光电集成加速度地震检波器中声光波导相位调制器的设计与实验
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摘要
提出了一种新型的光电集成加速度地震检波器,这是一种全新的微光机电系统(MOEMS).为实现硅基底上的光波导M Z干涉仪的相位调制,采用了声光相位调制的方法.该相位调制器利用叉指换能器(IDT)激发出声表面波(SAW)实现对光波导的相位调制.在对光波导声光相位调制机理深入研究的基础上,设计并制作了器件.实验结果与理论相一致.
A novel electro-optic integrated acceleration seismic geophone is presented in this paper. Optical waveguide M-Z interferometer and processing circuitry are monolithic integrated on the silicon substrate and it is a new kind of micro-opto-electro-mechanical system (MOEMS). In order to modulate the phase of optical waveguide M-Z interferometer on silicon substrate, the method of acousto-optic phase modulation is proposed. The acousto-optic phase modulator realizes phase modulation by passing the reference beam through a surface acoustic wave (SAW) generated on a ZnO thin-film transducer driven by an interdigital transducer (IDT). On the basis of the working theory of acousto-optic phase modulation, the device is designed and fabricated. Experimental results matches well with the theoretical prediction.
A novel electro-optic integrated acceleration seismic geophone is presented in this paper. Optical waveguide M-Z interferometer and processing circuitry are monolithic integrated on the silicon substrate and it is a new kind of micro-opto-electro-mechanical system (MOEMS). In order to modulate the phase of optical waveguide M-Z interferometer on silicon substrate, the method of acousto-optic phase modulation is proposed. The acousto-optic phase modulator realizes phase modulation by passing the reference beam through a surface acoustic wave (SAW) generated on a ZnO thin-film transducer driven by an interdigital transducer (IDT). On the basis of the working theory of acousto-optic phase modulation, the device is designed and fabricated. Experimental results matches well with the theoretical prediction.
引文
[1]ChenCaihe,CuiYuming.Hybridintegratedopticalacceler ometer[J].ProcSPIE,1996,2895:497—500.
[2]ChenCaihe,ZhangDelong,DingGuilan,etal.Broadband andMichelsonfiber opticaccelerometer[J].ApplOpt,1999,38(4):628—630.
[3]ChenCaihe,WuBo,DingGuilan,etal.Researchandfab ricationonintegratedopticalchipofhybrid integratedoptical accelerationseismicgeophone[J].ProcSPIE,2002,4919:1—7.
[4]DanHaronian.Alow costmicromechanicalaccelerometer withintegratedsolid statesensor[J].SensorsandActuators A,2000,84:149—155.
[5]NeilBarbour,GeorgeSchmidt.Inertialsensortechnology trends[J].IEEESensorsJournal,2001,1(4):332—339.
[6]VonHelmoltCH.Integratedopticsstripwaveguidephase modulatordrivenbyaSAW[J].JLightwaveTechnol,1987,2:218—228.
[7]BonnotteE,ChristopheGorecki,HiroshiToshiyoshi,etal.Guided waveacoustoopticinteractionwithphasemodulation inaZnOthin filmtransduceronanSi basedintegrated Mach Zehnderinterferometer[J].JournalofLightwave Technology,1999,1(17):35—42.
[8]徐阶平.声光器件的原理、设计和应用[M].北京:科学出版社,1982.
[9]DidenkoIrinaS,HickernellFredS,NanmenkoNatalyaF.TheexperimentalandtheoreticalcharacterizationoftheSAW propagationpropertiesforzincoxidefilmsonsiliconcarbide[J].IEEETransactionsonUltrasonics,Ferroelectricsand FrequencyControl,2000,1:179—187.
[10]ShihWen ching,WuMu shiang.TheeffectofSiO2buffer layerontheSAWpropertiesofZnO/SiO2/GaAsstructure[J].IEEETrans,1993,40(6):642—646.
[2]ChenCaihe,ZhangDelong,DingGuilan,etal.Broadband andMichelsonfiber opticaccelerometer[J].ApplOpt,1999,38(4):628—630.
[3]ChenCaihe,WuBo,DingGuilan,etal.Researchandfab ricationonintegratedopticalchipofhybrid integratedoptical accelerationseismicgeophone[J].ProcSPIE,2002,4919:1—7.
[4]DanHaronian.Alow costmicromechanicalaccelerometer withintegratedsolid statesensor[J].SensorsandActuators A,2000,84:149—155.
[5]NeilBarbour,GeorgeSchmidt.Inertialsensortechnology trends[J].IEEESensorsJournal,2001,1(4):332—339.
[6]VonHelmoltCH.Integratedopticsstripwaveguidephase modulatordrivenbyaSAW[J].JLightwaveTechnol,1987,2:218—228.
[7]BonnotteE,ChristopheGorecki,HiroshiToshiyoshi,etal.Guided waveacoustoopticinteractionwithphasemodulation inaZnOthin filmtransduceronanSi basedintegrated Mach Zehnderinterferometer[J].JournalofLightwave Technology,1999,1(17):35—42.
[8]徐阶平.声光器件的原理、设计和应用[M].北京:科学出版社,1982.
[9]DidenkoIrinaS,HickernellFredS,NanmenkoNatalyaF.TheexperimentalandtheoreticalcharacterizationoftheSAW propagationpropertiesforzincoxidefilmsonsiliconcarbide[J].IEEETransactionsonUltrasonics,Ferroelectricsand FrequencyControl,2000,1:179—187.
[10]ShihWen ching,WuMu shiang.TheeffectofSiO2buffer layerontheSAWpropertiesofZnO/SiO2/GaAsstructure[J].IEEETrans,1993,40(6):642—646.
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