基于LabVIEW的朗缪尔探针等离子体诊断系统研究
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摘要
为了有效抑制霍尔推力器羽流区低温等离子体的各种污染,改善其工作性能,有必要对其羽流区等离子体参数进行准确测量。常见的等离子体诊断方法中朗缪尔探针法由于其结构简单、操作方便等优点已得到了越来越多的应用。朗缪尔探针诊断法的关键在于如何准确获取探针的伏安特性曲线。而传统朗缪尔探针诊断通常采用的是逐点测量法,这种测量方法测量的时间较长,探针容易受到污染,抗干扰能力不强,再者人工读数也会带来较大的误差,伏安曲线容易失真。在数据分析处理方面,传统的数据处理方法是人工手动计算,处理结果依赖实验者对测量数据的选择,自动化程度低,数据处理周期长。
本文针对传统的朗缪尔探针诊断系统在等离子体在数据采集和数据分析处理过程中存在的不足,开发了一套针对电推力器的朗缪尔探针全自动诊断系统。诊断系统由探针定位子系统,供电与数据采集子系统与数据处理子系统组成。探针定位子系统构建了探针机械定位系统硬件平台,实现诊断系统对探针的运动控制。诊断系统构建了供电与数据采集功能模块,通过诊断系统发送命令,实现被测等离子体的数据采集。论文研究了朗缪尔探针测试数据的处理方法,通过LabVIEW编程,诊断系统可以快速得到了电推力器羽流区等离子体的电子温度、电子数密度等参数,并实现了计算结果的图形显示和报表存储。此外,诊断系统加入S-G滤波,使系统测试曲线更加平滑,提高了系统的抗干扰能力。
通过现场实验,利用所设计诊断系统实现了等离子体参数的准确、快速测量,并且从实验采集数据计算出的电子温度和离子密度等参数与上海某研究所给出的测试数据基本一致,从而验证了朗缪尔探针等离子体自动诊断系统的可行性与有效性。
In order to effectively control the pollution of the Hall thruster and improve its performance, it is necessary to accurately measure its plume plasma parameters. Langmuir probe method is a common method for low-temperature plasma diagnosis in the study of electric propulsion. This method uses only simple devices and is easy to operate. Traditional Langmuir probe systems, however, are time-consuming and complex in operation, and have low testing precision. Therefore, the development of a fully automatic, high accuracy and anti-jamming Langmuir diagnostic system is very necessary.
A new kind of electric propulsion plume diagnosis system based on the LabVIEW virtual instrument technology is proposed in this dissertation. Three subsystems were included in the plasma diagnostic system, the probe positioning subsystem, power supply and data acquisition subsystem and data processing subsystem. A probe positioning hardware platform was constructed in the probe positioning subsystem, which can rapidly and accurately move the Langmuir probe to its target position. The plasma data in the target position were acquired in the power supply and data acquisition subsystem and uploaded to the computer. The data processing method was studied in the dissertation. Physical parameters of the plasma were calculated based on the testing data. The results can be displayed in real time and be saved in the hard disk. Furthermore, this system joins S-G filter to smooth the I-V curve and to improve the anti-interference ability of the system.
Compared with traditional diagnosis methods, the proposed plasma diagnosis system obviously increased the operating speed and precision of plasma plume diagnosis in the experiments. In addition, the plasma parameters calculated from the testing data coincide with the experimental results of Shanghai Institute of space propulsion. The langmuir probe plasma automatic diagnosis system is proved to be feasible and effective.
本文针对传统的朗缪尔探针诊断系统在等离子体在数据采集和数据分析处理过程中存在的不足,开发了一套针对电推力器的朗缪尔探针全自动诊断系统。诊断系统由探针定位子系统,供电与数据采集子系统与数据处理子系统组成。探针定位子系统构建了探针机械定位系统硬件平台,实现诊断系统对探针的运动控制。诊断系统构建了供电与数据采集功能模块,通过诊断系统发送命令,实现被测等离子体的数据采集。论文研究了朗缪尔探针测试数据的处理方法,通过LabVIEW编程,诊断系统可以快速得到了电推力器羽流区等离子体的电子温度、电子数密度等参数,并实现了计算结果的图形显示和报表存储。此外,诊断系统加入S-G滤波,使系统测试曲线更加平滑,提高了系统的抗干扰能力。
通过现场实验,利用所设计诊断系统实现了等离子体参数的准确、快速测量,并且从实验采集数据计算出的电子温度和离子密度等参数与上海某研究所给出的测试数据基本一致,从而验证了朗缪尔探针等离子体自动诊断系统的可行性与有效性。
In order to effectively control the pollution of the Hall thruster and improve its performance, it is necessary to accurately measure its plume plasma parameters. Langmuir probe method is a common method for low-temperature plasma diagnosis in the study of electric propulsion. This method uses only simple devices and is easy to operate. Traditional Langmuir probe systems, however, are time-consuming and complex in operation, and have low testing precision. Therefore, the development of a fully automatic, high accuracy and anti-jamming Langmuir diagnostic system is very necessary.
A new kind of electric propulsion plume diagnosis system based on the LabVIEW virtual instrument technology is proposed in this dissertation. Three subsystems were included in the plasma diagnostic system, the probe positioning subsystem, power supply and data acquisition subsystem and data processing subsystem. A probe positioning hardware platform was constructed in the probe positioning subsystem, which can rapidly and accurately move the Langmuir probe to its target position. The plasma data in the target position were acquired in the power supply and data acquisition subsystem and uploaded to the computer. The data processing method was studied in the dissertation. Physical parameters of the plasma were calculated based on the testing data. The results can be displayed in real time and be saved in the hard disk. Furthermore, this system joins S-G filter to smooth the I-V curve and to improve the anti-interference ability of the system.
Compared with traditional diagnosis methods, the proposed plasma diagnosis system obviously increased the operating speed and precision of plasma plume diagnosis in the experiments. In addition, the plasma parameters calculated from the testing data coincide with the experimental results of Shanghai Institute of space propulsion. The langmuir probe plasma automatic diagnosis system is proved to be feasible and effective.
引文
[1] Dunning, J.W.,Hamley, J.A.,Jankovsky, R. S., etc. An overview of electric propulsion activities at NASA[A]. In 2004.
[2]一林.电推进发展现状[J].国际太空, 2004(6): 24-26.
[3]朱毅麟.电推进的现状与展望[J].上海航天, 1998, 15(003): 48-53.
[4] Boyd, I.D. A review of Hall thruster plume modeling[J]. AIAA paper, 2000, 466.
[5]张郁.电推进技术的研究应用现状及其发展趋势[J].火箭推进, 2005, 31(2): 27-36.
[6] Jahn, R.G.,von Jaskowsky, W. Physics of electric propulsion[M]. McGraw-Hill, 1968.
[7] Martinez-Sanchez, M.,Pollard, J. Spacecraft electric propulsion-an overview[J]. Journal of Propulsion and Power, 1998, 14 (5).
[8] Kenro, M. Plasma physics for nuclear fusion. In Cambridge: MIT Press: 1989.
[9] Chen Francis, F. Introduction to plasma physics. In Plenum, New York: 1974.
[10] Golant, V.E.,Zhilinski?, A.P.,Sakharov, I.E. Fundamentals of plasma physics[M]. Wiley, 1980.
[11] Summers, S.,Reehal, H.,Shirkoohi, G. The effects of varying plasma parameters on silicon thin film growth by ECR plasma CVD[J]. Journal of Physics D: Applied Physics, 2001, 34 2782.
[12] Boswell, R.W.,Chen, F.F. Helicons-the early years[J]. Plasma Science, IEEE Transactions on, 1997, 25(6): 1229-1244.
[13] Chen, F.F.,Boswell, R.W. Helicons-the past decade[J]. Plasma Science, IEEE Transactions on, 1997, 25(6): 1245-1257.
[14]菅井秀郎.等离子体电子工程学[M].科学出版社, 2002.
[15] Kim, Y.J.,Han, S.H.,Hwang, W., etc. Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing[J]. Thin solid films, 2003, 435(1): 270-274.
[16] Robertson, J. Diamond-like carbon[J]. Pure and applied chemistry, 1994, 66(9): 1789-1796.
[17] Tristant, P.,Ding, Z.,Trang Vinh, Q., etc. Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias[J]. Thin solid films, 2001, 390(1): 51-58.
[18] Kiyohara, S.,Yagi, Y.,Mori, K. Plasma etching of CVD diamond films using an ECR-type oxygen source[J]. Nanotechnology, 1999, 10 385.
[19] Hutchinson, I. H. Principles of plasma diagnostics[M]. Cambridge Univ Pr, 2002.
[20]黄建军,余建华,Teuner, D.射频放电阻抗测量用于等离子体诊断研究[J].物理学报, 2001, 50 (12): 2403-2405.
[21]唐恩凌,张庆明.低温等离子体诊断分析[J].电工材料, 2008, (002): 46-50.
[22] Bekkeng, T.,Jacobsen, K.,Bekkeng, J., etc. Design of a multi-needle Langmuir probe system[J]. Measurement Science and Technology, 2010, 21085903.
[23]陈柱,程健,刘汉斐,等.基于单片机的静电探针自动测量系统[J].自动化仪表,2009, 30(002): 65-67.
[24]牛田野,曹金祥,金革,等.便携式等离子体Langmuir探针数据采集处理系统的研制[J].核电子学与探测技术, 2008, 28(3): 470-473.
[25]杨烁.双频容性耦合等离子体空间非均匀性诊断研究[D].大连理工大学2010.
[26]李阿红,鄢扬,王彬,等.基于数据采集系统的等离子体Langmuir探针诊断实验[J].强激光与粒子束, 2008, 20(8): 1301-1305.
[27]林榕,毛根旺,唐金兰,等.用Langmuir探针诊断MPT羽流[J].固体火箭技术, 2005, 28(2): 149-152.
[28] Bittencourt, J.A. Fundamentals of plasma physics[M]. Springer Verlag, 2004.
[29] Lieberman, M.A.,Lichtenberg, A.J. Principles of plasma discharges and materials processing[J]. 1994.
[30]任兆杏,丁振峰.低温等离子体技术[J].自然杂志, 1996, 18(004): 201-207.
[31]张宝芳.微波等离子体的静电探针测试系统的研究设计[D].电子科技大学2008.
[32]池凌飞,林揆训,姚若河,等. Langmuir单探针诊断射频辉光放电等离子体及其数据处理[J].物理学报, 2001, 50(7): 1313-1317.
[33] Bishop, R. H. Learning with LabVIEW 2009[M]. Prentice Hall, 2010.
[34]陈苏波.三菱PLC快速入门与实例提高[M].人民邮电出版社, 2008.
[35]张凯,周陬,郭栋. LabVIEW虚拟仪器工程设计与开发[J].国防工业出版社, 2004, 200 (4).
[36] Bitter, R.,Mohiuddin, T.,Nawrocki, M. LabVIEW advanced programming techniques[M]. CRC, 2007.
[37]三菱PLC.使用手册[J]. MITSUBISHI ELECTRIC CORP, 2000.
[38]罗仕鉴,朱上上,孙守迁,等.人机界面设计[M].机械工业出版社, 2002.
[39]邢建春,王平.工业控制软件互操作标准OPC综述[J].工业控制计算机, 2000, 13 (1): 29-32.
[40] Zheng, L.,Nakagawa, H. OPC (OLE for process control) specification and its developments[A]. 2002; 917-920 vol. 2.
[41] Hong-liang, L. Implementation of OPC-based Communication between PC and PLC on LabView Platform[J]. Application Research of Computers, 2003, 12.
[42]杨芷,鲁五一,熊红云.基于OPC技术的LabVIEW与PLCs通讯[J].长沙航空职业技术学院学报, 2006, 6(2): 62-65.
[43] Anwar, M.R.,Anwar, O.,Shamim, S.F., etc. Human machine interface using OPC (OLE for Process Control)[A]. 2004; 35-40.
[44]李亚磊,邓新绿,徐军. Langmuir探针在等离子体诊断中的抗干扰方法[J].真空科学与技术学报, 2005, 25(6): 459-462.
[45] Press, W.,Teukolsky, S.,Vetterling, W., etc. Savitzky-Golay smoothing filters[J]. Computers in Physics, 1990, 4(6): 669672.
[46] Wayt, H.J.,Khan, T.R. Integrated Savitzky-Golay Filter from Inverse Taylor Series Approach[A]. 2007; 375-378.
[47] Savitzky, A.,Golay, M. J.E. Smoothing and differentiation of data by simplified least squares procedures[J]. Analytical chemistry, 1964, 36(8): 1627-1639.
[48]蔡天净,唐瀚. Savitzky-Golay平滑滤波器的最小二乘拟合原理综述[J].数字通信, 2011, (1): 63-68.
[49] William, H.,Saul, A.,Brian, P.C++数值算法.北京:电子工业出版社: 2005.
[50]张乾鹏.霍尔推力器等离子体羽流特性研究[硕士论文].上海.上海航天技术研究院.2010年2月.
[2]一林.电推进发展现状[J].国际太空, 2004(6): 24-26.
[3]朱毅麟.电推进的现状与展望[J].上海航天, 1998, 15(003): 48-53.
[4] Boyd, I.D. A review of Hall thruster plume modeling[J]. AIAA paper, 2000, 466.
[5]张郁.电推进技术的研究应用现状及其发展趋势[J].火箭推进, 2005, 31(2): 27-36.
[6] Jahn, R.G.,von Jaskowsky, W. Physics of electric propulsion[M]. McGraw-Hill, 1968.
[7] Martinez-Sanchez, M.,Pollard, J. Spacecraft electric propulsion-an overview[J]. Journal of Propulsion and Power, 1998, 14 (5).
[8] Kenro, M. Plasma physics for nuclear fusion. In Cambridge: MIT Press: 1989.
[9] Chen Francis, F. Introduction to plasma physics. In Plenum, New York: 1974.
[10] Golant, V.E.,Zhilinski?, A.P.,Sakharov, I.E. Fundamentals of plasma physics[M]. Wiley, 1980.
[11] Summers, S.,Reehal, H.,Shirkoohi, G. The effects of varying plasma parameters on silicon thin film growth by ECR plasma CVD[J]. Journal of Physics D: Applied Physics, 2001, 34 2782.
[12] Boswell, R.W.,Chen, F.F. Helicons-the early years[J]. Plasma Science, IEEE Transactions on, 1997, 25(6): 1229-1244.
[13] Chen, F.F.,Boswell, R.W. Helicons-the past decade[J]. Plasma Science, IEEE Transactions on, 1997, 25(6): 1245-1257.
[14]菅井秀郎.等离子体电子工程学[M].科学出版社, 2002.
[15] Kim, Y.J.,Han, S.H.,Hwang, W., etc. Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing[J]. Thin solid films, 2003, 435(1): 270-274.
[16] Robertson, J. Diamond-like carbon[J]. Pure and applied chemistry, 1994, 66(9): 1789-1796.
[17] Tristant, P.,Ding, Z.,Trang Vinh, Q., etc. Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias[J]. Thin solid films, 2001, 390(1): 51-58.
[18] Kiyohara, S.,Yagi, Y.,Mori, K. Plasma etching of CVD diamond films using an ECR-type oxygen source[J]. Nanotechnology, 1999, 10 385.
[19] Hutchinson, I. H. Principles of plasma diagnostics[M]. Cambridge Univ Pr, 2002.
[20]黄建军,余建华,Teuner, D.射频放电阻抗测量用于等离子体诊断研究[J].物理学报, 2001, 50 (12): 2403-2405.
[21]唐恩凌,张庆明.低温等离子体诊断分析[J].电工材料, 2008, (002): 46-50.
[22] Bekkeng, T.,Jacobsen, K.,Bekkeng, J., etc. Design of a multi-needle Langmuir probe system[J]. Measurement Science and Technology, 2010, 21085903.
[23]陈柱,程健,刘汉斐,等.基于单片机的静电探针自动测量系统[J].自动化仪表,2009, 30(002): 65-67.
[24]牛田野,曹金祥,金革,等.便携式等离子体Langmuir探针数据采集处理系统的研制[J].核电子学与探测技术, 2008, 28(3): 470-473.
[25]杨烁.双频容性耦合等离子体空间非均匀性诊断研究[D].大连理工大学2010.
[26]李阿红,鄢扬,王彬,等.基于数据采集系统的等离子体Langmuir探针诊断实验[J].强激光与粒子束, 2008, 20(8): 1301-1305.
[27]林榕,毛根旺,唐金兰,等.用Langmuir探针诊断MPT羽流[J].固体火箭技术, 2005, 28(2): 149-152.
[28] Bittencourt, J.A. Fundamentals of plasma physics[M]. Springer Verlag, 2004.
[29] Lieberman, M.A.,Lichtenberg, A.J. Principles of plasma discharges and materials processing[J]. 1994.
[30]任兆杏,丁振峰.低温等离子体技术[J].自然杂志, 1996, 18(004): 201-207.
[31]张宝芳.微波等离子体的静电探针测试系统的研究设计[D].电子科技大学2008.
[32]池凌飞,林揆训,姚若河,等. Langmuir单探针诊断射频辉光放电等离子体及其数据处理[J].物理学报, 2001, 50(7): 1313-1317.
[33] Bishop, R. H. Learning with LabVIEW 2009[M]. Prentice Hall, 2010.
[34]陈苏波.三菱PLC快速入门与实例提高[M].人民邮电出版社, 2008.
[35]张凯,周陬,郭栋. LabVIEW虚拟仪器工程设计与开发[J].国防工业出版社, 2004, 200 (4).
[36] Bitter, R.,Mohiuddin, T.,Nawrocki, M. LabVIEW advanced programming techniques[M]. CRC, 2007.
[37]三菱PLC.使用手册[J]. MITSUBISHI ELECTRIC CORP, 2000.
[38]罗仕鉴,朱上上,孙守迁,等.人机界面设计[M].机械工业出版社, 2002.
[39]邢建春,王平.工业控制软件互操作标准OPC综述[J].工业控制计算机, 2000, 13 (1): 29-32.
[40] Zheng, L.,Nakagawa, H. OPC (OLE for process control) specification and its developments[A]. 2002; 917-920 vol. 2.
[41] Hong-liang, L. Implementation of OPC-based Communication between PC and PLC on LabView Platform[J]. Application Research of Computers, 2003, 12.
[42]杨芷,鲁五一,熊红云.基于OPC技术的LabVIEW与PLCs通讯[J].长沙航空职业技术学院学报, 2006, 6(2): 62-65.
[43] Anwar, M.R.,Anwar, O.,Shamim, S.F., etc. Human machine interface using OPC (OLE for Process Control)[A]. 2004; 35-40.
[44]李亚磊,邓新绿,徐军. Langmuir探针在等离子体诊断中的抗干扰方法[J].真空科学与技术学报, 2005, 25(6): 459-462.
[45] Press, W.,Teukolsky, S.,Vetterling, W., etc. Savitzky-Golay smoothing filters[J]. Computers in Physics, 1990, 4(6): 669672.
[46] Wayt, H.J.,Khan, T.R. Integrated Savitzky-Golay Filter from Inverse Taylor Series Approach[A]. 2007; 375-378.
[47] Savitzky, A.,Golay, M. J.E. Smoothing and differentiation of data by simplified least squares procedures[J]. Analytical chemistry, 1964, 36(8): 1627-1639.
[48]蔡天净,唐瀚. Savitzky-Golay平滑滤波器的最小二乘拟合原理综述[J].数字通信, 2011, (1): 63-68.
[49] William, H.,Saul, A.,Brian, P.C++数值算法.北京:电子工业出版社: 2005.
[50]张乾鹏.霍尔推力器等离子体羽流特性研究[硕士论文].上海.上海航天技术研究院.2010年2月.
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