石英晶体谐振器的振动模态分析及环境电磁场影响研究
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摘要
石英晶体谐振器是现代电子通信信息系统中频率基准源的核心元器件,随着航空、航天、电子、通信和机械等领域中相关技术的发展,对石英晶体谐振器的精度要求越来越高。提高石英晶体谐振器频率的稳定度,已经成为一个重要的问题。
降低寄生振动克服外界干扰本文从理论和实验两方面入手研究石英晶体谐振器的稳定问题,一方面,采用有限元方法研究石英晶体谐振器的振动模态,另一方面,采用实验方法研究石英晶体谐振器受磁场影响的机理。论文的主要工作如下：
1.探索了有限元分析方法在高精度石英晶体谐振器设计中的应用。本文基于压电振动理论,运用有限元方法分析了圆盘式AT切石英晶体谐振器在自由边界条件下的三维振动模态,仿真结果与文献报道的采用X射线拍摄的实验结果基本吻合,验证了该方法的可靠性。该方法不但可以获取石英晶体表面的振动位移分布信息,而且还可以清楚地观察到边缘的振动模态,从而有助于了解寄生耦合模态的存在状况。借助该方法的这一特点,发现在AT切石英晶体谐振器中厚度剪切振动模式起主要作用,但同时伴随了较强的面剪切振动和弯曲振动等寄生振动,针对这些寄生振动对石英晶体谐振器性能的影响,本文利用模态分析法对SMD(贴片式)石英晶体谐振器中的方形石英晶片长/宽尺寸进行了优化设计,通过分析不同尺寸下石英晶体谐振器的振动位移分布状态,寻求晶片的最佳尺寸以抑制寄生振动的干扰,从而优化石英晶体谐振器的温-频和阻抗特性,该方法已在实际产品的设计研发中得到了验证,并取得较好的应用效果。
2.采用有限元分析方法研究预应力条件下石英晶体谐振器的振动模态。通过有限元方法仿真计算AT切石英晶体谐振器在自由状态下前8阶的振动模态,并与文献报道的实验结果进行比对,验证了该方法的可靠性。在此基础上仿真计算了AT切石英晶体谐振器在不同方位角约束条件下的振动模态,发现谐振器的主要振动方向随着不同约束角度的改变而改变；进一步,本文研究了AT切石英晶体谐振器在不同方位角施加对径力条件下的振动模态,发现不仅谐振器的主振方向随着对径力角度的改变而改变,而且其主振中心也随着对径力角度的改变发生相应的偏移。仿真结果发现在0°和180°方位角施加对径力时厚度剪切振动会加强同时寄生振动也相应得加强,相反在60°和120°方位角施加对径力时所有方向的振动位移与自由振动模态相比变化不明显。该方法获取的频率变化量与文献报道的石英晶体谐振器的力-频效应实验结果基本一致。以上分析结果对于石英晶体谐振器的点胶位置的选取设计以及基于石英晶体的加速度等力学传感器的研发有一定的参考价值。
3.探讨了石英晶体谐振器在静磁场中频率发生漂移的机理。通过将复杂结构的石英晶体谐振器分解为几种简单的谐振器结构,分别从实验上研究这几种简单结构的石英晶体谐振器在静磁场中的频率变化,从而阐明了石英晶体谐振器在静磁场中频率发生漂移的机理,并结合有限元方法建立一种基于磁-弹耦合原理的物理模型,对石英晶体谐振器在静磁场中的应力分布进行仿真分析,进一步明确了静磁场对石英晶体谐振器频率的影响作用机制。
4.研究了工频交变电磁场对石英晶体谐振器的影响。通过对石英晶体谐振器施加不同强度和不同方向的工频交变电磁场,观测到石英晶体谐振器在不同强度和不同方向工频交变电磁场的影响下其频率的变化规律；利用阻抗分析仪,对石英晶体谐振器在工频交变电磁场中Butterworth-can-Dyke (BVD)等效电路参数(静态电容、动态电容、动态电阻等)的变化进行分析,从而阐明了石英晶体谐振器在工频交变电磁场中频率变化的机理。
Quartz crystal resonators are the key components for frequency standard in modern telecommunication system. With the development of the correlation technique about the aviation, spaceflight, electron, communication and machinery field, the accuracy requirement of quartz crystal resonator is higher and higher. Enhancing the frequency stability of quartz crystal resonator has also become an important problem.
This article will start with theory and experiment to research the stability of quartz crystal resonator. On one hand, use the finite element method to research the vibration mode of quartz crystal resonator, on the other hand, research the mechanism of quartz crystal resonator under the magnetic field through experiment. The main work of this paper is as follows:
To search the application of the finite element method in the high precision quartz crystal resonator. Use the finite element method to analysis disc type AT-cut quartz crystal resonator's three-dimensional vibration mode under free boundary conditions. The simulation result generally coincides with the experiment result of document report using X-ray, so that proved the reliability of this method. This method can not only acquire the surface vibration displacement distributed information but also observe the marginal vibration mode, thereby, contribute to comprehend the existence condition of spurious coupling modal. With this character of the method, it found that the thickness shear vibration mode playing an important role in the quartz crystal resonator. But at the same time, it accompanied with a strong parasitic vibrate including face shear vibratation, flexural vibration and so on. In allusion to the parasitic vibration effect on the properties of quartz crystal resonator, this article will optimal design the size of quartz crystal wafer through modal analytical method. Through analyzing the vibration displacement distribution of quartz crystal resonator in different size to find an optimum size to control obstruct of parasitic vibration, and then optimize its temperature frequency and impedance characteristic. This method has been tested in the research of actual product and achieved a good application effect.
2. To research the mode of quartz crystal resonator under prestress conditions through finite element method. Use finite element method to simulate the eight steps vibration mode of AT-cut quartz crystal resonator in free state and proved the reliability by comparing with the experimental result of document report. On this basis, simulating calculated the vibration mode of AT-cut quartz crystal resonator in different azimuth angle constraint conditions and found the main vibration direction of quartz crystal resonator changing with different constraint angle. Furthermore, this article researched the vibration mode of AT cut quartz crystal resonator by inflicting diameter force on different azimuth angle, and found that not only the main vibration direct but also the main vibration center change with the inflicting diameter force. According to the simulation result, the thickness shear vibration and parasitic vibration will be stronger when inflicting the inflicting diameter force on00or1800azimuth angle, on the contrary, when inflicting the inflicting diameter force on600or1200, the vibration displacement of all the directions won't change obviously compared with free boundary condition. The frequency vibration variation acquired by this method is general the same with experiment result of quartz crystal resonator's force and frequency effect reported by the document. The analysis above has an important reference value to select the dispense position and research the mechanics sensor for example the acceleration of quartz crystal.
3. To discuss the frequency drifting mechanism when quartz crystal resonator in the static magnetic field. To break up complex construction quartz crystal resonator into simple structure, separately research their frequency change in static magnetic field to clarify the frequency drifting mechanism when quartz crystal resonator in the static magnetic field, combine with finite element method to construct a physical model based on magneto elastic coupling theory, analyze the stress distribution which in the static magnetic field to definite the magnetic field's influence action mode to the frequency.
4. To research the effects of the alternating electromagnetic field of quartz crystal resonator. Inflict alternating electromagnetic field in different intensity and direction to observe the change law of frequency under this condition, analyze the change of equivalent circuit parameter (including static capacity, dynamic capacity, dynamic resistance and so on) in the alternating electromagnetic field to clarify the frequency change mechanism in alternating electromagnetic field.
降低寄生振动克服外界干扰本文从理论和实验两方面入手研究石英晶体谐振器的稳定问题,一方面,采用有限元方法研究石英晶体谐振器的振动模态,另一方面,采用实验方法研究石英晶体谐振器受磁场影响的机理。论文的主要工作如下：
1.探索了有限元分析方法在高精度石英晶体谐振器设计中的应用。本文基于压电振动理论,运用有限元方法分析了圆盘式AT切石英晶体谐振器在自由边界条件下的三维振动模态,仿真结果与文献报道的采用X射线拍摄的实验结果基本吻合,验证了该方法的可靠性。该方法不但可以获取石英晶体表面的振动位移分布信息,而且还可以清楚地观察到边缘的振动模态,从而有助于了解寄生耦合模态的存在状况。借助该方法的这一特点,发现在AT切石英晶体谐振器中厚度剪切振动模式起主要作用,但同时伴随了较强的面剪切振动和弯曲振动等寄生振动,针对这些寄生振动对石英晶体谐振器性能的影响,本文利用模态分析法对SMD(贴片式)石英晶体谐振器中的方形石英晶片长/宽尺寸进行了优化设计,通过分析不同尺寸下石英晶体谐振器的振动位移分布状态,寻求晶片的最佳尺寸以抑制寄生振动的干扰,从而优化石英晶体谐振器的温-频和阻抗特性,该方法已在实际产品的设计研发中得到了验证,并取得较好的应用效果。
2.采用有限元分析方法研究预应力条件下石英晶体谐振器的振动模态。通过有限元方法仿真计算AT切石英晶体谐振器在自由状态下前8阶的振动模态,并与文献报道的实验结果进行比对,验证了该方法的可靠性。在此基础上仿真计算了AT切石英晶体谐振器在不同方位角约束条件下的振动模态,发现谐振器的主要振动方向随着不同约束角度的改变而改变；进一步,本文研究了AT切石英晶体谐振器在不同方位角施加对径力条件下的振动模态,发现不仅谐振器的主振方向随着对径力角度的改变而改变,而且其主振中心也随着对径力角度的改变发生相应的偏移。仿真结果发现在0°和180°方位角施加对径力时厚度剪切振动会加强同时寄生振动也相应得加强,相反在60°和120°方位角施加对径力时所有方向的振动位移与自由振动模态相比变化不明显。该方法获取的频率变化量与文献报道的石英晶体谐振器的力-频效应实验结果基本一致。以上分析结果对于石英晶体谐振器的点胶位置的选取设计以及基于石英晶体的加速度等力学传感器的研发有一定的参考价值。
3.探讨了石英晶体谐振器在静磁场中频率发生漂移的机理。通过将复杂结构的石英晶体谐振器分解为几种简单的谐振器结构,分别从实验上研究这几种简单结构的石英晶体谐振器在静磁场中的频率变化,从而阐明了石英晶体谐振器在静磁场中频率发生漂移的机理,并结合有限元方法建立一种基于磁-弹耦合原理的物理模型,对石英晶体谐振器在静磁场中的应力分布进行仿真分析,进一步明确了静磁场对石英晶体谐振器频率的影响作用机制。
4.研究了工频交变电磁场对石英晶体谐振器的影响。通过对石英晶体谐振器施加不同强度和不同方向的工频交变电磁场,观测到石英晶体谐振器在不同强度和不同方向工频交变电磁场的影响下其频率的变化规律；利用阻抗分析仪,对石英晶体谐振器在工频交变电磁场中Butterworth-can-Dyke (BVD)等效电路参数(静态电容、动态电容、动态电阻等)的变化进行分析,从而阐明了石英晶体谐振器在工频交变电磁场中频率变化的机理。
Quartz crystal resonators are the key components for frequency standard in modern telecommunication system. With the development of the correlation technique about the aviation, spaceflight, electron, communication and machinery field, the accuracy requirement of quartz crystal resonator is higher and higher. Enhancing the frequency stability of quartz crystal resonator has also become an important problem.
This article will start with theory and experiment to research the stability of quartz crystal resonator. On one hand, use the finite element method to research the vibration mode of quartz crystal resonator, on the other hand, research the mechanism of quartz crystal resonator under the magnetic field through experiment. The main work of this paper is as follows:
To search the application of the finite element method in the high precision quartz crystal resonator. Use the finite element method to analysis disc type AT-cut quartz crystal resonator's three-dimensional vibration mode under free boundary conditions. The simulation result generally coincides with the experiment result of document report using X-ray, so that proved the reliability of this method. This method can not only acquire the surface vibration displacement distributed information but also observe the marginal vibration mode, thereby, contribute to comprehend the existence condition of spurious coupling modal. With this character of the method, it found that the thickness shear vibration mode playing an important role in the quartz crystal resonator. But at the same time, it accompanied with a strong parasitic vibrate including face shear vibratation, flexural vibration and so on. In allusion to the parasitic vibration effect on the properties of quartz crystal resonator, this article will optimal design the size of quartz crystal wafer through modal analytical method. Through analyzing the vibration displacement distribution of quartz crystal resonator in different size to find an optimum size to control obstruct of parasitic vibration, and then optimize its temperature frequency and impedance characteristic. This method has been tested in the research of actual product and achieved a good application effect.
2. To research the mode of quartz crystal resonator under prestress conditions through finite element method. Use finite element method to simulate the eight steps vibration mode of AT-cut quartz crystal resonator in free state and proved the reliability by comparing with the experimental result of document report. On this basis, simulating calculated the vibration mode of AT-cut quartz crystal resonator in different azimuth angle constraint conditions and found the main vibration direction of quartz crystal resonator changing with different constraint angle. Furthermore, this article researched the vibration mode of AT cut quartz crystal resonator by inflicting diameter force on different azimuth angle, and found that not only the main vibration direct but also the main vibration center change with the inflicting diameter force. According to the simulation result, the thickness shear vibration and parasitic vibration will be stronger when inflicting the inflicting diameter force on00or1800azimuth angle, on the contrary, when inflicting the inflicting diameter force on600or1200, the vibration displacement of all the directions won't change obviously compared with free boundary condition. The frequency vibration variation acquired by this method is general the same with experiment result of quartz crystal resonator's force and frequency effect reported by the document. The analysis above has an important reference value to select the dispense position and research the mechanics sensor for example the acceleration of quartz crystal.
3. To discuss the frequency drifting mechanism when quartz crystal resonator in the static magnetic field. To break up complex construction quartz crystal resonator into simple structure, separately research their frequency change in static magnetic field to clarify the frequency drifting mechanism when quartz crystal resonator in the static magnetic field, combine with finite element method to construct a physical model based on magneto elastic coupling theory, analyze the stress distribution which in the static magnetic field to definite the magnetic field's influence action mode to the frequency.
4. To research the effects of the alternating electromagnetic field of quartz crystal resonator. Inflict alternating electromagnetic field in different intensity and direction to observe the change law of frequency under this condition, analyze the change of equivalent circuit parameter (including static capacity, dynamic capacity, dynamic resistance and so on) in the alternating electromagnetic field to clarify the frequency change mechanism in alternating electromagnetic field.
引文
[1]道客巴巴网,东晶电子在SMD石英晶体谐振器领域具有优势http://www.doc88.com/p-813647035918.html,2013-02-19.
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