光电集成加速度地震检波器系统的研究
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摘要
提出了一种基于 M-Z 光波导干涉型的新型光电集成加速度地震检波器,将光波导 M-Z 干涉仪、十字横梁硅质量块简谐振子、光波导偏振器单片集成在同一硅基底上,该系统在 GS1020组合振动测量仪(美国)上进行了测试,检测系统性能良好,能满足高精度、宽频带地震勘探要求.
A kind of photo-electronic integrated accelerometer based on waveguide M-Z in- terference is presented.The silicon crystal is adopted as the substrate.The core of the photo- electronicintegrated acceleration is the silicon harmonic oscillator,which is supported by four silicon beams and integrated on the signal beam of the M-Z interferometer.We fixed the ac- celerometer onto the top of a mechanical vibrator GS1020,which was made in American.The experimental curve of seismometer frequency response is achieved.It provieds mordern geologic prospecting with a novel detection technoogy.
A kind of photo-electronic integrated accelerometer based on waveguide M-Z in- terference is presented.The silicon crystal is adopted as the substrate.The core of the photo- electronicintegrated acceleration is the silicon harmonic oscillator,which is supported by four silicon beams and integrated on the signal beam of the M-Z interferometer.We fixed the ac- celerometer onto the top of a mechanical vibrator GS1020,which was made in American.The experimental curve of seismometer frequency response is achieved.It provieds mordern geologic prospecting with a novel detection technoogy.
引文
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2 Balascof M,Chianesel D,Cuomo V,et al.Design of a new prototype of remote station to detect electrical and seismometric parameters in a seismic area of southern italy[J].Phys Chem Earth (C),2001,26(10-12) :787-791．
3 Haronian Dan.Low-cost micromechanical accelerometer with integrated solid-state sensor[J].Sensor and Actuators A,2000,84:149-155．
4 Barbour Neil,Schmidt George.Inertial sensor technology trends[J].Proceedings of the IEEE Symposium on Autonomous Underwater Vehicle Technolosy,1998:55-62．
5 Chen Caihe,Ding Guilan,Zhang Delong,et al.Michelson fiber-optic allelerometer[J].Review Scientific Instrument,1998,69(9) :3123-3126．
6 吴波,陈才和,张晓玲,等.M-Z 干涉型集成光学微加速度传感器结构设计[J].光电子·激光,2004,15(11) :1264-1266．
7 Suzuki T,Okada T,Sasaki O.Real-time vibration measurement using a feedback type of laser diode interferometer with an optical fiber[J].Opt Eng,1997,36(9) :2496-2502．
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