压电陶瓷压电特性的激光调制法测量研究
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摘要
介绍可测量压电陶瓷压电特性的激光干涉调制测量方法。采用相干检测原理对信号进行提取,不仅可以抑制噪声对干涉信号的影响,而且还可以大大降低光电探测器和电路的1/f噪声。与通常干涉仪测量方法相比,这种方法具有测量灵敏度高等优点。利用该方法对压电陶瓷压电特性进行了测量,讨论了激励电压信号的频率、幅度对压电陶瓷压电常数d31的影响,并对其压电迟滞曲线进行了测量。
A modulated laser interferometer used for piezoelectric characteristic measurement of the piezoelectric ceramic is discussed. By this method, it can not only suppress the effect of noises on the interference signal, but also adequately reduce the effect of so called 1/f noise of the photo-detector and electric elements. Compared with general interferometric method, the modulation interferometry has an advantage of high precision. Finally, the piezoelectric constant d (31) of a piezoelectric ceramic versus the frequency and amplitude of the excited voltages,and the hysteresis loop of the material are measured with this method.
A modulated laser interferometer used for piezoelectric characteristic measurement of the piezoelectric ceramic is discussed. By this method, it can not only suppress the effect of noises on the interference signal, but also adequately reduce the effect of so called 1/f noise of the photo-detector and electric elements. Compared with general interferometric method, the modulation interferometry has an advantage of high precision. Finally, the piezoelectric constant d (31) of a piezoelectric ceramic versus the frequency and amplitude of the excited voltages,and the hysteresis loop of the material are measured with this method.
引文
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[2] 李远,秦自楷,周志港.压电与铁电材料的测量[M].北京:科学出版社.1994.
[3] 范素华,王培吉.激光干涉法测压电陶瓷的压电常数d31[J].应用光学,1997,18(4):30-32.
[4] 高西汉,陈尧生.干涉法测量压电材料的复压电常数[J].光学学报,1995,15(11):1581-1584.
[5] 吴新民,陈进榜,等.用干涉法测量压电陶瓷的动态频率响应特性[J].红外与激光工程,2002,31(3):257-260.
[6] ZZhao,etal.Determinationofthepiezoelectriccoe-fficientsd33athighfrequencybylaserinterferometry[J].Ferroelectrics,1997,195:35-38.
[7] LBurianova,MEule,MProkopova.DeterminationofthepiezoelectriccoefficientsdijofPZTceramicsandcompositesbylaserinterferometry[J].JEurCeramicSoc,2001,21(9):1387-1390.
[8] JFLi,DViehland.Simple,high-resolutioninter-ferometerforthemeasurementoffrequencydependentcomplexpiezoelectricresponsesintheferroelectricceramics[J].RevSciInstrum,1995,66(1):215-221.
[9] QMZhang,WYPan,LECross.Laserinter-ferometerforthestudyofpiezoelectricandelectrostrictivestrains[J].JApplPhys,1987,63(8):2492-2496.
[10] 罗俊,范淑华,蔡惟鑫.地壳应变的激光干涉调制法测量[J].地震学报,1994,14(2):76-81.
[11] ZhouZe-bing,etal.Seismicnoiseeffectonequiv-alenceprincipletestusingfree-fallinterferometry[J].ChinPhysLett,2001,18(1):10-12.
[12] ZhouZe-bing,etal.Newupperlimitfromterr-est-rialequivalenceprincipletestforextendedrotatingbodies[J].PhysRevD,2002,66(2):1-4.
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