光学系统受迫振动的激光测量方法
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摘要
将激光信号与高帧频CCD结合,解决了光学系统中振动信号和激光信号之间的转换问题,不仅能够测量振动对系统光束指向稳定性的影响,而且能够得到振动信号本身的频率特性。利用该方法对振源为150Hz和200Hz两种条件下的光学系统受迫振动进行测量,得到了与输入信号相吻合的振动信号属性。通过实验与分析得知:时域振幅测量精度为6.25μm,频域分辨力为2Hz,方法简便高效,测量结果准确,已应用于角多路准分子激光主振荡功率放大器系统打靶试验平台光束指向稳定性的研究中。
A forced vibration measurement method by laser combining the laser signal and high frequency CCD in optical systems is introduced.The method solves the conversion problem between the vibration signal and laser signal in optical systems,which can not only measure the impact of vibration on the beam stability,but also acquire the frequency characteristics of vibration signals.Forced vibration in an optical system is measured when the frequencies of vibration signals are 150 Hz and 200 Hz by using the method and the attributes of the vibration signals obtained fits those of the input signals.Test and analysis results demonstrate that the method has a time amplitude uncertainty of 6.25 μm and frequency resolution of 2 Hz.The handy and efficient method,whose measurement is precise,has been applied to the beam pointing stability study of the multiplexing excimer MOPA laser targeting test platform accordingly.
A forced vibration measurement method by laser combining the laser signal and high frequency CCD in optical systems is introduced.The method solves the conversion problem between the vibration signal and laser signal in optical systems,which can not only measure the impact of vibration on the beam stability,but also acquire the frequency characteristics of vibration signals.Forced vibration in an optical system is measured when the frequencies of vibration signals are 150 Hz and 200 Hz by using the method and the attributes of the vibration signals obtained fits those of the input signals.Test and analysis results demonstrate that the method has a time amplitude uncertainty of 6.25 μm and frequency resolution of 2 Hz.The handy and efficient method,whose measurement is precise,has been applied to the beam pointing stability study of the multiplexing excimer MOPA laser targeting test platform accordingly.
引文
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[8]陈骥,王鑫,曹久大,等.高速CCD激光位移传感器[J].光学精密工程,2008,16(4):611-616.(Chen Ji,Wang Xin,Cao Jiuda,et al.De-velopment of high-speed CCD laser displacement sensor.Optics and Precision Engineering,2008,16(4):611-616)
[9]李小兵,彭仁军,吴健.目标角振动的散斑法实时测量[J].强激光与粒子束,2004,16(4):413-416.(Li Xiaobing,Peng Renjun,Wu Jian.Real-time measurement of the object angular vibration by laser speckles.High Power Laser and Particle Beams,2004,16(4):413-416)
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[11]王大辉,赵军,赵学庆,等.角多路准分子激光MOPA系统光束定位误差分配研究[J].激光与光电子学进展,2011,48(3):1-4.(WangDahui,Zhao Jun,Zhao Xueqing,et al.Study on beam positioning error budget of angular multiplexing excimer MOPA laser system.Laserand Optoelectronics Progress,2011,48(3):1-4)
[12]王大辉,赵学庆,张永生,等.高功率准分子激光系统光束指向稳定性模拟[J].强激光与粒子束,2011,23(8):2039-2043.(Wang Dahui,Zhao Xueqing,Zhang Yongsheng,et al.Simulation of beam pointing stability on targeting plane of high power excimer laser system.HighPower Laser and Particle Beams,2011,23(8):2039-2043)
[13]王雁,赵忠杰,马社.光学平台微角振动激光探测方法研究[J].强激光与粒子束,2007,19(1):40-44.(Wang Yan,Zhao Zhongjie,MaShe.Laser detection of micro-angle vibration of optics bench.High Power Laser and Particle Beams,2007,19(1):40-44)
[14]黄维通.Visual C++面向对象与可视化程序设计[M].北京:清华大学出版社,2003:10-398.(Huang Weitong.Visual C++object ori-ented and visual program design.Beijing:Tsinghua University Press,2003:10-398)
[15]Gonzalez C,Woods R E.数字图像处理[M].2版.北京:电子工业出版社,2003:1-300.(Gonzalez C,Woods R E.Digital image processing.2nd ed.Beijing:Publishing House of Electronics Industry,2003:1-300)
[2]Trummer J,Foley J,Shaw S.Stability of optical elements in the NIF target area building[C]//Proc of SPIE.1999,3492:363-371.
[3]周忆,张军伟,冯斌,等.数字地震仪在精密装置支撑结构微振动分析中的应用[J].四川大学学报:工程科学版,2006,38(6):144-147.(Zhou Yi,Zhang Junwei,Feng Bin,et al.The application of digital seismograph in the microvibration analysis of the precision optical equip-ment.Journal of Sichuan University:Engineering Science Edition,2006,38(6):144-147)
[4]Paul R,Youder Jr.光机系统设计[M].北京:机械工业出版社,2008:1-200.(Paul R,Youder Jr.Opto-mechannical systems design.Bei-jing:China Machine Press,2008:1-200)
[5]王伯雄.测试技术基础[M].北京:清华大学出版社,2003:419-430.(Wang Boxiong.Foundation of measurement technology.Beijing:Tsinghua University Press,2003:419-430)
[6]杜振辉,李淑清,蒋诚志,等.激光光栅多普勒效应微小振动测量[J].光学学报,2004,24(6):834-835.(Du Zhenhui,Li Shuqing,JiangChengzhi,et al.Small vibration measurement using laser grating Doppler effect.Acta Optica Sinica,2004,24(6):834-835)
[7]李静,黄新龙,赵罡.在线转子振动参数的光电检测[J].光学技术,2006,32(4):565-570.(Li Jing,Huang Xinlong,Zhao Gang.Pho-to-electric measurement on vibration parameters of on-line rotor.Optical Technique,2006,32(4):565-570)
[8]陈骥,王鑫,曹久大,等.高速CCD激光位移传感器[J].光学精密工程,2008,16(4):611-616.(Chen Ji,Wang Xin,Cao Jiuda,et al.De-velopment of high-speed CCD laser displacement sensor.Optics and Precision Engineering,2008,16(4):611-616)
[9]李小兵,彭仁军,吴健.目标角振动的散斑法实时测量[J].强激光与粒子束,2004,16(4):413-416.(Li Xiaobing,Peng Renjun,Wu Jian.Real-time measurement of the object angular vibration by laser speckles.High Power Laser and Particle Beams,2004,16(4):413-416)
[10]Hunter A M,Hunter R O.Bidirectional amplification with nonsaturable absorption and amplified spontaneous emission[J].IEEE J Quan-tum Electron,1981,17(9):1879-1887.
[11]王大辉,赵军,赵学庆,等.角多路准分子激光MOPA系统光束定位误差分配研究[J].激光与光电子学进展,2011,48(3):1-4.(WangDahui,Zhao Jun,Zhao Xueqing,et al.Study on beam positioning error budget of angular multiplexing excimer MOPA laser system.Laserand Optoelectronics Progress,2011,48(3):1-4)
[12]王大辉,赵学庆,张永生,等.高功率准分子激光系统光束指向稳定性模拟[J].强激光与粒子束,2011,23(8):2039-2043.(Wang Dahui,Zhao Xueqing,Zhang Yongsheng,et al.Simulation of beam pointing stability on targeting plane of high power excimer laser system.HighPower Laser and Particle Beams,2011,23(8):2039-2043)
[13]王雁,赵忠杰,马社.光学平台微角振动激光探测方法研究[J].强激光与粒子束,2007,19(1):40-44.(Wang Yan,Zhao Zhongjie,MaShe.Laser detection of micro-angle vibration of optics bench.High Power Laser and Particle Beams,2007,19(1):40-44)
[14]黄维通.Visual C++面向对象与可视化程序设计[M].北京:清华大学出版社,2003:10-398.(Huang Weitong.Visual C++object ori-ented and visual program design.Beijing:Tsinghua University Press,2003:10-398)
[15]Gonzalez C,Woods R E.数字图像处理[M].2版.北京:电子工业出版社,2003:1-300.(Gonzalez C,Woods R E.Digital image processing.2nd ed.Beijing:Publishing House of Electronics Industry,2003:1-300)
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