基于LD/PSD的激光同轴度校正技术研究
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摘要
在机械设备的安装和维护过程中,同轴度精密测量和校准是一个非常重要的工作环节。轴系的对中精度是保证设备正常运行、降低振动和磨损、节省能耗、延长使用寿命的重要技术指标。英国皇家研究机构的一份调查报告指出,50%以上的机器故障是由于传动设备联轴器不对中引起的。
激光对中仪是目前较为理想的自动对中测量仪器,国外已经有多种高精度的产品,如德国普乐福尼克对中仪,瑞典FIXTURLASER对中仪等,但由于商业原因,未见其原理描述。在国内尚无该产品,而实际工程中又迫切需要的情况下,本课题研究了一种新的对中测量技术,并完成了原理样机的研制工作。
激光对中仪的核心部件是半导体激光器(LD)和高分辨率的位置敏感探测器(PSD),核心算法和人机交互功能由一个便携式PC机完成。本文设计了一种单光束双探测器的激光对中仪结构,并建立了基于双PSD和单PSD的数学模型,可分别实现转动90°角测量和转动任意角度测量。在实际测量中,只要测得在两个角度时光斑的坐标,即可计算出两轴的平行偏差和角度偏差,并给出机器支脚的调整量。系统硬件主要包括半导体激光器、位敏传感器、倾角传感器、信号放大电路、数据采集处理系统和LCD显示模块。软件部分采用C语言编写了数据采集模块、数据处理模块和友好的人机交互界面,测量结果以图形和文字的方式直观的显示给用户。针对PSD的非线性失真,提出了非线性校正的两种方法:线性插值法和神经网络法,并采用神经网络方法进行了MATLAB仿真,使PSD的输出具有了较好的线性度。通过理论分析和实验,讨论了测试条件对PSD探测精度的影响,提出了克服干扰的措施,采用光学滤波和软件补偿相结合的方法基本消除了背景光的影响。最后,通过同轴度测量实验和对实验结果的分析,证实了数学模型的正确性和仪器的可重复性。
In the process of assemblage and maintenance of mechanical equipment, precise coaxial measurement and calibration is an important step, which can guarantee normal operation of the equipment, can reduce vibration and abrasion, can save energy consumption, and can prolong the useful life. According to the research of Royal institution, up to 50% of all breakdowns in rotating machinery are caused by misalignment.The shaft laser alignment is an optimal automatic alignment instrument presently. There are many high precision foreign products, such as ROTALIGN from German, FXITURLASER from Sweden. Because of the business secret, the principle is unknown. In the condition that there is no such instrument in inland, and such instrument is urgent need, this project researches a new alignment measuring technology and finishes the model machine's manufacture.The core components of shaft laser alignment are laser diode (LD) and position sensitive detector (PSD) with high resolution. A portable personal computer will process the main arithmetic and computer-human interaction. In this thesis, a new alignment instrument structure with single beam of laser and duel position sensitive detectors is designed. Two mathematic models and formulas are established based on two PSD and single PSD, which can respectively fulfill measurement with 90° rotating angle and discretionary angle each time. In practice, when coordinates of light spots in two positions are measured, people can obtain the offset, the angular deviation and adjust value. The hardware system includes LD, PSD, inclinometer, signal magnified circuit, data collection-handling system and LCD module. The software is programmed with C language, including data collection module, data processing module, and friendly computer-human interaction interface that can display the result of measurement as figures and words for user. To the question of nonlinearity of PSD, two methods of linearization are put forward, both linear interpolation and neural networks. After simulation of neural net, the output of PSD has well linearity. Through the analysis of theory and experiment, the author discusses the influence of testing condition on detection precision of PSD and brings anti-interference means forward. In combination with optics filtering, the software compensation method can basically eliminate the influence of background light. Finally, it proves the correctness of mathematic model and the repeatability of instrument by analyzing the experiment result.
激光对中仪是目前较为理想的自动对中测量仪器,国外已经有多种高精度的产品,如德国普乐福尼克对中仪,瑞典FIXTURLASER对中仪等,但由于商业原因,未见其原理描述。在国内尚无该产品,而实际工程中又迫切需要的情况下,本课题研究了一种新的对中测量技术,并完成了原理样机的研制工作。
激光对中仪的核心部件是半导体激光器(LD)和高分辨率的位置敏感探测器(PSD),核心算法和人机交互功能由一个便携式PC机完成。本文设计了一种单光束双探测器的激光对中仪结构,并建立了基于双PSD和单PSD的数学模型,可分别实现转动90°角测量和转动任意角度测量。在实际测量中,只要测得在两个角度时光斑的坐标,即可计算出两轴的平行偏差和角度偏差,并给出机器支脚的调整量。系统硬件主要包括半导体激光器、位敏传感器、倾角传感器、信号放大电路、数据采集处理系统和LCD显示模块。软件部分采用C语言编写了数据采集模块、数据处理模块和友好的人机交互界面,测量结果以图形和文字的方式直观的显示给用户。针对PSD的非线性失真,提出了非线性校正的两种方法:线性插值法和神经网络法,并采用神经网络方法进行了MATLAB仿真,使PSD的输出具有了较好的线性度。通过理论分析和实验,讨论了测试条件对PSD探测精度的影响,提出了克服干扰的措施,采用光学滤波和软件补偿相结合的方法基本消除了背景光的影响。最后,通过同轴度测量实验和对实验结果的分析,证实了数学模型的正确性和仪器的可重复性。
In the process of assemblage and maintenance of mechanical equipment, precise coaxial measurement and calibration is an important step, which can guarantee normal operation of the equipment, can reduce vibration and abrasion, can save energy consumption, and can prolong the useful life. According to the research of Royal institution, up to 50% of all breakdowns in rotating machinery are caused by misalignment.The shaft laser alignment is an optimal automatic alignment instrument presently. There are many high precision foreign products, such as ROTALIGN from German, FXITURLASER from Sweden. Because of the business secret, the principle is unknown. In the condition that there is no such instrument in inland, and such instrument is urgent need, this project researches a new alignment measuring technology and finishes the model machine's manufacture.The core components of shaft laser alignment are laser diode (LD) and position sensitive detector (PSD) with high resolution. A portable personal computer will process the main arithmetic and computer-human interaction. In this thesis, a new alignment instrument structure with single beam of laser and duel position sensitive detectors is designed. Two mathematic models and formulas are established based on two PSD and single PSD, which can respectively fulfill measurement with 90° rotating angle and discretionary angle each time. In practice, when coordinates of light spots in two positions are measured, people can obtain the offset, the angular deviation and adjust value. The hardware system includes LD, PSD, inclinometer, signal magnified circuit, data collection-handling system and LCD module. The software is programmed with C language, including data collection module, data processing module, and friendly computer-human interaction interface that can display the result of measurement as figures and words for user. To the question of nonlinearity of PSD, two methods of linearization are put forward, both linear interpolation and neural networks. After simulation of neural net, the output of PSD has well linearity. Through the analysis of theory and experiment, the author discusses the influence of testing condition on detection precision of PSD and brings anti-interference means forward. In combination with optics filtering, the software compensation method can basically eliminate the influence of background light. Finally, it proves the correctness of mathematic model and the repeatability of instrument by analyzing the experiment result.
引文
[1] Anon. Laser-optical shaft alignment cuts energy costs. World Pumps. 1995(340):22-24
[2] Xu,M.J.Zatezalo and R.D.Marangoni. Reducing power loss through shaft alignment.P/PM Technology, 1993.37～38
[3] E.Daintith P.Glatt,Pruftechnik A G.对旋转轴进行激光对中以降低生产成本——降低能耗,延长机器平均无故障时间,节省转轴对中时间.高天伦译.中国设备工程,2004(10):54～55
[4] Su Z;Rowlands H. A laser alignment system for boat assembly. Sensor Review. 2000.20(3):206～211
[5] 杜希鹏,吕新民,张丽君.一种新型同轴度测量仪的研究.农机化研究,2004(6):157～162
[6] 王智群.激光对中仪研发:[硕士学位论文].北京:北京工业大学,2005
[7] Easy-Laser R Measure and Alignment System Manual. Damalini.2002:E2～E12
[8] 龚正烈,程晓曼,徐静等.单光束LD/PSD激光对中测量仪及其数学模型.光电子·激光,2002.13(4):378～381
[9] 易亚星,安郁虹,李忠科等.同轴度测量的原理与方法.仪器仪表学报.2002(6):39～41
[10] 李忠科,赵静,马骥.双LD—双PSD同轴度测量技术研究.计算机测量与控制.2005.13(11):1195～1196
[11] 马喜来.一种多功能激光对中仪的设计和实验:[硕士学位论文].成都:电子科技大学,2005
[12] 朱世强,王宣银.机器人技术以及应用.杭州:浙江大学出版社,2001.60～62
[13] 李晓彤.几何光学和光学设计.杭州:浙江大学出版社,1997.22～28
[14] Y.J.Sohn,J.H.Kwon,O.S.Choel. Portable autocollimators using the laser diode and the position sensitive detector. Rev. Sci. Instru., 1998.69(2):402～405
[15] (日)栖原敏明.半导体激光器基础(周南生译).北京:科学出版社,2002.1～2
[16] 王星联.便携式对中/准直测量分析仪研究:[硕士学位论文].兰州:兰州理工大学,2005
[17] 李贤,周宇,曾广荣.半导体激光器的光学准直.电子科技大学学报,1998.27(5):491～493
[18] 付跃刚,刘智,张磊等.四种用于跟踪的探测器比较与分析.仪器仪表学报,2005.26(8):136～138
[19] 周保玉,陈培锋,朱明珠等.基于PSD的微小角度动态测量研究.仪器仪表与检测技术, 2005.24(4):59～61
[20] 吴晓梅,鸟井昭宏,井上透等.基于可移动界标的微机器人的位置和角度的测量.仪器仪表与检测技术,2005.24(6):64～66
[21] Nuio.T. A study of the hole position sensor with 2-dimensional PSD.Trans.The Institute of Electronics, Information and Communication Engineers, 1991. 74(12):818～820
[22] Peter Schaefer, Ronald D.Williams, G.Kirk Davis,etal. Accuracy of position detection using a position-sensitive detector. IEEE Trans. Instrumentation and Measurement, 1998. 47(4):914～919
[23] Shibata, T.-A.;Sakemi, Y.;Kobayashi, H. High precision laser alignment monitoring system for HERMES tracking detectors. Nuclear Instruments & Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1998. 411(1): 75-80
[24] Kovacevic, M.Zadro. Two-dimensional position sensitive silicon photodiode as a charged particle detector. Nucl. Instr.and Meth., 1999.A423:103～107
[25] 鲍超.信息检测技术.杭州:浙江大学出版社,2002.92～97
[26] 唐九耀,黄梅珍,陈钰清.二维PSD的结构和性能分析.功能材料与器件学报,2000.6(3):301～304
[27] Wanjun Wang, Ilene J.Bush-Vishniac. The linearity and sensitivity of lateral effect position sensitive devices-an improved geometry. IEEE Trans. Electron Devices, 1989.36(111):2475～2480
[28] 邓丰涛,陶德馨,孙世基.二维位敏传感器PSD在同轴度精密测量中的研究.武汉理工大学学报(交通科学与工程版),2004.28(5):678～680
[29] J.L.Moruzzi,BEng,PhD,CEng,MIEE;R.Cunliffe,BSc,MSc(Eng).Low-cost optical alignment system, IEE Proceedings, 1989.136(2):45～48
[30] 林知木,潘宏侠.激光测试系统PSD信号处理电路的研究.科技情报开发与经济,2005.15(3):193～194
[31] 赵茂泰.智能仪器原理及应用.北京:电子工业出版社,2004.11～14
[32] 刘乐善.微型计算机接口技术及应用.武汉:华中科技大学出版社,2002.266～267
[33] 张如洲.微型计算机数据采集与处理.北京:北京工业出版社.1987.31～33
[34] 李兰友,王俊省,王强如.TURBO C语言屏幕绘图.北京:电子工业出版社.1994.10～13
[35] 龚建伟,熊光明.Visual C++/Turbo C串口通信编程实践.北京:电子工业出版社.2004.168～175
[36] 袁红星,王志兴,贺安之.PSD非线性修正的算法研究.仪器仪表学报,1999.20(3):271～274
[37] 曾超.基于二维位置敏感探测器PSD的研究及应用:[硕士学位论文].杭州:浙江大学, 2003
[38] Xiaodong Wang;Meiying Ye. Modeling and non-linearcorrection of two-dimension photo-electric position sensitive detector. The International Society for Optical Engineering. 2002(4919): 452-460
[39] 莫长涛,陈长征,张黎丽等.神经网络在光电位置坐标传感器中的应用.激光技术,2003.27(6):594～596
[40] Chen Changzheng, Song Hongying. Wear Fault Diagnosis of Machinery Based on Neural Networks and Gray Relationship. Journal of International Plants Engineering and Management. 2001.6 (3): 164～169
[41] 郭海涛,张殿伦,马国芳等.使用BP算法时应考虑的若干问题.佳木斯大学学报,2000.18(4):363～365
[42] 闻新,周露,李翔等.MATLAB神经网络仿真与应用.北京:科学出版社,2003.278～280
[43] 李忠科,秦永元,郭强.人工神经网在二维PSD器件非线性修正中的应用.计算机测量与控制,2004.12(5):461～463
[44] 吕爱民,袁红星,贺安之.入射光强和背景光对二维光电位置敏感器件干扰的影响.光学学报,1998.18(6):762～766
[45] 贺安之,阎大鹏.现代传感器原理及应用.北京:宇航出版社,1995.98～99
[46] 吕爱民,袁红星,贺安之.光斑模式对PSD定位的研究.激光技术,1998.22(5):294～297
[47] Qian D H, Wang W J, Busch-Vishniac I J, etal. A method for measurement of multiple positions on one position-sensitive detector(PSD)[J]. IEEE Trans Instrum Meas, 1993.42(1):14～18
[48] 王广志,丁海曙,丁辉.位置敏感器件(PSD)的杂光干扰研究.清华大学学报,1997.37(1):61～64
[49] Narayanan C, Buckman A.B,Busch-vishniac I J, etal. Position dependence., of the transient response of a position-sensitive detector under periodic pulsed light modulation. IEEE Trans. Electron Devices, 1993.40(9): 1688～1694
[50] 姚恩涛,周克印.光电位置探测器的环境光补偿方法的研究.数据采集与处理,1999.14(1):119～121
[51] 徐士良.C常用算法程序集.北京:清华大学出版社,2003.93～96
[2] Xu,M.J.Zatezalo and R.D.Marangoni. Reducing power loss through shaft alignment.P/PM Technology, 1993.37～38
[3] E.Daintith P.Glatt,Pruftechnik A G.对旋转轴进行激光对中以降低生产成本——降低能耗,延长机器平均无故障时间,节省转轴对中时间.高天伦译.中国设备工程,2004(10):54～55
[4] Su Z;Rowlands H. A laser alignment system for boat assembly. Sensor Review. 2000.20(3):206～211
[5] 杜希鹏,吕新民,张丽君.一种新型同轴度测量仪的研究.农机化研究,2004(6):157～162
[6] 王智群.激光对中仪研发:[硕士学位论文].北京:北京工业大学,2005
[7] Easy-Laser R Measure and Alignment System Manual. Damalini.2002:E2～E12
[8] 龚正烈,程晓曼,徐静等.单光束LD/PSD激光对中测量仪及其数学模型.光电子·激光,2002.13(4):378～381
[9] 易亚星,安郁虹,李忠科等.同轴度测量的原理与方法.仪器仪表学报.2002(6):39～41
[10] 李忠科,赵静,马骥.双LD—双PSD同轴度测量技术研究.计算机测量与控制.2005.13(11):1195～1196
[11] 马喜来.一种多功能激光对中仪的设计和实验:[硕士学位论文].成都:电子科技大学,2005
[12] 朱世强,王宣银.机器人技术以及应用.杭州:浙江大学出版社,2001.60～62
[13] 李晓彤.几何光学和光学设计.杭州:浙江大学出版社,1997.22～28
[14] Y.J.Sohn,J.H.Kwon,O.S.Choel. Portable autocollimators using the laser diode and the position sensitive detector. Rev. Sci. Instru., 1998.69(2):402～405
[15] (日)栖原敏明.半导体激光器基础(周南生译).北京:科学出版社,2002.1～2
[16] 王星联.便携式对中/准直测量分析仪研究:[硕士学位论文].兰州:兰州理工大学,2005
[17] 李贤,周宇,曾广荣.半导体激光器的光学准直.电子科技大学学报,1998.27(5):491～493
[18] 付跃刚,刘智,张磊等.四种用于跟踪的探测器比较与分析.仪器仪表学报,2005.26(8):136～138
[19] 周保玉,陈培锋,朱明珠等.基于PSD的微小角度动态测量研究.仪器仪表与检测技术, 2005.24(4):59～61
[20] 吴晓梅,鸟井昭宏,井上透等.基于可移动界标的微机器人的位置和角度的测量.仪器仪表与检测技术,2005.24(6):64～66
[21] Nuio.T. A study of the hole position sensor with 2-dimensional PSD.Trans.The Institute of Electronics, Information and Communication Engineers, 1991. 74(12):818～820
[22] Peter Schaefer, Ronald D.Williams, G.Kirk Davis,etal. Accuracy of position detection using a position-sensitive detector. IEEE Trans. Instrumentation and Measurement, 1998. 47(4):914～919
[23] Shibata, T.-A.;Sakemi, Y.;Kobayashi, H. High precision laser alignment monitoring system for HERMES tracking detectors. Nuclear Instruments & Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1998. 411(1): 75-80
[24] Kovacevic, M.Zadro. Two-dimensional position sensitive silicon photodiode as a charged particle detector. Nucl. Instr.and Meth., 1999.A423:103～107
[25] 鲍超.信息检测技术.杭州:浙江大学出版社,2002.92～97
[26] 唐九耀,黄梅珍,陈钰清.二维PSD的结构和性能分析.功能材料与器件学报,2000.6(3):301～304
[27] Wanjun Wang, Ilene J.Bush-Vishniac. The linearity and sensitivity of lateral effect position sensitive devices-an improved geometry. IEEE Trans. Electron Devices, 1989.36(111):2475～2480
[28] 邓丰涛,陶德馨,孙世基.二维位敏传感器PSD在同轴度精密测量中的研究.武汉理工大学学报(交通科学与工程版),2004.28(5):678～680
[29] J.L.Moruzzi,BEng,PhD,CEng,MIEE;R.Cunliffe,BSc,MSc(Eng).Low-cost optical alignment system, IEE Proceedings, 1989.136(2):45～48
[30] 林知木,潘宏侠.激光测试系统PSD信号处理电路的研究.科技情报开发与经济,2005.15(3):193～194
[31] 赵茂泰.智能仪器原理及应用.北京:电子工业出版社,2004.11～14
[32] 刘乐善.微型计算机接口技术及应用.武汉:华中科技大学出版社,2002.266～267
[33] 张如洲.微型计算机数据采集与处理.北京:北京工业出版社.1987.31～33
[34] 李兰友,王俊省,王强如.TURBO C语言屏幕绘图.北京:电子工业出版社.1994.10～13
[35] 龚建伟,熊光明.Visual C++/Turbo C串口通信编程实践.北京:电子工业出版社.2004.168～175
[36] 袁红星,王志兴,贺安之.PSD非线性修正的算法研究.仪器仪表学报,1999.20(3):271～274
[37] 曾超.基于二维位置敏感探测器PSD的研究及应用:[硕士学位论文].杭州:浙江大学, 2003
[38] Xiaodong Wang;Meiying Ye. Modeling and non-linearcorrection of two-dimension photo-electric position sensitive detector. The International Society for Optical Engineering. 2002(4919): 452-460
[39] 莫长涛,陈长征,张黎丽等.神经网络在光电位置坐标传感器中的应用.激光技术,2003.27(6):594～596
[40] Chen Changzheng, Song Hongying. Wear Fault Diagnosis of Machinery Based on Neural Networks and Gray Relationship. Journal of International Plants Engineering and Management. 2001.6 (3): 164～169
[41] 郭海涛,张殿伦,马国芳等.使用BP算法时应考虑的若干问题.佳木斯大学学报,2000.18(4):363～365
[42] 闻新,周露,李翔等.MATLAB神经网络仿真与应用.北京:科学出版社,2003.278～280
[43] 李忠科,秦永元,郭强.人工神经网在二维PSD器件非线性修正中的应用.计算机测量与控制,2004.12(5):461～463
[44] 吕爱民,袁红星,贺安之.入射光强和背景光对二维光电位置敏感器件干扰的影响.光学学报,1998.18(6):762～766
[45] 贺安之,阎大鹏.现代传感器原理及应用.北京:宇航出版社,1995.98～99
[46] 吕爱民,袁红星,贺安之.光斑模式对PSD定位的研究.激光技术,1998.22(5):294～297
[47] Qian D H, Wang W J, Busch-Vishniac I J, etal. A method for measurement of multiple positions on one position-sensitive detector(PSD)[J]. IEEE Trans Instrum Meas, 1993.42(1):14～18
[48] 王广志,丁海曙,丁辉.位置敏感器件(PSD)的杂光干扰研究.清华大学学报,1997.37(1):61～64
[49] Narayanan C, Buckman A.B,Busch-vishniac I J, etal. Position dependence., of the transient response of a position-sensitive detector under periodic pulsed light modulation. IEEE Trans. Electron Devices, 1993.40(9): 1688～1694
[50] 姚恩涛,周克印.光电位置探测器的环境光补偿方法的研究.数据采集与处理,1999.14(1):119～121
[51] 徐士良.C常用算法程序集.北京:清华大学出版社,2003.93～96
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