微机电数字地震检波器设计及误差标定补偿方法
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摘要
研制一种新型数字硅MEMS地震检波器,集成三支硅MEMS陀螺与加速度计,可提供三维加速度、速度、角速度及位移等振动信息,可提高检波器的信息量及效率;提出的基于无需指北单轴速率转台的硅MEMS地震检波器六位置正反速率标定方法,不仅可提高标定精度与效率,且可减小标定工作量。并经实验验证该数字硅MEMS地震检波器样机及标定补偿方法的可行性与适用性。
A new-type seismic geophone,integrating three MEMS aeeelerometers and gyroscopes,was developed.It can provide informations of linear acceleration,linear velocity,angular velocity and vibration displacement with greatly improved performance and efficiency.A new six-position plus rotation calibration scheme for the digital geophone was proposed which utilizes only a single axis turn-table without north reference.The experimental results show that the proposed method improves the measurement precision,and verifies the validity of the silicon MEMS geophone.
A new-type seismic geophone,integrating three MEMS aeeelerometers and gyroscopes,was developed.It can provide informations of linear acceleration,linear velocity,angular velocity and vibration displacement with greatly improved performance and efficiency.A new six-position plus rotation calibration scheme for the digital geophone was proposed which utilizes only a single axis turn-table without north reference.The experimental results show that the proposed method improves the measurement precision,and verifies the validity of the silicon MEMS geophone.
引文
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[14]杜敏,林玮,路鹏,等.振动测量用叉指式硅微加速度计性能研究[J].地震工程与工程振动,2007,27(6):248-252.DU Min,LIN Wei,LU Peng,et al.Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J].Journal of Earthquake Engineering and Engineering Vibration,2007,27(6):248-252.
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[17]Li J L,Du M.Fuzzy modeling and compensation of scale factor for MEMS gyroscope[J].Mechanika,2010,1:766-771.
[2]马洁美,滕云田,王喜珍,等.基于微机电的速度型地震传感器技术仿真[J].地震地磁观测与研究,2006,27(2):78-81.MA Jie-mei,TENG Yun-tian,WANG Xi-zhen,et al.Emulation of MEMS velocity seismometer technology[J].Seismological and Geomagnetic Observation and Research,2006,27(2):78-81.
[3]Fu J H,Wang J J,Li Z T,et al.A new seismic emergency auto-handling instrument for the lifeline engineering:low cost embedded system solution[J].2010International Conference on Intelligent Computation Technology and Automation,2010,1:242-245.
[4]Li J L,Fang J C,Sheng W.Pendulum micromechanical angular accelerometer with force feedback[C].IEEE International Conference on Mechtronics and Automation,IEEE,2007:2673-2677.
[5]王辉明,宋志翔,马国庆.MEMS加速度传感器开发及在地球物理勘探中的应用[J].勘探地球物理进展,2005,28(3):223-226.WANG Hui-ming,SONG Zhi-xiang,Ma Guo-qing.Development of MEMS acceleration sensor and application in geophysical exploration[J].Progress in Exploration Geophysics,2005,28(3):223-226.
[6]刘钢锋,朱威,邹彤,等.MEMS加速度传感器在强震观测中的应用[J].大地测量与地球动力学,2011,31(6):1671-5942.LIU Gang-feng,ZHU Wei,ZOU Tong,et al.Application ofMEMS acceleration sensor to microseism observation[J].Journal of Geodesy and Geodynamics,2011,31(6):1671-5942.
[7]张晓丹,柯熙政,张志禹,等.微电子机械系统数字地震检波器模拟方法的研究[J].机械科学与技术,2011,30(9):1592-1596.ZHANG Xiao-dan,KE Xi-zheng,ZHANG Zhi-yu,et al.Research on the analogy method of micro-electro-mechanical system digital geophone[J].Mechanical Science and Technology for Aerospace Engineering,2011,30(9):1592-1596.
[8]Rohmanuddin M,Budi E M,Ferdiana F.Development of seismic sensor application using micro electromechanical systems[C].2nd International Conference on Instrumentation Control and Automation,Bandung,Indonesia,2011:370-374.
[9]谌贵辉,赵万明,任诚,等.新型MEMS地震检波器的研究[J].传感器与微系统,2010,29(8):29-33.CHEN Gui-hui,ZHAO Wan-ming,REN Cheng,et al.Research of new seismic geophone based on MEMS[J].Transducer and Microsystem Technologies,2010,29(8):29-33.
[10]Anis Y H,Cleghorn W L,Mills J K.Modal analysis of microgrippers used in assembly of MEMS devices[C].The 2005International Conference on MEMS,NANO and Smart Systems,2005:1-6.
[11]唐东林,梁政,陈浩.用于地震勘探的新型高精度地震检波器研究[J].振动与冲击,2008,27(2):162-165.TANG Dong-lin,LIANG Zheng,CHEN Hao.A novel geophone with high accuracy[J].Journal of Vibration and Shock,2008,27(2):162-165.
[12]Tsutsumino T,Suzuki Y,Kasagi N,et al.Seismic power generator using high-performance polymer electrets[C].MEMS Istanbul,Turkey,2006:98-101.
[13]杨学山.加速度计频率特性扩展技术研究[J].振动与冲击,2010,29(4):81-83,106.YANG Xue-shan.Frequency characteristics extension of an accelerometer[J].Journal of Vibration and Shock,2010,29(4):81-83,106.
[14]杜敏,林玮,路鹏,等.振动测量用叉指式硅微加速度计性能研究[J].地震工程与工程振动,2007,27(6):248-252.DU Min,LIN Wei,LU Peng,et al.Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J].Journal of Earthquake Engineering and Engineering Vibration,2007,27(6):248-252.
[15]Mao G,Gu Q T.Microminiature inertial measurement system and its applications[J].Tsinghua Science and Technology,2001,6(4):298-303.
[16]陈北欧,孙文胜,张桂宏,等.捷联组合(设备无定向)六位置测试标定[J].导弹与航天运载技术,2001,251(3):23-27.CHEN Bei-ou,SUN Wen-sheng,ZHANG Gui-hong,et al.Strapdown unit(without orientation)six-position test calibration[J].Missiles and Space Vehicle,2001,251(3):23-27.
[17]Li J L,Du M.Fuzzy modeling and compensation of scale factor for MEMS gyroscope[J].Mechanika,2010,1:766-771.
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