固着磨料工艺加工碳化硅反射镜表面质量研究
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摘要
主要研究内容是对固着磨料工艺加工的碳化硅反射镜光学表面进行高频频段的评价。从微观模型入手对表面粗糙度进行了计算机仿真,并将模拟结果与实测结果进行了对比,针对使用不同规格的丸片加工碳化硅反射镜,其表面粗糙度的结果实验值与理论值的偏差比分别为5.97%,3.19%,3.59%,37.37%,并详细分析了出现偏差的可能原因。最后使用分形理论分析了固着磨料工艺加工后获得的光学表面,由此得出固着磨料工艺很容易快速获得较为光滑的光学表面,非常适合于快速表面成形及在较大面形误差的情况下获得较低的表面粗糙度。
RB-SiC mirror surface quality fabricated with different types of fixed abrasive pellets was evaluated.The 2D surface roughness of the mirror was simulated and experimented.The error between the simulation and the experiment were 5.97%,3.19%,3.59%,37.37% respectively.Emerging reason of the error was analyzed in detail after the comparison.The fractal theory was applied on the analysis of the optical mirror surface fabricated with the fixed abrasive technology.The analysis result shows that good surface quality of the RB-SiC mirror can be obtained quickly polished with the fixed abrasive technology.
RB-SiC mirror surface quality fabricated with different types of fixed abrasive pellets was evaluated.The 2D surface roughness of the mirror was simulated and experimented.The error between the simulation and the experiment were 5.97%,3.19%,3.59%,37.37% respectively.Emerging reason of the error was analyzed in detail after the comparison.The fractal theory was applied on the analysis of the optical mirror surface fabricated with the fixed abrasive technology.The analysis result shows that good surface quality of the RB-SiC mirror can be obtained quickly polished with the fixed abrasive technology.
引文
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[4]Wang Xu,Z hang Xuejun,Xu Lingdi,et al.Experiment ofgrindi ng SiC mirror with fixed abrasive[J].Opt PrecisionEng,2009,17(4):771-777.(in Chinese)王旭,张学军,徐领娣,等.固着磨料加工碳化硅反射镜的实验[J].光学精密工程,2009,17(4):771-777.
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[7]Zhang Rongzu.Studies on high-accuracy wavefront testtechniques of optical components in ICF[D].Chengdu:Sichuan University,2003.(in Chinese)张蓉竹.ICF系统光学元件高精度波前检测技术研究[D].四川:四川大学,2003.
[8]Chen Yu,Chen Ling.The Fractal Geometry[M].Beijing:Seismological Press,2005.(in Chinese)陈颙,陈凌.分形几何学[M].北京:地震出版社,2005.
[9]Hasegawa M,Liu J,Okuda K,et al.Calculation of thefractal dimensions of machined surface profiles[J].Wear,1996,192:40-45.
[10]Gao Jiahong,Zhu Meiling,Wang Lin.Application of fractaltheory i n metal cutting process[J].Coal Mine Machinery,2006,27(12):97-99.(in Chinese)高佳宏,朱梅玲,王琳.分形理论在金属切削加工中的应用[J].煤矿机械,2006,27(12):97-99.
[11]Li Chenggui,Tian Jicheng.Structure function and itsapplications for fractal surface[J].Metrology&MeasurementTechnology,1997,17(4):6-8.李成贵,田继成.分形表面的结构函数及其应用[J].航空计测技术,1997,17(4):6-8.
[2]Zhang Xuejun,Zhang Yunfeng,Yu Jingchi.FSGJ-1aspheres automatic fabrication and on-line testing system[J].Opt Precision Eng,1997,5(2):70-76.(in Chinese)张学军,张云峰,余景池,等.FSGJ-1非球面自动加工及在线检测系统[J].光学精密工程,1997,5(2):70-76.
[3]Zheng Ligong,Zhang Xuejun,Zhang Feng.NC surfacing oftwo off-axis aspheric mirrors[J].Opt Precision Eng,2004,12(1):113-117.(in Chinese)郑立功,张学军,张峰.矩形离轴非球面反射镜的数控加工[J].光学精密工程,2004,12(1):113-117.
[4]Wang Xu,Z hang Xuejun,Xu Lingdi,et al.Experiment ofgrindi ng SiC mirror with fixed abrasive[J].Opt PrecisionEng,2009,17(4):771-777.(in Chinese)王旭,张学军,徐领娣,等.固着磨料加工碳化硅反射镜的实验[J].光学精密工程,2009,17(4):771-777.
[5]Zhang Xuejun,Yu Jingchi,Zhang Zhongyu,et al.Analysisof residual fabrication errors for computer controlledpolishing aspherical mirrors[J].Optical Engineering,1997,36(12):3386-3391.
[6]Lawson J K,Wolfe C R,Manes K R,et al.Specification ofoptical components using the power spectral density function[C]//SPIE,1995,2536:38-50.
[7]Zhang Rongzu.Studies on high-accuracy wavefront testtechniques of optical components in ICF[D].Chengdu:Sichuan University,2003.(in Chinese)张蓉竹.ICF系统光学元件高精度波前检测技术研究[D].四川:四川大学,2003.
[8]Chen Yu,Chen Ling.The Fractal Geometry[M].Beijing:Seismological Press,2005.(in Chinese)陈颙,陈凌.分形几何学[M].北京:地震出版社,2005.
[9]Hasegawa M,Liu J,Okuda K,et al.Calculation of thefractal dimensions of machined surface profiles[J].Wear,1996,192:40-45.
[10]Gao Jiahong,Zhu Meiling,Wang Lin.Application of fractaltheory i n metal cutting process[J].Coal Mine Machinery,2006,27(12):97-99.(in Chinese)高佳宏,朱梅玲,王琳.分形理论在金属切削加工中的应用[J].煤矿机械,2006,27(12):97-99.
[11]Li Chenggui,Tian Jicheng.Structure function and itsapplications for fractal surface[J].Metrology&MeasurementTechnology,1997,17(4):6-8.李成贵,田继成.分形表面的结构函数及其应用[J].航空计测技术,1997,17(4):6-8.
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