非球面超精密在位测量与误差补偿磨削及抛光技术研究
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摘要
随着现代光学电子技术的飞速发展,应用于航天航空、天文、电子、激光以及通讯的各种光电产品不断涌现,对非球面的光学仪器的性能也提出了更高的要求,因此在批量制造非球面光学元件时,也对非球面模具的加工精度和加工材料等提出了新的要求,例如表面质量及精度要求越来越高、工件日趋变小或增大。为了解决目前非球面模具的超精密磨削制造中的关键技术,获得超精密的形状精度及超光滑表面,本文在调研国内外的超精密磨削、测量与误差补偿等大量文献资料与技术资料的基础上,对超精密磨削、测量、数据处理、误差补偿加工、超精密加工软件等方面进行了较为深入的研究。
论文的第一章首先对国内外超精密加工技术包括超精密磨削、测量、补偿与抛光技术现状进行综述性介绍,并探讨了目前的超精密磨削、测量与误差补偿中存在的问题,从而提出相应的解决措施。接着围绕超精密磨削、测量、数据处理、误差补偿加工和超精密加工软件等方面的关键技术研究进行展开。
第一个方面的关键技术是研究非球面形状的在位测量系统及其数据处理。论文在第二章中提出采用接触式测头结合激光干涉原理进行在位测量的方法,探讨接触式在位的数据误差的修正处理；也深入分析在位测量系统的测头半径误差、被测工件的对称轴半径方向的误差、对称轴倾角误差,弹性变形产生的测量误差。论文接着深入研究了在位测量系统所获的测量数据的处理方法。为提取准确的形状误差特征,首先研究对均匀密集或非均匀密集的测量数据进行准确快速地去毛刺处理；然后采用一种改进型的回归滤波方法,快速地对测量数据进行平滑处理。同时采用FFT法进行加速数据处理的方法进行也考虑。
第二个方面的关键技术则是重点对非球面磨削的砂轮对刀、砂轮半径与磨损误差补偿进行研究。在第三章中,以常用的非球面磨削方式为基础,首先采用单项误差补偿方法,深入分析超精密磨削轴对称曲面时砂轮中心位置X、Y方向的对刀误差与补偿、砂轮半径误差与补偿、砂轮磨损误差补偿；也提出一种基于直角或者圆弧砂轮的B轴旋转角度误差与补偿方法；并对X轴、旋转偏角、砂轮磨损与砂轮尺寸等综合误差的分离处理进行考虑。接着在第四章中,首先根据二轴或三轴磨削方式,考虑接触式测量原理、测头尺寸、测量对象,提出了一种获取法向残余误差曲线的方法,从而得到了对加工工件形状综合误差补偿的方法。在此基础上,针对两轴直交轴圆弧砂轮磨削方式,提出采用残余误差对称补偿法计算砂轮补偿路径；针对两轴斜轴砂轮磨削方式,提出矢量残余误差补偿方法来控制砂轮圆弧中心的补偿路径；针对三轴斜轴单点磨削方式,提出一种单点斜轴残余误差补偿的方法。进一步考虑了利用恒定加工量进行速度控制以进一步提高工件形状精度与表面粗糙度。
第三个方面的关键技术是研究超精密磨削、测量与误差补偿系统软件,进行相应的误差补偿磨削实验。第五章中编制了微小非球面超精密加工系统软件,可实现两轴或三轴联动的磨削与补偿加工所需的非球面轨迹程序。其功能包括：参数输入模块、测量模块、工件面形精度分析与误差评估模块、误差补偿模块、轨迹显示与仿真加工模块。接着在第六章中,论文对球面模具、轴对称非球面模具进行超精密磨削与误差补偿加工实验。工艺实验包括X、Z直交轴球面模具误差补偿磨削；X、Z两轴斜轴非球面模具误差补偿磨削；X、Z、B三轴斜轴球面与非球面模具误差补偿磨削,并对实验结果进行了分析,从而验证了超精密磨削、测量和误差补偿方法的合理性。最后对在位测量数据与离线测量数据进行比较,验证了在位测量系统的高精度性。
论文的第四个方面关键技术是研究超精密磁性复合流体的斜轴抛光与修正。在第七章中,为获得更高的形状精度和更低的表面粗糙度,消除超精密磨削阶段产生的表面和亚表面损伤,提出了一种新的超精密磁性复合流体斜轴抛光加工工艺。研制了磁性复合流体斜轴抛光装置,并建立了磁性复合流体加工模型,推导出磁性复合流体抛光材料的去除函数和基于驻留时间的补偿加工模型。
With the rapid development of modern optical electronics technology, a variety of optoelectronic products are applied in aerospace, astronomy, electronics, laser and optical communication fields; therewith the higher performance requirements are set for aspheric optical components. Especially, a demand of high-quality aspheric mold is put forward in machining accuracy and processing materials. In order to resolve current some key technologies for obtaining ultra-precision form accuracy and surface quality of aspheric glass lens mold, in this paper, ultra-precision grinding, measuring, data processing, error compensation processing and ultra-precision processing software development are studied on the basis of a large number of domestic and foreign literatures.
In the first chapter, the present researchs such as ultra-precision processing technology, ultra-precision grinding, measurement, compensation and polishing in domestic and foreign are overviewed. The current existing problems of ultra-precision grinding, measurement and error compensation are analyzed and appropriate solution methods are proposed. These key technologies are discussed acoordingly.
The first key technology is to study aspheric form measuring system and data processing methods. In the second chapter, an ultra-precision contact measuring method is proposed to research on the error correction of contact measuring data; some measurement errors generated from the probe size error, axis-symmetrical workpeice error in radius direction, inclined angle error and elastic deformation, are also in-depth analyzed. And then, processing approach of measurement data obtained from measurement system is studied. In order to extract the precise figure features of ground workpeice, a multi-filtration method is firstly used to quickly process uniform or non-uniform intensive measured data for accurately deburring; and then a modified regression filtering method is used to quickly filter and smooth the measurement data. At the same time, FFT method is considered to accelerate data processing.
The second key technology focuses on wheel centering error, dimension error and form error compensation in aspheric grinding. In the third chapter, based on common aspheric grinding method, single error compensation method is firstly used to compensate the wheel centering errors in X, Y direction, wheel radius error, wear error in ultra-precision grinding of an axis-symmetrical workpeice. A B-axis angle error and compensation are also proposed for right-angle and arc grinding wheels. The separation handling method of comprehensive errors including X-axis centering error, decline angle error, wear error and radius error are considered. Then in the fourth chapter, based on two-axis or three-axis grinding modes, some factors such as contact measuring principle, the probe size, measurement object are taken fully into account to access to the residual error curve and compensate a comprehensive form error. For two-axis orthogonal arc grinding mode, a new symmetrical residual error compensation method is presented to calculate compensation path of grinding wheel. For two-axis inclined grinding mode, a vector residual error compensation method is proposed to control the grinding path of arc wheel center. For three-axis inclined-single-point grinding mode, a single-point inclined-axis residual error compensation mode is also presented. In addition, speed controlling method is considered under a constant grinding volume condition to further inprove the form accuracy and surface roughness.
The third key technology is the development of the measurement and error compensation system software for ultra-precision grinding experiments. In the fifth chapter, system software of small ultra-precision aspheric grinding is developed to program two-axis or three-axis NC program for aspheric grinding and compensation processing. The software includes the following functions:the parameter input module, the measuring module, the surface accuracy analysis and evaluation module, the error compensation module, the trajectory display and simulation processing module. And then, in the sixth chapter, a set of ultra-precision grinding and error compensation experiments for axisymmetric spherical, aspherical molds are conducted. Technical experiments include XZ orthogonal error compensation grinding of spherical surface; XZ inclined-axis compensation for aspherical grinding; XZB inclined-axis error compensation experiment for spherical and aspheric glass lens moulds. The experimental results are analyzed to verify the reasonability of ultra-precision grinding, measurement and error compensation methods. At last, on-machine measured data are compared with the off-machine measured data to verify the high precision of the on-machine measurement system.
The fourth key technology is to study ultra-precision inclined polishing of magnetic compound fluid and its error compensation methods. In the seventh chapter, in order to obtain a higher form accuracy and lower surface roughness, eliminat surface and sub-surface damage resulted by ultra-precision grinding of small-scale workpiece, an ultra-precision inclined-axis polishing process with magnetic composite fluid is proposed. The equipment of magnetic composite fluid inclined-polishing was developed, and two-dimensional removal and compensation models are built.
论文的第一章首先对国内外超精密加工技术包括超精密磨削、测量、补偿与抛光技术现状进行综述性介绍,并探讨了目前的超精密磨削、测量与误差补偿中存在的问题,从而提出相应的解决措施。接着围绕超精密磨削、测量、数据处理、误差补偿加工和超精密加工软件等方面的关键技术研究进行展开。
第一个方面的关键技术是研究非球面形状的在位测量系统及其数据处理。论文在第二章中提出采用接触式测头结合激光干涉原理进行在位测量的方法,探讨接触式在位的数据误差的修正处理；也深入分析在位测量系统的测头半径误差、被测工件的对称轴半径方向的误差、对称轴倾角误差,弹性变形产生的测量误差。论文接着深入研究了在位测量系统所获的测量数据的处理方法。为提取准确的形状误差特征,首先研究对均匀密集或非均匀密集的测量数据进行准确快速地去毛刺处理；然后采用一种改进型的回归滤波方法,快速地对测量数据进行平滑处理。同时采用FFT法进行加速数据处理的方法进行也考虑。
第二个方面的关键技术则是重点对非球面磨削的砂轮对刀、砂轮半径与磨损误差补偿进行研究。在第三章中,以常用的非球面磨削方式为基础,首先采用单项误差补偿方法,深入分析超精密磨削轴对称曲面时砂轮中心位置X、Y方向的对刀误差与补偿、砂轮半径误差与补偿、砂轮磨损误差补偿；也提出一种基于直角或者圆弧砂轮的B轴旋转角度误差与补偿方法；并对X轴、旋转偏角、砂轮磨损与砂轮尺寸等综合误差的分离处理进行考虑。接着在第四章中,首先根据二轴或三轴磨削方式,考虑接触式测量原理、测头尺寸、测量对象,提出了一种获取法向残余误差曲线的方法,从而得到了对加工工件形状综合误差补偿的方法。在此基础上,针对两轴直交轴圆弧砂轮磨削方式,提出采用残余误差对称补偿法计算砂轮补偿路径；针对两轴斜轴砂轮磨削方式,提出矢量残余误差补偿方法来控制砂轮圆弧中心的补偿路径；针对三轴斜轴单点磨削方式,提出一种单点斜轴残余误差补偿的方法。进一步考虑了利用恒定加工量进行速度控制以进一步提高工件形状精度与表面粗糙度。
第三个方面的关键技术是研究超精密磨削、测量与误差补偿系统软件,进行相应的误差补偿磨削实验。第五章中编制了微小非球面超精密加工系统软件,可实现两轴或三轴联动的磨削与补偿加工所需的非球面轨迹程序。其功能包括：参数输入模块、测量模块、工件面形精度分析与误差评估模块、误差补偿模块、轨迹显示与仿真加工模块。接着在第六章中,论文对球面模具、轴对称非球面模具进行超精密磨削与误差补偿加工实验。工艺实验包括X、Z直交轴球面模具误差补偿磨削；X、Z两轴斜轴非球面模具误差补偿磨削；X、Z、B三轴斜轴球面与非球面模具误差补偿磨削,并对实验结果进行了分析,从而验证了超精密磨削、测量和误差补偿方法的合理性。最后对在位测量数据与离线测量数据进行比较,验证了在位测量系统的高精度性。
论文的第四个方面关键技术是研究超精密磁性复合流体的斜轴抛光与修正。在第七章中,为获得更高的形状精度和更低的表面粗糙度,消除超精密磨削阶段产生的表面和亚表面损伤,提出了一种新的超精密磁性复合流体斜轴抛光加工工艺。研制了磁性复合流体斜轴抛光装置,并建立了磁性复合流体加工模型,推导出磁性复合流体抛光材料的去除函数和基于驻留时间的补偿加工模型。
With the rapid development of modern optical electronics technology, a variety of optoelectronic products are applied in aerospace, astronomy, electronics, laser and optical communication fields; therewith the higher performance requirements are set for aspheric optical components. Especially, a demand of high-quality aspheric mold is put forward in machining accuracy and processing materials. In order to resolve current some key technologies for obtaining ultra-precision form accuracy and surface quality of aspheric glass lens mold, in this paper, ultra-precision grinding, measuring, data processing, error compensation processing and ultra-precision processing software development are studied on the basis of a large number of domestic and foreign literatures.
In the first chapter, the present researchs such as ultra-precision processing technology, ultra-precision grinding, measurement, compensation and polishing in domestic and foreign are overviewed. The current existing problems of ultra-precision grinding, measurement and error compensation are analyzed and appropriate solution methods are proposed. These key technologies are discussed acoordingly.
The first key technology is to study aspheric form measuring system and data processing methods. In the second chapter, an ultra-precision contact measuring method is proposed to research on the error correction of contact measuring data; some measurement errors generated from the probe size error, axis-symmetrical workpeice error in radius direction, inclined angle error and elastic deformation, are also in-depth analyzed. And then, processing approach of measurement data obtained from measurement system is studied. In order to extract the precise figure features of ground workpeice, a multi-filtration method is firstly used to quickly process uniform or non-uniform intensive measured data for accurately deburring; and then a modified regression filtering method is used to quickly filter and smooth the measurement data. At the same time, FFT method is considered to accelerate data processing.
The second key technology focuses on wheel centering error, dimension error and form error compensation in aspheric grinding. In the third chapter, based on common aspheric grinding method, single error compensation method is firstly used to compensate the wheel centering errors in X, Y direction, wheel radius error, wear error in ultra-precision grinding of an axis-symmetrical workpeice. A B-axis angle error and compensation are also proposed for right-angle and arc grinding wheels. The separation handling method of comprehensive errors including X-axis centering error, decline angle error, wear error and radius error are considered. Then in the fourth chapter, based on two-axis or three-axis grinding modes, some factors such as contact measuring principle, the probe size, measurement object are taken fully into account to access to the residual error curve and compensate a comprehensive form error. For two-axis orthogonal arc grinding mode, a new symmetrical residual error compensation method is presented to calculate compensation path of grinding wheel. For two-axis inclined grinding mode, a vector residual error compensation method is proposed to control the grinding path of arc wheel center. For three-axis inclined-single-point grinding mode, a single-point inclined-axis residual error compensation mode is also presented. In addition, speed controlling method is considered under a constant grinding volume condition to further inprove the form accuracy and surface roughness.
The third key technology is the development of the measurement and error compensation system software for ultra-precision grinding experiments. In the fifth chapter, system software of small ultra-precision aspheric grinding is developed to program two-axis or three-axis NC program for aspheric grinding and compensation processing. The software includes the following functions:the parameter input module, the measuring module, the surface accuracy analysis and evaluation module, the error compensation module, the trajectory display and simulation processing module. And then, in the sixth chapter, a set of ultra-precision grinding and error compensation experiments for axisymmetric spherical, aspherical molds are conducted. Technical experiments include XZ orthogonal error compensation grinding of spherical surface; XZ inclined-axis compensation for aspherical grinding; XZB inclined-axis error compensation experiment for spherical and aspheric glass lens moulds. The experimental results are analyzed to verify the reasonability of ultra-precision grinding, measurement and error compensation methods. At last, on-machine measured data are compared with the off-machine measured data to verify the high precision of the on-machine measurement system.
The fourth key technology is to study ultra-precision inclined polishing of magnetic compound fluid and its error compensation methods. In the seventh chapter, in order to obtain a higher form accuracy and lower surface roughness, eliminat surface and sub-surface damage resulted by ultra-precision grinding of small-scale workpiece, an ultra-precision inclined-axis polishing process with magnetic composite fluid is proposed. The equipment of magnetic composite fluid inclined-polishing was developed, and two-dimensional removal and compensation models are built.
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