论了影响简谐振子腐蚀质量的因素.在实验中采用硅各向异性腐蚀法,制作出了高精度的硅微简谐振子.改进浓度配比的腐蚀液,在80℃时,腐蚀速率控制在(0.53±0.2)μm.测试结果表明:SiO2控制精度达到0.1μm,可应用于光电集成加速度地震检波器的集成光学器件中.
The principle of operation and design of the harmonic oscillator was introduced and the factors influencing the etching quality of the harmonic oscillator were analyzed in detail.In experiment,the fabrication technology was studied and improved to get the high quality of harmonic oscillator. At 80 ℃,the etching velocity of the improved etching liquid was controlled in (0.53±0.2) μm range.The testing result indicates that the control precision of SiO2 is 0.1 μm,which can be applied in the integrated optical chip of the photoelectric integrated acceleration seismic geophone.
The principle of operation and design of the harmonic oscillator was introduced and the factors influencing the etching quality of the harmonic oscillator were analyzed in detail.In experiment,the fabrication technology was studied and improved to get the high quality of harmonic oscillator. At 80 ℃,the etching velocity of the improved etching liquid was controlled in (0.53±0.2) μm range.The testing result indicates that the control precision of SiO2 is 0.1 μm,which can be applied in the integrated optical chip of the photoelectric integrated acceleration seismic geophone.
引文
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[7]En De,Chen Caihe,Cui Yuming.Hybrid-integrated optical ac-celerations seismometer and its digital processing system[C]//Proceedings of SPIE———The International Society for Optical Engineering.Beijing,China,2004:424—433.
[8]恩德,陈才和,李岷,等.混合集成光学加速度计的信号处理和总体灵敏度[J].光子学报,2004,33(12):1428—1433.
[9]恩德,陈才和,崔宇明,等.集成光学Michelson干涉型加速度地震检波器[J].中国激光,2005,32(3):399—403.
[2]Chen Caihe,Wu Bo,Ding Guilan,et al.Researchandfabrication onintegrated optical chip of hybrid-integrated optical acceleration seismic geophone[C]//Proceedings ofSPIE—The International Societyfor Optical Engineering.Shanghai,China,2002,4919:1—7.
[3]Wu Bo,Chen Caihe.Structure design of Si-based M-Z interfer-ence acceleration seismic geophone[C]//Proceedings ofSPIE—The International Societyfor Optical Engineering.Beijing,China,2004:19—25.
[4]Dan Haronian.Alow-cost micromechanical accelerometer with integrated solid-state sensor[J].Sensors and Actuators,2000,84A:149—155.
[5]Barbour Neil,Schmidt George.Inertial sensor technology trends[J].IEEESensors Journal,2001,1(4):332—339.
[6]En De,Chen Caihe,Cui Yuming.Researchandfabrication of in-tegrated optical chip in an acceleration seismic geophone[C]//3th International Symposium on Instrumentation Science and Technology.Xi an,China,2004,8:533—538.
[7]En De,Chen Caihe,Cui Yuming.Hybrid-integrated optical ac-celerations seismometer and its digital processing system[C]//Proceedings of SPIE———The International Society for Optical Engineering.Beijing,China,2004:424—433.
[8]恩德,陈才和,李岷,等.混合集成光学加速度计的信号处理和总体灵敏度[J].光子学报,2004,33(12):1428—1433.
[9]恩德,陈才和,崔宇明,等.集成光学Michelson干涉型加速度地震检波器[J].中国激光,2005,32(3):399—403.
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