地震勘探用电容式闭环微加速度计的仿真
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摘要
MEMS加速度传感器大幅提高了新型地震检波器的各项性能指标。利用有限元软件AN-SYS建立了悬臂硅梁的力学模型,并通过其力学性能仿真,得出优化的设计结构尺寸,即梁长L=150μm,梁宽b=40μm,梁厚h=4μm,活动电极和固定电极的间距d0取为1μm。同时利用电路仿真软件建立了传感器闭环系统的整体仿真数学模型,仿真结果表明其阶跃响应和正弦响应基本和理论分析结果吻合,传感器的分辨率可达0.001 m/s2,频带宽度可达500 MHz。该基于MEMS加速度传感器的新型地震检波器在地震勘探中将具有广阔的应用前景。
The performances of the new geophone are significantly improved by the MEMS acce-leration sensors.The mechanical model of the silicon cantilever beam was set up by means of the finite element software ANSYS,and the best design structure size was gained through the stimulation of the mechanical properties.The design result shows that the length L is 150 μm,the width b is 40 μm,the thickness h is 4 μm,and d0 is 1 μm(d0 is the space between the moving electrode and fixed electrode).Meanwhile,the overall mathematical model of the closed-loop system was established using the sensor circuit simulation software.The simulation results show that the step response and sinusoidal response agree well with the result of the theoretical analysis.The sensor resolution and bandwidth are up to 0.001 m/s2 and 500 MHz,respectively.The new-type geophone based on the MEMS acceleration sensor will have wide application prospects in the seismic exploration.
The performances of the new geophone are significantly improved by the MEMS acce-leration sensors.The mechanical model of the silicon cantilever beam was set up by means of the finite element software ANSYS,and the best design structure size was gained through the stimulation of the mechanical properties.The design result shows that the length L is 150 μm,the width b is 40 μm,the thickness h is 4 μm,and d0 is 1 μm(d0 is the space between the moving electrode and fixed electrode).Meanwhile,the overall mathematical model of the closed-loop system was established using the sensor circuit simulation software.The simulation results show that the step response and sinusoidal response agree well with the result of the theoretical analysis.The sensor resolution and bandwidth are up to 0.001 m/s2 and 500 MHz,respectively.The new-type geophone based on the MEMS acceleration sensor will have wide application prospects in the seismic exploration.
引文
[1]ARNDT R,MAYR M.Prospection and exploration of alpinesalt deposits—a challenge for geologists and geophysicists[J].Journal for Exploration,Mining and Metallurgy,2003,56(47):257-264.
[2]陈金鹰,龚江涛,庞进,等.地震检波器技术与发展研究[J].物探化探计算技术,2007,29(5):382-385.
[3]王辉明,宋志翔,马国庆.MEMS加速度传感器开发及在地球物理勘探中的应用[J].勘探地球物理进展,2005,28(3):223-226.
[4]谌贵辉,赵万明,任诚.新型MEMS地震检波器的研究[J].传感器与微系统,2010,29(10):29-31.
[5]KRAFT M,LEWIS C P,HESKETH T G.Closed-loop sili-con accelerometers[J].Circuits Devices and System,1998,145(5):325-331.
[6]KRAFT M,LEWIS C P.Design of a hybrid closed loop con-trol system for a MEMS accelerometer using back steppingprinciple[C]//Proceedings of the International Conferenceon Microelectronics.Cairo,Egypt,2007:213-216.
[7]PARK K M.Methodologies for MEMS device performance anddamage monitoring[D].Hoboken:Stevens Institute of Tech-nology,2002:34-46.
[8]KRAFT M.Closed loop accelerometer employing over samplingconversion[D].England:Coventy University,1997:23-40.
[9]KULAH H,CHAE J,YAZDI N,et al.A multi-step electrme-chanical sigma-delta converter for micro-gcapacitive accelerome-ters[C]//Proceedings of the IEEE International Solid-StateCircuits Conference.MI,USA,2003:202-203.
[2]陈金鹰,龚江涛,庞进,等.地震检波器技术与发展研究[J].物探化探计算技术,2007,29(5):382-385.
[3]王辉明,宋志翔,马国庆.MEMS加速度传感器开发及在地球物理勘探中的应用[J].勘探地球物理进展,2005,28(3):223-226.
[4]谌贵辉,赵万明,任诚.新型MEMS地震检波器的研究[J].传感器与微系统,2010,29(10):29-31.
[5]KRAFT M,LEWIS C P,HESKETH T G.Closed-loop sili-con accelerometers[J].Circuits Devices and System,1998,145(5):325-331.
[6]KRAFT M,LEWIS C P.Design of a hybrid closed loop con-trol system for a MEMS accelerometer using back steppingprinciple[C]//Proceedings of the International Conferenceon Microelectronics.Cairo,Egypt,2007:213-216.
[7]PARK K M.Methodologies for MEMS device performance anddamage monitoring[D].Hoboken:Stevens Institute of Tech-nology,2002:34-46.
[8]KRAFT M.Closed loop accelerometer employing over samplingconversion[D].England:Coventy University,1997:23-40.
[9]KULAH H,CHAE J,YAZDI N,et al.A multi-step electrme-chanical sigma-delta converter for micro-gcapacitive accelerome-ters[C]//Proceedings of the IEEE International Solid-StateCircuits Conference.MI,USA,2003:202-203.
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