阻尼比对微电子厂房微振动响应的影响研究
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摘要
采用有限元分析软件SAP2000,对某微电子厂房光刻区工作平台结构进行建模分析,通过对基底输入实测微振数据,计算平台的结构微振动响应,得出工作平台上一些典型点在不同阻尼比时的加速度、速度和位移反应谱曲线以及时程曲线。分析结果表明,结构在不同方向具有不同的阻尼比,且阻尼比与微振动响应的反应谱峰值之间的关系可用二次曲线来拟合。
This paper simulated the structural microvibration response of the work platform structure of the optical lithography zone in a micro-electronics plant by using the finite element analysis software SAP2000.With the field-measured data of microvibration inputted at the base of the work platform structure to analyze its vibration response,the paper obtained the acceleration time-history curves,the response spectra at three directions with different damping ratios.The results indicate that there are different damping ratios at different directions;and microvibration response at each direction can be approximated as a quadratic curve of damping ratio.
This paper simulated the structural microvibration response of the work platform structure of the optical lithography zone in a micro-electronics plant by using the finite element analysis software SAP2000.With the field-measured data of microvibration inputted at the base of the work platform structure to analyze its vibration response,the paper obtained the acceleration time-history curves,the response spectra at three directions with different damping ratios.The results indicate that there are different damping ratios at different directions;and microvibration response at each direction can be approximated as a quadratic curve of damping ratio.
引文
[1]马小东,张涛.高精密仪器平台振动控制的研究现状和发展[J].装备制造技术,2008(5):119-120.
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[4]Jones C J C,Block J R.Prediction of ground vibration from freighttrains[J].Journal of Sound Vibration,1996,193(1):205～210.
[5]王玲玲,李耀刚,陈冠国.振动主动控制技术的研究现状及发展趋势[J].农机化研究,2005(5):30-32.
[6]杨智春,徐幼麟.高科技设施的微振动一体化主动控制[J].西北工业大学学报,2003,21(6):646-647.
[7]Yoshioka H,Takahashi Y,Katayama K,et al.An ActiveMicrovibration Isolation System for Hi-Tech Manufacturing Facili-ties.Journal of Vibration and Acoustics ASME,2001,123:269-275.
[8]Sumeet S.Aphale,Andrew J.Fleming and S.O.RezaMoheimani.Integral control of smart structures with collocated sen-sors and actuators.Proceedings of the European Control Conference2007 Kos,Greece,July 2-5,2007:2595-2602.
[9]贾振元,杨兴,郭东明.超磁致伸缩材料控制模型的研究[J].压电与声光,2001,4(2):164-166.
[10]刘勺斌,杨洪波,刘洋,等.基于Stewart平台的空间光学仪器主动隔振系统研究[J].噪声与振动控制,2008(2):10-14.
[11]李平,王迤,李增,等.微振动平台振动控制的仿真与实验研究[J].噪声与振动控制,2009(5):1-3.
[12]胡晓勇,熊峰.高科技厂房结构微振响应分析[J].地震工程与工程振动,2006(4):56-62.
[2]Heckl M,Hauck G,Weaschureck R.Structure-borne sound andvibration from rail traffic[J].Journal of Sound and Vibration,1996,193(1):175-184.
[3]Madshus C,Bessason B,Harvik L.Prediction model for lowfrequency vibration from high speed railways on soft ground[J].Journal of Sound and Vibration,1996,193(1):195～203.
[4]Jones C J C,Block J R.Prediction of ground vibration from freighttrains[J].Journal of Sound Vibration,1996,193(1):205～210.
[5]王玲玲,李耀刚,陈冠国.振动主动控制技术的研究现状及发展趋势[J].农机化研究,2005(5):30-32.
[6]杨智春,徐幼麟.高科技设施的微振动一体化主动控制[J].西北工业大学学报,2003,21(6):646-647.
[7]Yoshioka H,Takahashi Y,Katayama K,et al.An ActiveMicrovibration Isolation System for Hi-Tech Manufacturing Facili-ties.Journal of Vibration and Acoustics ASME,2001,123:269-275.
[8]Sumeet S.Aphale,Andrew J.Fleming and S.O.RezaMoheimani.Integral control of smart structures with collocated sen-sors and actuators.Proceedings of the European Control Conference2007 Kos,Greece,July 2-5,2007:2595-2602.
[9]贾振元,杨兴,郭东明.超磁致伸缩材料控制模型的研究[J].压电与声光,2001,4(2):164-166.
[10]刘勺斌,杨洪波,刘洋,等.基于Stewart平台的空间光学仪器主动隔振系统研究[J].噪声与振动控制,2008(2):10-14.
[11]李平,王迤,李增,等.微振动平台振动控制的仿真与实验研究[J].噪声与振动控制,2009(5):1-3.
[12]胡晓勇,熊峰.高科技厂房结构微振响应分析[J].地震工程与工程振动,2006(4):56-62.
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