基于单膜片FBG的加速度传感器优化设计
|
摘要
提出了一种基于单膜片全粘封装的光纤布拉格光栅(FBG)加速度传感模型。首先,理论分析了其传感原理,并优化了最佳加速度灵敏度,深入分析和讨论了该模型的加速度灵敏度的频率响应。然后,基于该模型设计了FBG加速度传感器,实验研究了加速度的幅频响应特性、谐振频率和加速度的线性响应。结果表明:在小于共振频率的低频段具有较好的平坦区,加速度与波长具有较好的线性关系,线性度为99.8%,加速度响应灵敏度为36.6pm/G,实验值与理论值得的相对误差为3.68%;实验研究了传感器的横向抗干扰能力,交叉灵敏度小于1.3%,表明基于该模型的FBG加速度传感器具有较好的响应特性。
In order to realize acceleration measurement by the fiber Bragg grating(FBG),an FBG accelerometer model based on the single diaphragm for acceleration sensing is proposed,and the FBG is fabricated by using the method of full viscosity.Firstly,the sensing principle of the model based on the single diaphragm is theoretically analyzed,the sensitivity of acceleration is optimized,and the responses of acceleration sensitivity and frequency based on the single diaphragm are analyzed and discussed.Secondly,the accelerometer based on the model is designed.Amplitude-frequency characteristic and resonance frequency and linear response of the FBG accelerometer are experimentally researched,respectively.When the frequency is less than the resonance frequency,experimental results indicate that it has a good flat range response and linear response.The linear fitting degree is 99.8%,the sensitivity is 36.6pm/G,and relative error is 3.68%.The anti-directional disturbance ability is experimentally researched,and the cross-sensitivity is less than 1.3%.Experimental results indicate that the FBG accelerometer based on the model has good response characteristics,which is promising to be applied in the project field by reasonably designing the structure parameter.
In order to realize acceleration measurement by the fiber Bragg grating(FBG),an FBG accelerometer model based on the single diaphragm for acceleration sensing is proposed,and the FBG is fabricated by using the method of full viscosity.Firstly,the sensing principle of the model based on the single diaphragm is theoretically analyzed,the sensitivity of acceleration is optimized,and the responses of acceleration sensitivity and frequency based on the single diaphragm are analyzed and discussed.Secondly,the accelerometer based on the model is designed.Amplitude-frequency characteristic and resonance frequency and linear response of the FBG accelerometer are experimentally researched,respectively.When the frequency is less than the resonance frequency,experimental results indicate that it has a good flat range response and linear response.The linear fitting degree is 99.8%,the sensitivity is 36.6pm/G,and relative error is 3.68%.The anti-directional disturbance ability is experimentally researched,and the cross-sensitivity is less than 1.3%.Experimental results indicate that the FBG accelerometer based on the model has good response characteristics,which is promising to be applied in the project field by reasonably designing the structure parameter.
引文
[1]Tennyson R C,Mufti A A,Rizkalla S,et al.Structural health monitoring of innovative bridges in Canada with fiber optic sensors[J].Smart Materials&Structures,2001,10(3):560-573.
[2]SUN Ru-jiao,SUN Li-min,SUN Zhi.Application of FBG sensing technologies ot large bridge[J].Journal of Tongji Univeristy(NAtural Science),2008,36(2):149-164.孙汝蛟,孙利民,孙智.FBG传感技术在大型桥梁健康监测中的应用[J].同济大学学报(自然科学版),2008,36(2):149-164.
[3]Nakstad H,Kringlebotn J T.Realisation of a full-scale fibre optic ocean bottom seismic system[C].Proc.of SPIE,Perth,WA,Australia,2008,7004-436436.
[4]Zhan Y,Li S,Yin Z.Fiber Bragg grating sensors for seismic wave detection[C].Proc.of SPIE,2005,1008-1011.
[5]Mita A,Yokoi L.Fiber Bragg grating accelerometer for structural health monitoring[J].Fifth International Conference on Motion and Vibration Control(MOVIC 2000),2000,4-8.
[6]Todd M D,Johnson G A,Althouse B A,et al.Vohra,Flexural beam-based fiber Bragg grating accelerometer[J].IEEE Photo.Techno.Lett,1998,10:1605-1607.
[7]LIU Qin-peng,Qiao Xue-guang,Zhao Jian-lin,et al.Temperature-insensitive acceleration sensing technology based onπphase of double fiber Bragg gratings[J].Chinese Journal of Lasers,2011,38(2):0205006.刘钦朋,乔学光,赵建林,等.双光栅π相位差温度不敏感加速度传感技术研究[J].中国激光,2011,38(2):0205006.
[8]ZHANG Jing-hua,QIAO Xue-guang,HU Man-li,et al.Flextensional fiber Bragg grating-based accelerometer for low frequency vibration measurement[J].Chinese Optics Letters,2011,9(9):090607(1-4).
[9]WENG Yin-yan,QIAO Xue-guang,FENG Zhong-yao,et al.Compact FBG diaphragm accelerometer based on Lshaped rigid cantilever beam[J].Chinese Optics Letters,2011,9(10):100604.
[10]Liu Qin-peng,Qiao Xue-guang,et al.Design of FBG acceleration sensor based on two-dot coating[J].Optics and precision Engineer,2012,20(9):2110-2115.刘钦朋,乔学光,傅海威,等.两点封装的光纤布拉格加速度传感器设计[J].光学精密工程,2012,20(9):2110-2115.
[11]WANG Hong-liang,ZHOU Hao-qiang,GAO Hong,et al.Fiber grating acceleration vibration sensor with double uniform strength cantilever beams[J].Journal of Optoelectronics·Laser,2013,24(4):635-640.王宏亮,周浩强,高宏,等.基于双等强度悬臂梁的光纤光栅加速度传感器[J].光电子·激光,2013,24(4):635-640.
[12]XU Gang,DAI Yu-tang,JIN Xiao-long,et al.A high-frequency dual-FBG accelerometer method its demodulation[J].Journal of Optoelectronics·Laser,2013,24(8):1445-1449.徐刚,戴玉堂,金晓龙,等.一种高频双FBG加速度传感器及其解调方法[J].光电子·激光,2013,24(8):1445-1449.
[13]LIU Qin-peng,QIAO Xue-guang,JIA Zhen-an,et al.Study on fiber Bragg grating acceleration sensing based on elastic tube[J].Journal of Optoelectronics·Laser,2012,23(7):1227-1232.刘钦朋,乔学光,赵建林,等.基于弹性管的光纤布拉格光栅加速度传感研究[J].光电子·激光,2012,23(7):1227-1232.
[14]SHAO Min,QIAO Xue-guang,FENG De-quan,et al.Theoretical and experimental study on seismic sensor based on fiber Bragg grating[J].Journal of Optoelectronics·Laser,2012,23(3):418-423.邵敏,乔学光,冯德全,等.基于光纤Bragg光栅的地震检波器的理论与实验研究[J].光电子·激光,2012,23(3):418-423.
[15]WANG Hong-liang,CHEN Jiao-min,FAN Wei,et al.Characteristics of low-frequency vibration FBG sensor[J].Journal of Optoelectronics·Laser,2012,23(6):1023-1029.王宏亮,陈娇敏,樊伟,等.光纤Bragg光栅低频振动传感器的特性研究[J].光电子·激光,2012,23(6):1023-1029.
[16]LUO Pei,TIAN Tian-wei,WANG Li-xin.High-frequency accelerator sensor of double fiber brae gratings[J].Opto-Electronic Engineering,2012,39(6):53-56.罗裴,田建伟,王立新.双光纤光栅高频加速度传感器的研究[J].光电工程,2012,39(6):53-56.
[17]GUO Yong-xing,ZHANG Dong-sheng,LI Jie-yan,et al.Two dimensional fiber Bragg grating accelerometer[J].Chinese Journal of Lasers,2012,39(12):121400.郭永兴,张东生,李杰燕,等.光纤光栅二维加速度传感器[J].中国激光,2012,39(12):121400.
[18]Wong Y Y,Qiao X G,Guo T,et al.A robust and compact fiber Bragg grating vibration sensor for seismic measurement[J].IEEE Sensors J.,2011,12(4):800-804.
[19]GUO Yong-xing,ZHANG Dong-sheng,MENG Hui,et al.Metal packaged fiber Bragg grating accelerometer[A].Proc.of SPIE[C].2012,8421:84213V.
[20]LI Xue-cheng,LIU Su,ZHANG Wei-tao,et al.Study on logy frequency characteristic of doubles diaphragm fiber Brace grating geophone[J].Journal of Optoelectronics·Laser,2010,21(4):529-532.李学成,刘肃,张文涛,等.双膜片结构光纤光栅地震检波器低频特性的研究[J].光电子·激光,2010,21(4):529-532.
[21]Morey W W,Meltz G,Glenn W H.Fiber optic Bragg grating sensors[A].Proc.of SPIE[C].1989,1169:98-107.
[2]SUN Ru-jiao,SUN Li-min,SUN Zhi.Application of FBG sensing technologies ot large bridge[J].Journal of Tongji Univeristy(NAtural Science),2008,36(2):149-164.孙汝蛟,孙利民,孙智.FBG传感技术在大型桥梁健康监测中的应用[J].同济大学学报(自然科学版),2008,36(2):149-164.
[3]Nakstad H,Kringlebotn J T.Realisation of a full-scale fibre optic ocean bottom seismic system[C].Proc.of SPIE,Perth,WA,Australia,2008,7004-436436.
[4]Zhan Y,Li S,Yin Z.Fiber Bragg grating sensors for seismic wave detection[C].Proc.of SPIE,2005,1008-1011.
[5]Mita A,Yokoi L.Fiber Bragg grating accelerometer for structural health monitoring[J].Fifth International Conference on Motion and Vibration Control(MOVIC 2000),2000,4-8.
[6]Todd M D,Johnson G A,Althouse B A,et al.Vohra,Flexural beam-based fiber Bragg grating accelerometer[J].IEEE Photo.Techno.Lett,1998,10:1605-1607.
[7]LIU Qin-peng,Qiao Xue-guang,Zhao Jian-lin,et al.Temperature-insensitive acceleration sensing technology based onπphase of double fiber Bragg gratings[J].Chinese Journal of Lasers,2011,38(2):0205006.刘钦朋,乔学光,赵建林,等.双光栅π相位差温度不敏感加速度传感技术研究[J].中国激光,2011,38(2):0205006.
[8]ZHANG Jing-hua,QIAO Xue-guang,HU Man-li,et al.Flextensional fiber Bragg grating-based accelerometer for low frequency vibration measurement[J].Chinese Optics Letters,2011,9(9):090607(1-4).
[9]WENG Yin-yan,QIAO Xue-guang,FENG Zhong-yao,et al.Compact FBG diaphragm accelerometer based on Lshaped rigid cantilever beam[J].Chinese Optics Letters,2011,9(10):100604.
[10]Liu Qin-peng,Qiao Xue-guang,et al.Design of FBG acceleration sensor based on two-dot coating[J].Optics and precision Engineer,2012,20(9):2110-2115.刘钦朋,乔学光,傅海威,等.两点封装的光纤布拉格加速度传感器设计[J].光学精密工程,2012,20(9):2110-2115.
[11]WANG Hong-liang,ZHOU Hao-qiang,GAO Hong,et al.Fiber grating acceleration vibration sensor with double uniform strength cantilever beams[J].Journal of Optoelectronics·Laser,2013,24(4):635-640.王宏亮,周浩强,高宏,等.基于双等强度悬臂梁的光纤光栅加速度传感器[J].光电子·激光,2013,24(4):635-640.
[12]XU Gang,DAI Yu-tang,JIN Xiao-long,et al.A high-frequency dual-FBG accelerometer method its demodulation[J].Journal of Optoelectronics·Laser,2013,24(8):1445-1449.徐刚,戴玉堂,金晓龙,等.一种高频双FBG加速度传感器及其解调方法[J].光电子·激光,2013,24(8):1445-1449.
[13]LIU Qin-peng,QIAO Xue-guang,JIA Zhen-an,et al.Study on fiber Bragg grating acceleration sensing based on elastic tube[J].Journal of Optoelectronics·Laser,2012,23(7):1227-1232.刘钦朋,乔学光,赵建林,等.基于弹性管的光纤布拉格光栅加速度传感研究[J].光电子·激光,2012,23(7):1227-1232.
[14]SHAO Min,QIAO Xue-guang,FENG De-quan,et al.Theoretical and experimental study on seismic sensor based on fiber Bragg grating[J].Journal of Optoelectronics·Laser,2012,23(3):418-423.邵敏,乔学光,冯德全,等.基于光纤Bragg光栅的地震检波器的理论与实验研究[J].光电子·激光,2012,23(3):418-423.
[15]WANG Hong-liang,CHEN Jiao-min,FAN Wei,et al.Characteristics of low-frequency vibration FBG sensor[J].Journal of Optoelectronics·Laser,2012,23(6):1023-1029.王宏亮,陈娇敏,樊伟,等.光纤Bragg光栅低频振动传感器的特性研究[J].光电子·激光,2012,23(6):1023-1029.
[16]LUO Pei,TIAN Tian-wei,WANG Li-xin.High-frequency accelerator sensor of double fiber brae gratings[J].Opto-Electronic Engineering,2012,39(6):53-56.罗裴,田建伟,王立新.双光纤光栅高频加速度传感器的研究[J].光电工程,2012,39(6):53-56.
[17]GUO Yong-xing,ZHANG Dong-sheng,LI Jie-yan,et al.Two dimensional fiber Bragg grating accelerometer[J].Chinese Journal of Lasers,2012,39(12):121400.郭永兴,张东生,李杰燕,等.光纤光栅二维加速度传感器[J].中国激光,2012,39(12):121400.
[18]Wong Y Y,Qiao X G,Guo T,et al.A robust and compact fiber Bragg grating vibration sensor for seismic measurement[J].IEEE Sensors J.,2011,12(4):800-804.
[19]GUO Yong-xing,ZHANG Dong-sheng,MENG Hui,et al.Metal packaged fiber Bragg grating accelerometer[A].Proc.of SPIE[C].2012,8421:84213V.
[20]LI Xue-cheng,LIU Su,ZHANG Wei-tao,et al.Study on logy frequency characteristic of doubles diaphragm fiber Brace grating geophone[J].Journal of Optoelectronics·Laser,2010,21(4):529-532.李学成,刘肃,张文涛,等.双膜片结构光纤光栅地震检波器低频特性的研究[J].光电子·激光,2010,21(4):529-532.
[21]Morey W W,Meltz G,Glenn W H.Fiber optic Bragg grating sensors[A].Proc.of SPIE[C].1989,1169:98-107.
版权所有：© 2023 中国地质图书馆 中国地质调查局地学文献中心