地震勘探用三维MEMS加速度传感器的研究
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摘要
以MEMS加速度传感器为基础的新型数字地震检波器是地震勘探所用仪器的发展方向之一。介绍了一种三维MEMS加速度检波器结构,这有别于传统三分量MEMS传感器通过用3只MEMS加速度传感器按正交直角组装。并通过PSpice软件对其进行了整体仿真,仿真结果表明其阶跃响应和正弦响应基本和理论分析的结果吻合。
Based on the MEMS acceleration sensor,a new type of digital geophone equipment used in seismic exploration is one of the developing directions.The structure of a 3D MEMS acceleration sensor,which is different from the traditional three-component MEMS sensor that is composed of three MEMS accelerometers according to the orthogonal angle assembly is described.The overall simulation is carried out by PSpice software.The simulation result shows that the step response and sinusoidal response mostly correspond with the results of the theoretical analysis.
Based on the MEMS acceleration sensor,a new type of digital geophone equipment used in seismic exploration is one of the developing directions.The structure of a 3D MEMS acceleration sensor,which is different from the traditional three-component MEMS sensor that is composed of three MEMS accelerometers according to the orthogonal angle assembly is described.The overall simulation is carried out by PSpice software.The simulation result shows that the step response and sinusoidal response mostly correspond with the results of the theoretical analysis.
引文
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[2]Rainier A,Michael M.Prospection and exploration of Alpine saltdeposits—A challenge for geologists and geophysicists[J].Jour-nal for Exploration,Mining and Metallurgy,2003,56:257-264.
[3]张莉,解文荣,李秀荣.基于微电子系统MEMS加速度地震勘探三分量数字检波器简介[J].中国煤田地质,2006,18(2):57-59.
[4]Lemkin M A,Boser B E,Auslander D,et al.A 3-axis force bal-anced accelerometer using a single proof-mass[C]∥1997 Inter-national Conference on Solid-state Sensors and Actuators,1997:1185-1188.
[5]Kraft M,Lewis C P,Hesketh T G.Closed-loop silicon accelerome-ters[J].IEE Prix Circuits Devices Syst,1998,145(5):325-331.
[6]陈金鹰,龚江涛,庞进,等.地震检波器技术与发展研究[J].物探化探计算技术,2007,29(5):382-385.
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