MOEMS三分量加速度地震检波器简谐振子设计(英文)
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摘要
采用惯性力与简谐振子相垂直及差动检测技术的方法,设计基于光弹效应的三分量加速度地震检波器简谐振子。对于简谐振子中的双M-Z干涉仪而言,光功率的均分和光的单模传输是实现正确检测加速度的基础。介绍了M-Z干涉仪的结构和工作原理。用波导光学模拟软件OptiBPM v9.0对双M-Z干涉仪光场传输进行仿真,得到双M-Z干涉仪的光场传输图。从仿真结果可以看出,从激光器LD发出的光经过双M-Z干涉仪后,1/4分支波导的光场峰值都达到了0.52,分光比达到了1:1:1:1,实现了光功率的均分,设计的简谐振子满足三分量加速度地震检波器实现正确检测加速度的要求。
The harmonic oscillator of three-component acceleration seismic geophone based on photoelastic effect is designed by the methods of inertia force perpendicular to the harmonic oscillator and differential detection technology.In terms of dual M-Z interferometer of three-component acceleration seismic geophone, equal division of optical power and single-mode transmission of light are the bases of correct acceleration detection.The structure of M-Z interferometer is introduced.The optical field transmission of dual MZ interferometer in three-component acceleration seismic geophone is simulated by the waveguide optics simulation software OptiBPM v9.0,and the optical field transmission graph of dual M-Z interferometer is obtained.The simulation result shows that when the light emitted from the laser passes through the dual M-Z interferometer,the optical field peak values of 1/4 branch waveguides all achieve 0.52,and the splitting ratio is 1:1:1:1.The equal division of optical power is realized,and the harmonic oscillator designed meets the demand of proper acceleration detection of three-component acceleration seismic geophone.
The harmonic oscillator of three-component acceleration seismic geophone based on photoelastic effect is designed by the methods of inertia force perpendicular to the harmonic oscillator and differential detection technology.In terms of dual M-Z interferometer of three-component acceleration seismic geophone, equal division of optical power and single-mode transmission of light are the bases of correct acceleration detection.The structure of M-Z interferometer is introduced.The optical field transmission of dual MZ interferometer in three-component acceleration seismic geophone is simulated by the waveguide optics simulation software OptiBPM v9.0,and the optical field transmission graph of dual M-Z interferometer is obtained.The simulation result shows that when the light emitted from the laser passes through the dual M-Z interferometer,the optical field peak values of 1/4 branch waveguides all achieve 0.52,and the splitting ratio is 1:1:1:1.The equal division of optical power is realized,and the harmonic oscillator designed meets the demand of proper acceleration detection of three-component acceleration seismic geophone.
引文
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[3]Wu Bo,Chen Caihe,Zhang Xiaoling,et al.Structure design of M-Z interferometric integrated optical microaccelerometer sensor[J].Journal of Optoelectronics ? Laser(光电子·激光),2004,(11):1263-1266(in Chinese).
[4]Ding Guilan,Liu Zhenfu,et al.The design of three-component all-fiberoptic acceleration seismometer[J].Journal of Optoelectronics ? Laser(光电子·激光),2002,13(1):50-52(in Chinese).
[5]Zeng Guiping,Yao Li,Dong Qiang,et al.Spectroscopic properties of nanopowder Y_2O_3:Ti~(3+),Eu~(3+)[J].Chinese Journal of Quantum Electronics(量子电子学报),2011,28(2):147-151(in Chinese).
[6]Tang Donglin.Theory and Experiment Study of Integrated Acceleration Seismic Detection(集成加速度地震检波理论与实验研究)[D].Tianjin:Tianjin University,2006:47-52(in Chinese).
[7]Ye Yutang,Rao Jianzhen,Xiao Jun.Optical Tutorials(光学教程)[M].Beijing:Tsinghua University Press,2006: 221-222(in Chinese).
[8]Li Dengfeng,Dong Huining,Qiu Yishen,et al.The rigorous vectorial coupled-mode theory for the isotropic optical waveguide with isotropic disturbances[J].Acta Photonica Sinica(光子学报),2006,35(6):828-831(in Chinese).
[9]Li Li,Zhang Xinlu,Sun Pingping,et al.Transient response and applications of microring resonator-coupled Mach-Zehnder interferometer[J].Acta Photonica Sinica(光子学报),2007,36(10):1788-1792(in Chinese).
[10]Tang Tiantong,Wang Zhaohong.Integrated Optics(集成光学)[M].Beijing:Science Press,2008:9-10(in Chinese).
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