硅基底复合自组装膜的制备及其微摩擦磨损性能研究
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摘要
采用共吸附法,在硅基底表面制备3-氨基丙基三乙氧基硅烷(APS)和十二烷基三甲氧基硅烷(WD-10)复合自组装膜.通过分子动力学模拟不同温度与混合分子在不同比例下的混合体系界面结合能;依据模拟结果,采用正交试验法设计试验方案制备9种不同条件下的自组装膜;采用原子力显微镜、接触角测定仪以及X射线光电子能谱仪对自组装膜的表面形貌、湿润性能和化学成分进行表征分析;利用微摩擦测试仪对自组装膜的微摩擦磨损性能进行性能测试.结果表明:混合分子成功组装到羟基化硅基底表面,并且当组装温度为25℃,组装时间为4 h,组装溶液的pH为6时,自组装膜的质量较好;制备的复合自组装膜由于引起了边界润滑效应,有效减小了试件表面的摩擦磨损,且两种混合分子比例为1:1时自组装膜的减摩特性最佳.
Self-assembling composite monolayers of 3-aminopropyl triethoxysilane(APS) and dodecyl trimethoxysilane(WD-10) were coated on the surface of silicon substrate by coadsorption method. Molecular dynamics was used to simulate the interfacial binding energy of the mixed system at elevated temperatures and under different molecule ratios.And nine different experimental conditions were designed by orthogonal design according to the simulation results. The surface morphologies, wettability and chemical composition of SAMs were characterized by atomic force microscopy,contact angle tester and X-ray photoelectron spectroscopy, the results showed that silane molecules were successfully fabricated on the surface of the hydroxylated silicon substrate and the best quality of the SAMs was obtained at 25 ℃ for assembly temperature, 4 h for assembly time and 6 for the pH of the solution. Besides, the microtribological properties of SAMs were evaluated on a microtribometer and the worn surface were investigated by scanning electron microscope.Compared with the hydroxylated substrate, the SAMs caused boundary lubrication effect and reduced the friction and wear on the surface of the specimens. And the lowest friction coefficient and smallest width of wear were achieved at 1:1 for the ratio of APS to WD-10.
Self-assembling composite monolayers of 3-aminopropyl triethoxysilane(APS) and dodecyl trimethoxysilane(WD-10) were coated on the surface of silicon substrate by coadsorption method. Molecular dynamics was used to simulate the interfacial binding energy of the mixed system at elevated temperatures and under different molecule ratios.And nine different experimental conditions were designed by orthogonal design according to the simulation results. The surface morphologies, wettability and chemical composition of SAMs were characterized by atomic force microscopy,contact angle tester and X-ray photoelectron spectroscopy, the results showed that silane molecules were successfully fabricated on the surface of the hydroxylated silicon substrate and the best quality of the SAMs was obtained at 25 ℃ for assembly temperature, 4 h for assembly time and 6 for the pH of the solution. Besides, the microtribological properties of SAMs were evaluated on a microtribometer and the worn surface were investigated by scanning electron microscope.Compared with the hydroxylated substrate, the SAMs caused boundary lubrication effect and reduced the friction and wear on the surface of the specimens. And the lowest friction coefficient and smallest width of wear were achieved at 1:1 for the ratio of APS to WD-10.
引文
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[2]Zhang W,Zhang D C,Wang Y Y.Survey and development of MEMS[J].Semiconductor Information,2002,119(1-3):107-115.
[3]Mohamed Gad-el-Hak.Foundation of MEMS(Zhao Yongmei,Duan Ruifei,Ji An translation)[M].Beijing:Machinery Industry Press,2017(in Chinese)[Mohamed Gad-el-Hak.微机电系统基础(赵永梅,段瑞飞,季安译)[M].北京:机械工业出版社,2017].
[4]Chen Yonghua.Research and prospect of MEMS[J].Electronic Mechanical Engineering,2011,27(3):1-7(in Chinese)[陈勇华.微机电系统的研究与展望[J].电子机械工程,2011,27(3):1-7].doi:10.3969/j.issn.1008-5300.2011.03.001.
[5]Yan Yucai,Zhang Duan.Research status and prospect of microelectro-mechanical system technology[J].Special Equipment for Electronics Industry,2011,40(4):1-8(in Chinese)[严宇才,张端.微机电系统技术的研究现状和展望[J].电子工业专用设备,2011,40(4):1-8].doi:10.3969/j.issn.1004-4507.2011.04.001.
[6]Luo Jianbin,He Yu,Wen Shizhu,et al.Challenges to tribology arisen from the development of micro-and nano-manufacturing technology[J].Tribology,2005,25(3):283-288(in Chinese)[雒建斌,何雨,温诗铸,等.微/纳米制造技术的摩擦学挑战[J].摩擦学学报,2005,25(3):283-288].doi:10.3321/j.issn:1004-0595.2005.03.020.
[7]Komvopoulos K.Surface engineering and microtribology for microelectromechanical systems[J].Wear,1996,200(1-2):305-327.doi:10.1016/S0043-1648(96)07328-0.
[8]Bhushan B,Kulkarni A V,Boehm M,et al.Microtribological characterization of self-assembled and langmuir-blodgett monolayers by atomic and friction force microscopy[J].Langmuir,1995,11(8):3189-3198.doi:10.1021/la00008a052.
[9]Kang Z,Liu Q,Liu Y.Preparation and micro-tribological property of hydrophilic self-assembled monolayer on single crystal silicon surface[J].Wear,2013,303(1-2):297-301.doi:10.1016/j.wear.2013.03.026.
[10]Chai Zhimin.Tribology study of atomic layer deposited films[D].Beijing:Tsinghua University,2014(in Chinese)[柴智敏.原子层沉积薄膜摩擦特性研究[D].北京:清华大学,2014].
[11]Liu Q,hang Z X.Preparation and micro-tribological property of hydrophobic organic films on the surface of Mg-Mn-Ce magnesium alloy[J].Progress in Organic Coatings,2015,84:42-49.doi:10.1016/j.porgcoat.2015.02.015.
[12]Wu Jian.Study on the lubrication of MEMS device by liquid and magnetic field controlled ferrofluid[D].Xuzhou:China University of Mining and Technology,2015(in Chinese)[吴健.硅基MEMS器件的液体润滑及纳米磁性液体磁控润滑研究[D].徐州:中国矿业大学,2015].
[13]Houston J E,Doelling C M,Vanderlick T K,et al.Comparative study of the adhesion,friction,and mechanical properties of CF3-and CH3-terminated alkanethiol monolayers[J].Langmuir,2002,35(7):3926-3932.doi:10.1002/chin.200236290.
[14]Cui Baofeng,Zhou Huidi,Zhang Junyan,et al.Preparation and tribological properties of inserted PAMAMS SAMs:influence of chain length[J].Tribology,2011,31(1):1-6(in Chinese)[崔宝凤,周惠娣,张俊彦,等.聚酰胺胺类树枝形聚合物(PAMAM)插入式自组装膜的制备与摩擦学性能:小分子链长的影响[J].摩擦学学报,2011,31(1):1-6].doi:10.16078/j.tribology.2011.01.001.
[15]Wang Ying,Wang Liping,Xue Qunji.Preparation and tribological properties of multiply-alkylated cyclopentane/(3-aminopropyl)triethoxylsilane double-layer film on silicon[J].Tribology,2010,30(5):437-442(in Chinese)[王莹,王立平,薛群基.多烷基环戊烷/有机硅烷双层膜的制备及摩擦学性能研究[J].摩擦学学报,2010,30(5):437-442].doi:10.16078/j.tribology.2010.05.008.
[16]Liu Sisi,Zhang Yan,Tong Jiawei.Preparation and tribological properties of dual self-assembled monolayers/ionic liquids composite lubricating films[J].Tribology,2017,37(1):107-114(in Chinese)[刘思思,张言,童佳威.双层自组装分子/离子液体复合润滑薄膜的制备及其摩擦学性能研究[J].摩擦学学报,2017,37(1):107-114].doi:10.16078/j.tribology.2017.01.014.
[17]Huo L,Du P,Zhou H,et al.Fabrication and tribological properties of self-assembled monolayer of n-alkyltrimethoxysilane on silicon:Effect of SAM alkyl chain length[J].Applied Surface Science,2017,396 :S0169433216324096.doi:10.1016/j.apsusc.2016.11.049.
[18]Feng Yufei,Chen Qixiang,Ma Liang,et al.Recent advances in thin film binding energy measurement technology[J].Science and Technology Information,2014(12):8-9,11(in Chinese)[冯宇飞,陈旗湘,马亮,等.薄膜结合能测量技术的最新进展[J].科技信息,2014(12):8-9,11].doi:10.3969/J.ISSN.1671-6027.2014.12.005.
[19]Zhang L,Xue Z,Zhang C,et al.Molecular dynamics studies on the selective deposition of 3(5)-(9-anthryl)pyrazole onto self-assembled monolayers[J].Chemical Journal of Chinese Universities,2016,37(3):505-512(in Chinese)[张鲁格,薛泽旭,张翀,等.分子动力学模拟3(5)-(9-蒽基)吡唑分子在自组装膜上的选择性沉积[J].高等学校化学学报,2016,37(3):505-512].doi:10.7503/cjcu20150781.
[20]Sun Yuanyang.Preparation and tribological properties of silane mixed self-assembled monolayers[D].Xuzhou:China University of Mining and Technology,2014(in Chinese)[孙远洋.硅烷混合自组装膜的制备及其摩擦学性能研究[D].徐州:中国矿业大学,2014].
[21]Bai Tao.Preparation and tribological investigation of rare earth nanocomposite thin films[D].Shanghai Jiao Tong University,2007(in Chinese)[白涛.稀土复合纳米薄膜的制备及其摩擦学性能研究[D].上海:上海交通大学,2007].
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