新型簧片式光纤加速度传感器研究
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摘要
研制了一种新型光纤加速度传感器。基于迈克尔逊干涉仪原理,采用了质量块和可弯曲簧片结构,通过使用竖直绕制传感光纤和横向绕制参考光纤的方式提高了加速度传感器的加速度灵敏度。实验测试了其加速度灵敏度以及横向串扰。在簧片厚为1 mm、质量块质量为208g时,其加速度灵敏度可达556rad/g(g为重力加速度);在噪声本底为10-4rad/(1/2Hz)、加速度传感器工作频率为100Hz时,其可探测的最小加速度信号为200ng/(1/2Hz)(g为重力加速度)。采用该全金属结构,传感器可更好地用于微弱信号检测。
In order to realize a high acceleration sensitivity,we propose a novel all-metal fiber-optic accelerometer based on Michelson interferometric configuration and using flexible reed structure,by winding sensing arm in axial direction and reference arm in transverse direction to improve the accelerometer′s energy conversion efficiency to enhance acceleration sensitivity.Meanwhile,such a structure can decrease the interference between the sensing and reference arms.In this paper,the fundamental principle and the design of the novel sensor are introduced respectively,and the acceleration sensitivity and resonance frequency of this sensor are analyzed theoretically.The acceleration sensitivity and crosstalk are measured by an experiment.When the thickness of the reed is 1 mm and the quality of the mass is 208 g,the acceleration sensivity of the accelerometer is 556 rad/g(54.9 dB).A method is proposed to improve the accelereation sensitivity.Moreover,the crosstalk of the accelerometer is studied and the reason why the accelerometer receives a different crosstalk in a different direction is found.At last,the measurement results imply that when the resolution is 10-4 rad/(1/2Hz)(100 Hz).The minimum detectable acceleration signal of this accelerometer is 200 ng/(1/2Hz).With this all-metal structure,the fiber optic flexible reed accelerometer can better adapt to the special requirements of weak signal detection.
In order to realize a high acceleration sensitivity,we propose a novel all-metal fiber-optic accelerometer based on Michelson interferometric configuration and using flexible reed structure,by winding sensing arm in axial direction and reference arm in transverse direction to improve the accelerometer′s energy conversion efficiency to enhance acceleration sensitivity.Meanwhile,such a structure can decrease the interference between the sensing and reference arms.In this paper,the fundamental principle and the design of the novel sensor are introduced respectively,and the acceleration sensitivity and resonance frequency of this sensor are analyzed theoretically.The acceleration sensitivity and crosstalk are measured by an experiment.When the thickness of the reed is 1 mm and the quality of the mass is 208 g,the acceleration sensivity of the accelerometer is 556 rad/g(54.9 dB).A method is proposed to improve the accelereation sensitivity.Moreover,the crosstalk of the accelerometer is studied and the reason why the accelerometer receives a different crosstalk in a different direction is found.At last,the measurement results imply that when the resolution is 10-4 rad/(1/2Hz)(100 Hz).The minimum detectable acceleration signal of this accelerometer is 200 ng/(1/2Hz).With this all-metal structure,the fiber optic flexible reed accelerometer can better adapt to the special requirements of weak signal detection.
引文
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[15]ZHANG Hui-ying,LIU Hang-hui,WANG De-cheng.Springmanual[M].Beijing:Mechanical Industry Press,1997,374-387.张英会,刘航辉,王德成.弹簧手册[M].北京,机械工业出版社,1997,374-387.
[16]PENG Bao-jin,LIAO Mao,LIAO Yan-biao,et al.Researchon fiber hydrophone sensitivity[J].Acta Photonica Sini-ca,2005,34(11):1633-1638.彭保进,廖茂,廖延彪,等.光纤水听器灵敏度研究[J].光子学报,2005,34(11):1633-1638.
[17]Todd M D,Johnson G A,Althouse B A,et al.Flexuralbeam-based fiber Bragg grating accelerometers[J].Photonics Technology Letter,1998,10(11):1605-1607.
[2]Lin Y B,Pan C L,Kuo Y H,et al.Online monitoring ofhighway bridge construction using fiber Bragg gratingsensors[J].Smart Materials&Structures,2005,14(5):1075-1082.
[3]Pechstedt R D,Jackson D A.Design of a compliant-cylin-der-type fiber-optic accelerometer:theory and experi-ment[J].Applied.Optic,1995,34(16):3009-3017.
[4]ZENG Nan,SHI Chun-zheng,ZHANG Min,et al.A3-Com-ponent fiber-optic accelerometer for well logging[J].Journal of Optoelectronics.Laser,2005,16(8):901-905.曾楠,施纯峥,张敏,等.一种可用于油藏监测的3分量光纤加速度传感器[J].光电子.激光,2005,16(8):901-905.
[5]Moro E A,Todd M D,Puckett A.A performance compari-son of transducer designs for interferometric fiber opticaccelerometers[A].Proc.Smart Sensor Phenomena,Technology,Networks,and Systems[C].2010,7648:76480G1-76480G12.
[6]Chen G Y,Zhang X L,Brambilla G,et al.Theoretical andexperimental demonstrations of a microfiber-based flexur-al disc accelerometer[J].Optics Lett.,2011,36(18):3669-3671.
[7]JIANG Dong-shan,ZHANG Fa-xiang,ZHANG Wen-tao,etal.Reseach on a fiber optic accelerometer based ondouble-metal diaphragm for seabed seismic detectionapplication[J].Journal of Optoelectronics.Laser,2012,23(8):1436-1441.蒋东山,张发祥,张文涛,等.基于双金属膜片结构的海底地震勘探光纤加速度传感器研究[J].光电子.激光,2012,23(8):1436-1441.
[8]LIU Qin-peng,QIAO Xue-guang,ZHAO Jian-lin,et al.Low-frequency FBG accelerometer based on double cantileverbeam[J].Journal of Optoelectronics.Laser,2011,22(8):1119-1123.刘钦朋,乔学光,赵建林,等.双悬梁光纤布拉格光栅低频加速度传感器[J].光电子.激光,2011,22(8):1119-1123.
[9]LI Lan,DONG Xin-yong,ZHAO Chun-liu,et al.A tempera-ture independent fiber Bragg grating accelerometer[J].Journal of Optoelectronics.Laser,2010,21(11):1618-1620.李岚,董新永,赵春柳,等.一种对温度不敏感的光纤布拉格光栅加速度计[J].光电子.激光,2010,21(11):1618-1620.
[10]XIAO Hao,LI Fang,WANG Yong-jie,et al.High-resolu-tion fiber laser sensor system[J].Chinese Journal of La-sers,2008,35(1):87-91.肖浩,李芳,王永杰,等.高分辨率光纤激光器传感系统研究[J].中国激光,2008,35(1):87-91.
[11]LIU Qin-peng,QIAO Xue-guang,ZHAO Jian-lin,et al.Study on fiber Bragg grating acceleration sensing basedon elastic tube[J].Journal of Optoelectronics.Laser,2012,23(7):1227-1232.刘钦朋,乔学光,赵建林,等.基于弹性管的光纤布拉格光栅加速度传感研究[J].光电子.激光,2012,23(7):1227-1232.
[12]HOU Yue-feng,LU Zhi-min,ZHANG Wen-tao,et al.Fiberaccelerometer based on doubled-cantilever structure[J].Journal of Optoelectronics.Laser,2012,23(4):644-648.侯跃峰,路智敏,张文涛,等.基于双悬臂梁结构的光纤加速度传感器[J].光电子.激光,2012,23(4):644-648.
[13]Pechstedt R D,Jackson D A.Performance analysis of afiber-optic accelerometer based on a compliant cylinderdesign[J].Review of Scientific Instruments,1995,66(1):207-214.
[14]JIN Wei,LIAO Yan-biao,ZHANG Zhi-peng,et al.Guidedwave optic sensors:principle and technology[M].Bei-jing:Science Press,1998,289-307.靳伟,廖延彪,张志鹏,等.导波光学传感器:原理与技术[M].北京:科学出版社,1998,289-307.
[15]ZHANG Hui-ying,LIU Hang-hui,WANG De-cheng.Springmanual[M].Beijing:Mechanical Industry Press,1997,374-387.张英会,刘航辉,王德成.弹簧手册[M].北京,机械工业出版社,1997,374-387.
[16]PENG Bao-jin,LIAO Mao,LIAO Yan-biao,et al.Researchon fiber hydrophone sensitivity[J].Acta Photonica Sini-ca,2005,34(11):1633-1638.彭保进,廖茂,廖延彪,等.光纤水听器灵敏度研究[J].光子学报,2005,34(11):1633-1638.
[17]Todd M D,Johnson G A,Althouse B A,et al.Flexuralbeam-based fiber Bragg grating accelerometers[J].Photonics Technology Letter,1998,10(11):1605-1607.
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