光电集成加速度地震检波器及其信号处理系统
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摘要
研制出光电集成加速度地震检波器及其数字信号处理系统。该检波器将光波导M-Z干涉仪、十字横梁硅质量块简谐振子、光波导偏振器单片集成在同一硅基底上,并与光源、光电探测器、信号处理电路混合集成。数字信号处理系统以TI公司的高性能数字信号处理(DSP)芯片为核心,辅以必要的电路,实现了对加速度信号的高精度检测和误差信号的补偿。完成了实验样机的研制,测试结果表明主要性能指标达到设计要求。
Photo-electronic integrated acceleration seismometer and its digital signal processing system are researched and developed. The silicon crystal is adopted as the substrate. The M-Z interferometer, harmonic oscillator, TE mode polarizer and acousto-optic phase modulation are integrated on the silicon substrate. And the LD, the PIN detecting, processing circuit are hybrid-integrated in the system. As an advanced quality digital signal processing (DSP) chip equipped with necessary circuits is used in its digital signal processing system, a high accurate detection of the acceleration signal is achieved and the environmental interference signal is effectively compensated. The prototype is accompleted and tested, and most design requirements are achieved.
Photo-electronic integrated acceleration seismometer and its digital signal processing system are researched and developed. The silicon crystal is adopted as the substrate. The M-Z interferometer, harmonic oscillator, TE mode polarizer and acousto-optic phase modulation are integrated on the silicon substrate. And the LD, the PIN detecting, processing circuit are hybrid-integrated in the system. As an advanced quality digital signal processing (DSP) chip equipped with necessary circuits is used in its digital signal processing system, a high accurate detection of the acceleration signal is achieved and the environmental interference signal is effectively compensated. The prototype is accompleted and tested, and most design requirements are achieved.
引文
1 王文良.地震勘探仪器的发展、时代划分及其技术特征.石油仪器,2004;18(1):1—8
2 何樵登.地震勘探原理和方法,北京:地质出版社,1986
3 Wu B,Chen C H,Zhang X L,et aStructure design of Si-based M-Z interference acceleration seismic geophone.Proc SPIE2004,Beijin.J of Optoelectronics·Lase,15(11):1263-1266,Sensor2004,actua-tors A,2000,84:149—155
4 陈才和,郝永杰,张德龙,等.交流相位跟踪零差补偿技术在全光纤加速度地震检波器中的应用研究.地震工程与工程震动,2000,20(1):298—302
5 Chen Caihe,Wu Bo,Ding Guilan,et al.Research and fabrication on integrated optical chip of hybrid-integrated optical acceleration seismic geophone.Proc SPIE,2002;4919:1—7
6 刘瑞复,史锦珊.光纤传感器及其应用.北京:机械工业出版社,1987,1—9,116—121
2 何樵登.地震勘探原理和方法,北京:地质出版社,1986
3 Wu B,Chen C H,Zhang X L,et aStructure design of Si-based M-Z interference acceleration seismic geophone.Proc SPIE2004,Beijin.J of Optoelectronics·Lase,15(11):1263-1266,Sensor2004,actua-tors A,2000,84:149—155
4 陈才和,郝永杰,张德龙,等.交流相位跟踪零差补偿技术在全光纤加速度地震检波器中的应用研究.地震工程与工程震动,2000,20(1):298—302
5 Chen Caihe,Wu Bo,Ding Guilan,et al.Research and fabrication on integrated optical chip of hybrid-integrated optical acceleration seismic geophone.Proc SPIE,2002;4919:1—7
6 刘瑞复,史锦珊.光纤传感器及其应用.北京:机械工业出版社,1987,1—9,116—121
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