真空设计节能减排低碳原则的新思考
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摘要
传统的真空设计中,对于真空室设计,为了节约加工成本,采用易加工简单的真空室,对抽真空系统设计,经常选用极限真空较高的机械泵、罗茨泵、扩散泵组合系统,但当前从节能减排的低碳要求出发,往往是不合理的,而且用户日后在长期运行中,能耗很大,使应用真空的产品后续成本大为提高。为了创新设计,本文提出真空设计中应更注重节能减排的低碳原则的新思考。
In respect to the traditional vacuum design,the simple and easy vacuum chamber has been designed in order to save processing cost.The whole puming system is usually composed of the mechanical pump,Roots pump,and diffusion pump to obtain high ultimate vacuum degree.It is currently not reasonable according to the low carbon principle in vacuum design by these methods,moreover in long-term run,such vacuum system costs a lot in energy consumption.In order to make innovation,this paper puts forward a new ponder in establishing a low carbon principle of energy saving and emission reduction in vacuum design.
In respect to the traditional vacuum design,the simple and easy vacuum chamber has been designed in order to save processing cost.The whole puming system is usually composed of the mechanical pump,Roots pump,and diffusion pump to obtain high ultimate vacuum degree.It is currently not reasonable according to the low carbon principle in vacuum design by these methods,moreover in long-term run,such vacuum system costs a lot in energy consumption.In order to make innovation,this paper puts forward a new ponder in establishing a low carbon principle of energy saving and emission reduction in vacuum design.
引文
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[2]真空技术的发展与展望[EB/OL].百度文库,www.baidu.com.
[3]王西龙,等.罗茨真空泵试验方法的研究[J].真空,2011,48(2):67.
[4]王殿儒.一种电弧磁控共生靶的离子镀膜机[P].中国专利:201020149793,2010-4-6.
[5]乌克兰BTO2型海绵钛真空熔炼炉资料[R].北京长城钛金公司资料室.
[6]王殿儒,胡江,胡建德.一种具有中空横卧式真空室的离子镀膜机[P].中国专利:201020565646,2010-10-19.
[7]微型真空室Report 5 Vacuum chamber air bearing stage.A precision air bearing stage,containing a moving vacuumchamber[EB/OL],http://www.newwayairbearings.com.
[8]古向东,等.密封性能良好的真空室[P].中国专利:201010216105,2010-10-27.
[9]分子增压泵:MB系列分子增压泵使用说明书[R].深圳摩尔真空技术有限公司.
[10]储继国.分子增压泵的结构、性能及其应用[J].真空,2006,(1).
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