VP型垂直摆倾斜仪校准装置的设计
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摘要
采用压电陶瓷为核心器件设计的校准平台装置对垂直摆倾斜仪进行校准,位移校准精度达10 nm。
VP Vertical Pendulum Tiltmeter is a new seismological observation instrument used in recording earth tides.A new calibration platform based on the PZT made in German is designed.The platform meets the design requirements that the accuracy is up to 10 nm.
引文
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    5韩同鹏,等,基于压电陶瓷微位移执行器的精密定位技术研究[J].传感器与位系统,2010,29(2):51-53.(Han Tongpeng,et al.Study on accurate positioning tech-nology of Piezoelectric ceramics micro-displacement actuator[J].Transducer and Microsystem Technologies,2010,29(2):51-53)
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