摘要
微纳米技术是近年来发展起来的一门新型的交叉学科,微纳米加工技术作为其中的一个重要基础,已经被广泛地应用于各个科研领域。传统的微纳米加工技术主要包括硅的体微加工技术、表面微加工技术、LIGA(X射线深处光刻、电铸成型和塑铸型)技术、激光微加工技术、微纳米压印技术等。这些微纳米加工技术的出现和不断发展极大地推动了微电子技术和光电子技术的发展,但也存在一些不足之处,例如它们往往需要昂贵的设备和复杂的步骤,需要较长的制备周期,以及对加工材料的限制等,这些不足限制了微纳米技术的进一步发展。因此,本课题提出了一种利用毛细管微探针的微结构制备新方法,该方法采用独特设计的毛细管微探针结合局部电化学微加工技术,能够简单、快速、批量进行各种微结构制备,在此基础上,设计研制了一套利用毛细管微探针的微结构制备系统。
本课题分别从理论方法、系统设计和实验分析三个方面对这种微结构制备技术进行了研究,主要研究工作和创新点总结如下：
1、提出了一种利用毛细管微探针的微结构制备新方法。设计了一种新型的微探针,该微探针是将插有Pt-Ir丝的玻璃毛细管单个或者多个并列在一起制成的,将Pt-Ir丝的末端削尖之后,使其与毛细管端口基本持平。利用该新型微探针结合局部电化学微加工技术可以加工出均匀度非常好的微结构。
2、研制开发了一套利用毛细管微探针的微结构制备系统。系统包括电化学微加工核心单元、步进扫描与移动控制系统、CCD显微监控模块以及计算机软硬件等部分。通过系统中的CCD显微监控模块,在微结构制备的时候可以对整个加工过程进行实时显微监控,能够方便清晰的观察电化学反应引起的各种现象及微结构生长情况。该系统具有成本低、操作简单、系统元件可置换性强等优点,可实现各种微结构快速高效地制备。
3、设计了功能完善、界面友好、控制参数丰富的步进移动控制软件系统。该软件系统包括控制步进方向、调节步进移动速度、设置步进步数等功能。通过设置不同的参数,再结合二维扫描系统的平移,可以方便地加工各种线宽和纵横比可控的微结构。
4、利用自行设计的基于毛细管微探针的微结构制备系统进行了微结构制备实验。在实验室环境下,通过调节电解液的成分和浓度、电流密度和步进移动速度,寻找最佳的加工条件,加工出点、线以及直径和高度可控的高纵横比铜柱等微结构。并通过将多个微探针并联的方式,来实现多个铜微柱的批量加工。采用金属和半导体材料作为加工基底,实现在不同材料上的微加工。这些实验结果验证了利用毛细管微探针的微结构制备新方法及其系统的可行性和稳定性。
Micro/nano-technology is a newly developed interdisciplinary subject in recent years, as one of its important branches, micro-nanofabrication technology is applied widely in a lot of areas. Traditional micro-nanofabrication technologies include bulk micromachining technology, surface micromachining technology, LIGA (X-ray deep lithography, electroform molding, plastic molding) technology, bonding technology and sacrificial layer technology, etc. The emergence and evolution of these micro-nanofabrication technologies promoted microelectronics and photonics technology's development greatly. However, these technologies had many disadvantage, for example, needed expensive equipment, complex steps, and long machining cycle, which limited the further development of micro/nano-technology. Therefore, we proposed a new technique of rapid microstructure preparation based on localized electrochemical deposition (LECD) with a special designed capillary microprobe and established a novel microstructure fabrication and monitoring system which could fabricate micro structures efficiently, rapidly and low cost.
In this project, we theoretically analyzed the new method, developed the system and carried out some experimental studies. The innovations and research work as follows:
We brought forward a new method of microstructure fabrication based on capillary microprobe. We designed a new microprobe, which is made by Pt-Ir wire directly inserted into a glass micropipette. The new microprobe could be single one or several micropipettes arrayed together. We sharpened the end of Pt-Ir wire, and placed it at the same plane with the bottom of micropipette. Using this new microprobe, microstructure with great uniformity could be fabricated based on LECD technology.
We developed a microstructure fabrication and monitoring system utilizing capillary microprobe. The system includes the core unit of microstructure fabrication, step scan and mobile control system, CCD monitoring module and computer control system. During the deposition processing, the microscope process can be monitored in real-time using CCD monitoring module. So it can be easily for us to observe the phenomenon of microstructure deposition caused by electrochemical reaction. The system has low cost, simple operation, the module can be strong substitution, etc., it can realize microstructure quickly and easily fabrication.
We designed a step mobile control software system with consummate function, friendly interface, and abundant control parameter. The control software had the function of controlling step direction, adjusting step speed and setting step count. Via setting different parameter and controlling the movement of two-dimensional step scanning system, microstructure with different width and aspect ratio could be fabricated conveniently.
In the end, using this microstructure fabrication and monitoring system, we have done a lot of experiments. By adjusting the composition and concentration of electrolyte, current density, and step-moving speed, we gained a great deal of microstructures such as point, line and micro columns with great aspect ratio (height/diameter). Several copper micro columns are obtained which are growing at the same time. Moreover, lines with micro width are also fabricated on ITO film. The experimental results well verify that this new method and its system is feasible and accuracy.
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