地震传感器的新技术与发展
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摘要
宽频带、大动态、低噪声、低功耗、便携式、高度智能化是地球物理观测技术的发展趋势.本文简要回顾了地震传感器的发展,详细介绍了几种设计先进、性能优越、基于不同换能机理的新型地震传感器.这些传感器有些已经有原理样机,有些还处于概念设计中,它们将是未来宽频带地震仪技术发展的主要方向.
It is a trend to develop broadband,wide dynamic,low noise,low power,portable,and highly intelligent geophysical observation equipment.In the paper,we briefly review the development of seismic sensors and introduce several seismic sensors with advanced design,superior performance,based on different transducer mechanism in detail.The prototype of some new seismic sensors have been finished,however some are still in the conceptual design.They will be main development direction of broadband seismometers in the future.
It is a trend to develop broadband,wide dynamic,low noise,low power,portable,and highly intelligent geophysical observation equipment.In the paper,we briefly review the development of seismic sensors and introduce several seismic sensors with advanced design,superior performance,based on different transducer mechanism in detail.The prototype of some new seismic sensors have been finished,however some are still in the conceptual design.They will be main development direction of broadband seismometers in the future.
引文
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[36] Bertolini A,DeSalvo R,Fidecaro F,Takamori A.Monolithic folded pendulum accelerometers for seismic monitoring and active isolation systems[J].Geoscience and Remote Sensing,IEEE Transactions ,2005,44 (2) :273 ～ 276．
[37] Havskov J,Alguacil G.Instrumentation in Earthquake Seismology[M].Berlin:Springer,2005．
[38] A non-traditional high performance broad-band seismometer PMD/eentec,USA http://www,eentec,com
[39] Kashyap R.Photosensitive Optical Fibers:Devices and Applications[J].Optical Fiber Technology,1994,1 :17～34．
[40] Francis T.Yu S,Yin S Z.Fiber Optic Sensors(3th)[M].ISA,2000．
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[44] Gardner D,Hofler T,Baker S,Yarber R,Garrett S.A fiberoptic interferometric seismometer [J].Journal of Lightwave Technology,1987,5(7) :953～ 960．
[45] Araya A,Kawabe K,Mio N,Satu T,Tsubono K.Highly sensitive wideband seismometer using a laser interferometer [J].Review of Scientific Instruments,1993,64:1337 ～ 1341．
[46] Clay K,James H C,Alan B T,Anthony D.Progress in fiber optical acoustic and seismic sensing [C].Optical Fiber Sensors (OFS) ,Cancun,Mexico,October 23,2006．
[47] Kirkendall C.Distributed Acoustic and Seismic Sensing[C].Optical Fiber Communication and the National Fiber Optic Engineers Conference,Anaheim,CA.2007,1～3．
[48] Laudati A,Mennella F,Giordano M A,et al.Fiber-Optic Bragg Grating Seismic Sensor [J].Photonics Technology Letters,IEEE,2007,19(24) :1991～1993．
[49] Cusano A,Lpez-Higuera J M,Matias I R,Culshaw B.Editorial optical fiber sensor technology and applications[J].Sensors Journal,IEEE,2008,8(7) :1052～1054．
[50] 王家常,吴学兵,宁靖,王国来.光纤布拉格光栅地震检波器的试验效果分析[J].石油仪器,2008,22(4) :21～22． WangJ C,Wu X B,Nin J,Wang G L.The experiment and analysis of geophone based on fiber Bragg grating [J].Petroleum Instruments,2008,22(4) :21～22．
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[2] Wielandt E,Streckeisen G.The leaf-spring seismometer:design and performance[J].Bull.Seism.Soc.Am.,1982,72,2394-2367．
[3] 蔡亚先,吕永清.JCZ-1超宽频带地震计[J].地壳形变与地震,1 995,15(3) 1～8． Cai Y X,Lu Y Q.JCZ-1 ultra broadband seismometer[J].Crustal Deformation and Earthquake,1995,15(3) 1～8．
[4] 陈颙.数字时代的地震观测[M].北京:地震出版社.1 998． Chen Y.The Seismic Observation of Digital Time [M].Beijing:Seismology Publishing House,1998．
[5] Ingate S,Berger J.Projects:Prospects for Low Frequency Seismometry.Granlibakken Conference Center Lake Tahoe,California March 24～26,2004．
[6] Neil B,George S.Inertial sensor technology trends[J].IEEE Sensors journal,2001． 332～339
[7] Cenk A,Andrei M S.Experimental evaluation and comparative analysis of commercial variable capacitance MEMS Accelerometers [M].Journal of micromechanics and microengineering.2003,634～645
[8] 高钟毓,董景新,张嵘.微机电传感器发展及应用的现状与趋势[J].机械工程学报,2003,39(11) :7～16． Gao Z Y,Dong J X,Zhang R.Actuality and Trend of Developments and Applications on Micro Electromechanical Sensors[J]Chinese Journal of Mechanical Engineering,2003,39(11) :7～16．
[9] 高世桥,曲大成.微机电系统(MEMS)技术的研究与应用[J].科技导报,2004,(4) 17:20． Gao S J,Qu D C.Researches on microelectromechanical systems and its applications [J].Science and Technology Review,2004,(4) 17:20．
[10] Judy M W.Evolution of integrated inertial MEMS technology [C].Solid State Sensor,Actuator and Microsystems Workshop Digest 0 9640024 5 0． Hilton Head Island,South Carolina,USA,2004:27～32．
[11] 胡雪梅,吕俊霞.微机电系统的发展现状和应用[J].机电设备,2005,26(6) :41:44． Hu X M,Lv J X.Development and Application of Micro Electromechanical System (MEMS) [J].Mechanical and Electrical Equipment,2005,26 (6) :41 :44．
[12] 余丹铭,梁利华,许杨剑.微电子机械技术的研究和发展趋势[J].电子机械工程,2005,21(1) :5～9． Yu D M,Liang L H,Xu Y J.Research and development frend of MEMS technology[J].Electro-Mechanical Engineering,2005,21(1) :5～9．
[13] Petersen K.A new age for MEMS [C].Digest of the 13thInternational Conference Of Solid-State Sensors [M].Actuators and Microsystems,2005,1 :1 ～4
[14] 李旭辉.MEMS发展应用现状[J].传感器与微系统,2006, 25(5) :7～9 LiX H.Status of development and application of MEMS technology[J].Transducer and Microsystem Technologies.2006,25(5) :7～9
[15] Suster M,Guo J,Chaimanonart N,et al.A high performance MEMS capacitive strain sensor microsystem[J].Journal of Microelectromechanical,2006,15 (5) :1069 ～ 1077．
[16] 葛文勋,丛鹏.微机电系统发展动向[J].纳米技术与精密工程,2007,5(3) :182～189． Ge W X,Cong P.Trends and frontiers of MEMS [J].Nanotechnology and Precision Engineering,2007,5 ( 3 ) :182～189．
[17] Wen H K.Trends and frontiers of MEMS[J].Sensors and Actuators A:Physical,2007,136(1) :62～67
[18] Robert B.MEMS sensors:past,present and future [J].Sensor Review.2007,27(1) :7 ～ 13
[19] 刘锦.微机电系统技术的发展趋势研究[J].机电产品开发与创新,2008,21(4) :42～44． Liu J.Research on development frend of MEMS technology [J].Development & Innovation of Machinery &-Electrical Products,2008,21(4) :42～44
[20] Osamu T,Toshiyuki T,etal.Reliability of MEMS:Testing of Materials and Devices[M].Wiley,2008．
[21] ChenY J,Kao C K,Shih W P,Chung S Y,Chang P Z.Flip-chip bonded MEMS capacitor applied on tuning superconductive resonator [J].21th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) ,Tucson,Arizona,USA,Jan.13～17,2008．
[22] Elwenspoek M,Wiergerink R J,Elwenspoek M,Wiegerink R.Mechanical microsensors [M].Berlin:New York:Springerc2001．
[23] Peter Maxwell,柴书常.用于地震采集的MEMS数字加速度计之设计与生产[J].物探装备,2002,12(2) :92～94． Peter M,Cai S C.Design and manufacture of MEMS digital acceleration for earthquake[J].Equipment for Geophysical Prospecting,2002,12(2) :92～94．
[24] 王琪民.微型机械导论[M].北京:中国科学技术出版社,2003． Wang Q M.Introduction to micro-mechanical[M].Beijing:University of Scicence and Technology of China Press,2003．
[25] 张海涛,阎贵平.MEMS加速度传感器的原理及分析[J].电子工艺技术,2003,24(6) :60～265． Zhang H T,Yan G P P.Principle and analysis of MEMS acceleration sensor [J].Electronics Process Technology,2003,24(6) :60～265．
[26] 沈桂芬,张宏庆,韩宇,等.微机电系统的研究与分析[J].传感技术学报,2004,17(1) :168～171． Sheng G F,Zheng H Q,Han Y,et al.Research and Analogy of MEMS[J].Journal of Transduction Technology,2004,17(1) :168～171．
[27] 张霞.微机电系统与微加速度计[J].物理与工程,2004,14 (1) :18～21． Zhang X.Micro-Electro-Mechanical-system and micro-acceleration[J].Physics and Engineering,2004,14 ( 1 ) :18 ～21．
[28] 孔令纲,沈景春.MEMS传感器原理与结构简析[J].国外油田工程,2005,21(10) :36～37． Kong L G,Shen J C.MEMS sensor mechanism and structural analysis[J].Foreign Oil Field Engineering,2005,21 (10) :36～37．
[29] 张莉,解文荣,李秀荣.基于微电子系统(MEMS)加速度地震勘探三分量数字检波器简介[J].中国煤田地质,2006,18(2) :57～59． Zhang L,Xie W R,Li X R.A Brief Introduction to Acceleration Triaxial Digital Geophone Based on Microelectronic Mechanical System (MEMS).COAL GEOLOGY OF CHINA,2006,18(2) :57～59．
[30] Jon T.MEMS for Geophysicists.I/O inc.1999．
[31] Jefery G.Robust low noise MEMS serve accelemmeter.Applied MEMS inc.2001．
[32] Julian W G,Vijay K V,Osama O A.Microsensors,mems,and smart devices [M].San Francisco:Wiley,2001．
[33] Eric B.Electrochemical sensors[J].Anal.Chem.2004,76:3285～3298．
[34] Abramovich I A,Kharlamov A V.Broadband seismometers with electrochemical motion sensors:Past,Present,Future [C].American Geophysical Union,Spring Meeting 2004,abstract S51B-11
[35] Thomas A D,Sergei L S.Spectra of ocean bottom seismic noise in the 0． 01 ～ 10 Hz range[J].Geophysical Journal International,2007,106(1) :113～121．
[36] Bertolini A,DeSalvo R,Fidecaro F,Takamori A.Monolithic folded pendulum accelerometers for seismic monitoring and active isolation systems[J].Geoscience and Remote Sensing,IEEE Transactions ,2005,44 (2) :273 ～ 276．
[37] Havskov J,Alguacil G.Instrumentation in Earthquake Seismology[M].Berlin:Springer,2005．
[38] A non-traditional high performance broad-band seismometer PMD/eentec,USA http://www,eentec,com
[39] Kashyap R.Photosensitive Optical Fibers:Devices and Applications[J].Optical Fiber Technology,1994,1 :17～34．
[40] Francis T.Yu S,Yin S Z.Fiber Optic Sensors(3th)[M].ISA,2000．
[41] 姜德生,何伟.光纤光栅传感器的应用概况[J].光电子.激光,2002,13(4) :420～430． Jiang D S,He W.Review of applications for fiber bragg grating sensors[J].Journal of Optoelectronics · laser,2002,13(4) :420～430．
[42] 何慧灵,赵春梅,陈丹,赵晓锋,阮吴.光纤传感器现状[J].激光与光电子学进展,2004,41(3) :39～41 HeF L,Zhao C M,Chen D,Zhao X F,Ruan H.Present status of optic fiber sensors[J].Laser & Optoelectronics Progress,2004,41(3) :39～41
[43] 付清锋.地震检波器新技术发展方向[J].石油仪器,2005,19(6) :1:4 Fu Q F.New development of the seismic geophone[J].Petroleum Instruments,2005,19 (6) :1 :4
[44] Gardner D,Hofler T,Baker S,Yarber R,Garrett S.A fiberoptic interferometric seismometer [J].Journal of Lightwave Technology,1987,5(7) :953～ 960．
[45] Araya A,Kawabe K,Mio N,Satu T,Tsubono K.Highly sensitive wideband seismometer using a laser interferometer [J].Review of Scientific Instruments,1993,64:1337 ～ 1341．
[46] Clay K,James H C,Alan B T,Anthony D.Progress in fiber optical acoustic and seismic sensing [C].Optical Fiber Sensors (OFS) ,Cancun,Mexico,October 23,2006．
[47] Kirkendall C.Distributed Acoustic and Seismic Sensing[C].Optical Fiber Communication and the National Fiber Optic Engineers Conference,Anaheim,CA.2007,1～3．
[48] Laudati A,Mennella F,Giordano M A,et al.Fiber-Optic Bragg Grating Seismic Sensor [J].Photonics Technology Letters,IEEE,2007,19(24) :1991～1993．
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