新型MEMS地震检波器的研究
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摘要
以MEMS加速度传感器为基础的新型地震检波器大幅度提高了地震检波器的各项性能指标。介绍了一种新型的石油勘探MEMS地震检波器的设计及其主要技术参数,并通过微传感器结构的力学性能仿真,得出其具体的结构尺寸。经采用表面工艺和体工艺相结合的方法,利用磁控溅射、光刻、化学蚀刻及等离子体蚀刻等工艺,在高阻硅上制备出检波器样品。
Compared with the previous ones,a new-type seismic geophone based on MEMS acceleration sensors has greatly improved its performance.The structure characteristics and main technical parameters of the new type MEMS seismic geophone for oil exploration is introduced,how the specific size of structure of the new-type seismic geophone is achieved through mechanical property simulation of the structure of micro-sensor.A sample MEMS seismic geophone have been fabricated on the high-resistance silicon wafer through the combination techniques of the surface machining and the bulk machining by using magnetron sputtering,photolithography,chemical etching and plasma etching and so on.
Compared with the previous ones,a new-type seismic geophone based on MEMS acceleration sensors has greatly improved its performance.The structure characteristics and main technical parameters of the new type MEMS seismic geophone for oil exploration is introduced,how the specific size of structure of the new-type seismic geophone is achieved through mechanical property simulation of the structure of micro-sensor.A sample MEMS seismic geophone have been fabricated on the high-resistance silicon wafer through the combination techniques of the surface machining and the bulk machining by using magnetron sputtering,photolithography,chemical etching and plasma etching and so on.
引文
[1]Rainier A,Michael M.Prospection and exploration of alpine saltdeposits-A challenge for geologists and geophysicists[J].Journalfor Exploration,Mining and Metallurgy,2003,56:257-264.
[2]王辉明,宋志翔,马国庆.MEMS加速度传感器开发及在地球物理勘探中的应用[J].勘探地球物理进展,2005,28(3):223-226.
[3]张莉,解文荣,李秀荣.基于微电子系统MEMS加速度地震勘探三分量数字检波器简介[J].中国煤田地质,2006,18(2):57-59.
[4]唐晓刚,颜永安,王建民,等.MEMS差动加速度传感器[J].仪表技术与传感器,2005(12):8-10.
[5]陈金鹰,龚江涛,庞进,等.地震检波器技术与发展研究[J].物探化探计算技术,2007,29(5):382-385.
[2]王辉明,宋志翔,马国庆.MEMS加速度传感器开发及在地球物理勘探中的应用[J].勘探地球物理进展,2005,28(3):223-226.
[3]张莉,解文荣,李秀荣.基于微电子系统MEMS加速度地震勘探三分量数字检波器简介[J].中国煤田地质,2006,18(2):57-59.
[4]唐晓刚,颜永安,王建民,等.MEMS差动加速度传感器[J].仪表技术与传感器,2005(12):8-10.
[5]陈金鹰,龚江涛,庞进,等.地震检波器技术与发展研究[J].物探化探计算技术,2007,29(5):382-385.
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