基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究
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摘要
光学镜头已经广泛应用于民用、工业检测、国防军事、航空航天等领域，很多应用场合对光学镜头的综合性能的要求越来越高，传统的光学镜头装调方法存在各种问题，已经不能满足高性能光学镜头的装调精度要求。为了提高光学镜头的装调精度，本文研制了光学镜头辅助装调设备，该设备集成了光学镜头的中心偏差测量和镜面间隔测量功能，在同一平台上进行光学镜头的装调，保证了装调过程中的参考轴的一致性，既能提高光学镜头的装调精度，又能提高光学镜头的装调效率。本文的主要研究工作如下：
1.根据现有的光学镜头辅助装调设备的技术路线及发展趋势，研究了将光学镜头中心偏差和镜面间隔测量功能集成在一台设备上的技术方案，研究表明，一体化的光学镜头辅助装调设备的技术方案是可行的；
2.通过比较光学镜头中心偏差的各种光路结构的优缺点，提出最佳的光路结构设计方案，采用调焦法和切换镜头法相结合的光路结构，能够既保证测量精度，又避免测量盲区；并对调焦法和切换镜头法相结合的光路进行设计，分析了光学系统的成像质量，分析结果表明，该设计方案能够满足使用要求，并在保证像质的基础上，对其公差进行合理分配；建立光线追迹模型，分析杂散光的影响，分析结果表明，杂散光对成像质量的影响很小；
3.建立被测光学镜头的中心偏差计算模型，该模型能够计算被测光学镜头的各个镜面的球心像的位置和成像过程中的垂轴放大率，还能根据十字靶标中心的画圆直径和十字靶标成像过程中的垂轴放大率，计算被测镜面的中心偏差，该计算模型为主控软件提供了中心偏差测量的算法；
4.研究非接触式的光学镜面间隔测量方法，采用了光学相干测量的方法来测量镜面间隔，以迈克尔逊干涉仪为基础，利用光纤来传导光束，便于测量设备的组装和应用；设计了测量臂中的光纤调焦镜头，能够使光斑聚焦点在一定范围内连续调焦，保证被测光学镜头中的各个镜面反射的光能量在光电探测器的动态范围内；建立了光学相干测量中的材料色散与相干信号之间的数学模型，利用该模型，能够根据采集到的相干信号和玻璃材料的色散，计算镜面的间隔；
5.编写光学镜头辅助装调系统的主控软件，在镜面中心偏差测量模块中，研究了十字靶标中心提取算法和球心最佳轴拟合算法；在镜面间隔测量模块中，研究了干涉信号的寻峰算法；
6.根据误差理论，对光学镜头辅助装调设备的测量精度进行分析，分析结果表明：光学镜片线偏心的测量总体误差是0.77μm，角偏差的测量总体误差是1.6″，镜面间隔测量总体误差是2.30μm；
7.利用研制的光学镜头辅助装调设备，对已知参数的光学镜头进行中心偏差和镜面间隔测量，并进行了中心偏差和镜面间隔测量精度的检测实验，实验结果表明，该设备对于球面的线偏心测量精度优于1μm，对于平面的角偏心测量精度优于2.4″，镜面间隔的测量精度优于3μm。
Optical lenses have been widely used in civil, industrial inspection, nationaldefense and military, aerospace and other fields. Demands for the overallperformance of optical lenses are highly increased in many fields. Traditionalmethods now are unable to meet the precision requirements in assemblinghigh-performance optical lenses. The optical lenses assembling apparatus, mentionedin this paper, is designed to achieve high accuracy. Due to the integratedmeasurement of lens centering errors, lens centre thicknesses and airgap distances,the apparatus finishes the assembly work of the optical lenses on one table, whichensures the reference axes consistency and improves the precision and efficiency inthe optical lenses assembly.
This paper’s main research work is as follow:
1. Taking into consideration the current technology and the future developmenttrends of optical lenses assembling apparatus, the paper studies the technical solutionof one device combining the measurements of lens centering errors, lens centrethicknesses and airgap distances. Research shows technical solution of theintegration of optical lenses assembling apparatus is feasible.
2. By comparing the advantages and disadvantages of various optical structuresin measuring lens centering errors, the paper brings up an optimal optical structurewhich combines the focusing method and lens-switching method. The optimalstructure not only ensures the measurement precision but also avoids problems ofblind measuring area. The paper designs the optical structure and analyzes theimaging quality of the optical system. The results of the analysis demonstrate thatthe design can satisfy the requirements and ensures the image quality on the basis ofa reasonable allocation of the optical lenses tolerances. The ray tracing modelestablished in the paper also analyzes the effects of stray light on the imaging quality,which turns out to be little.
3. The lens centering errors calculation model is established to calculate theimage position of every sphere center and the paraxial magnification in the imagingprocess. The model can also calculate centering errors of the lenses according to thediameter of trajectory by the moving of the center of the cross target and the paraxialmagnification. The model provides a method to calculate centering errors for themain control software.
4. The paper brings up the method of optical coherent measurement, whichmeasures optical lens thicknesses and airgap distances without contacting the lenses.Based on the Michelson interferometer, it is easy to operate the apparatus whenoptical fiber is used to conduct light. In order to locate the reflection intensity fromall surfaces of lenses in the dynamic range of photoelectric detector, a lens in themeasurement arm is designed to change the focus position continuously in a range. Amathematical model between material dispersion and coherence signal is establishedto calculate lens centre thicknesses and airgap distances.
5. The software of the optical lenses assembling apparatus is programmed. Inthe module of measurement of lens centering errors. The paper also researches thealgorithms to seek the coordinates of the cross target’s centre and to fit the optimalaxes of all sphere centres. In the module of measurement of lens thicknesses andairgap distances, an algorithm of seeking the peak of coherence signal is researched.
6. The measurement accuracy of the apparatus is analyzed according to thetheory of errors. The results show that the total line centering errors of optical lensesis0.77μm, and that the total angle centering errors of optical lenses is1.6arc-seconds, and that the total errors of lens centre thicknesses and airgap distancesis2.30μm.
7. Experiments are made to measure the lens centering errors, lens centrethicknesses and airgap distances of known lenses using the apparatus. During theseexperiments, the measurement accuracy can be obtained. The results show that themeasurement accuracy of line centering errors of sphere surface is better than1μm,and the measurement accuracy of angle centering errors of plane surface is betterthan2.4arc-seconds, and the measurement accuracy of lens centre thicknesses andairgap distances is better than3μm.
1.根据现有的光学镜头辅助装调设备的技术路线及发展趋势，研究了将光学镜头中心偏差和镜面间隔测量功能集成在一台设备上的技术方案，研究表明，一体化的光学镜头辅助装调设备的技术方案是可行的；
2.通过比较光学镜头中心偏差的各种光路结构的优缺点，提出最佳的光路结构设计方案，采用调焦法和切换镜头法相结合的光路结构，能够既保证测量精度，又避免测量盲区；并对调焦法和切换镜头法相结合的光路进行设计，分析了光学系统的成像质量，分析结果表明，该设计方案能够满足使用要求，并在保证像质的基础上，对其公差进行合理分配；建立光线追迹模型，分析杂散光的影响，分析结果表明，杂散光对成像质量的影响很小；
3.建立被测光学镜头的中心偏差计算模型，该模型能够计算被测光学镜头的各个镜面的球心像的位置和成像过程中的垂轴放大率，还能根据十字靶标中心的画圆直径和十字靶标成像过程中的垂轴放大率，计算被测镜面的中心偏差，该计算模型为主控软件提供了中心偏差测量的算法；
4.研究非接触式的光学镜面间隔测量方法，采用了光学相干测量的方法来测量镜面间隔，以迈克尔逊干涉仪为基础，利用光纤来传导光束，便于测量设备的组装和应用；设计了测量臂中的光纤调焦镜头，能够使光斑聚焦点在一定范围内连续调焦，保证被测光学镜头中的各个镜面反射的光能量在光电探测器的动态范围内；建立了光学相干测量中的材料色散与相干信号之间的数学模型，利用该模型，能够根据采集到的相干信号和玻璃材料的色散，计算镜面的间隔；
5.编写光学镜头辅助装调系统的主控软件，在镜面中心偏差测量模块中，研究了十字靶标中心提取算法和球心最佳轴拟合算法；在镜面间隔测量模块中，研究了干涉信号的寻峰算法；
6.根据误差理论，对光学镜头辅助装调设备的测量精度进行分析，分析结果表明：光学镜片线偏心的测量总体误差是0.77μm，角偏差的测量总体误差是1.6″，镜面间隔测量总体误差是2.30μm；
7.利用研制的光学镜头辅助装调设备，对已知参数的光学镜头进行中心偏差和镜面间隔测量，并进行了中心偏差和镜面间隔测量精度的检测实验，实验结果表明，该设备对于球面的线偏心测量精度优于1μm，对于平面的角偏心测量精度优于2.4″，镜面间隔的测量精度优于3μm。
Optical lenses have been widely used in civil, industrial inspection, nationaldefense and military, aerospace and other fields. Demands for the overallperformance of optical lenses are highly increased in many fields. Traditionalmethods now are unable to meet the precision requirements in assemblinghigh-performance optical lenses. The optical lenses assembling apparatus, mentionedin this paper, is designed to achieve high accuracy. Due to the integratedmeasurement of lens centering errors, lens centre thicknesses and airgap distances,the apparatus finishes the assembly work of the optical lenses on one table, whichensures the reference axes consistency and improves the precision and efficiency inthe optical lenses assembly.
This paper’s main research work is as follow:
1. Taking into consideration the current technology and the future developmenttrends of optical lenses assembling apparatus, the paper studies the technical solutionof one device combining the measurements of lens centering errors, lens centrethicknesses and airgap distances. Research shows technical solution of theintegration of optical lenses assembling apparatus is feasible.
2. By comparing the advantages and disadvantages of various optical structuresin measuring lens centering errors, the paper brings up an optimal optical structurewhich combines the focusing method and lens-switching method. The optimalstructure not only ensures the measurement precision but also avoids problems ofblind measuring area. The paper designs the optical structure and analyzes theimaging quality of the optical system. The results of the analysis demonstrate thatthe design can satisfy the requirements and ensures the image quality on the basis ofa reasonable allocation of the optical lenses tolerances. The ray tracing modelestablished in the paper also analyzes the effects of stray light on the imaging quality,which turns out to be little.
3. The lens centering errors calculation model is established to calculate theimage position of every sphere center and the paraxial magnification in the imagingprocess. The model can also calculate centering errors of the lenses according to thediameter of trajectory by the moving of the center of the cross target and the paraxialmagnification. The model provides a method to calculate centering errors for themain control software.
4. The paper brings up the method of optical coherent measurement, whichmeasures optical lens thicknesses and airgap distances without contacting the lenses.Based on the Michelson interferometer, it is easy to operate the apparatus whenoptical fiber is used to conduct light. In order to locate the reflection intensity fromall surfaces of lenses in the dynamic range of photoelectric detector, a lens in themeasurement arm is designed to change the focus position continuously in a range. Amathematical model between material dispersion and coherence signal is establishedto calculate lens centre thicknesses and airgap distances.
5. The software of the optical lenses assembling apparatus is programmed. Inthe module of measurement of lens centering errors. The paper also researches thealgorithms to seek the coordinates of the cross target’s centre and to fit the optimalaxes of all sphere centres. In the module of measurement of lens thicknesses andairgap distances, an algorithm of seeking the peak of coherence signal is researched.
6. The measurement accuracy of the apparatus is analyzed according to thetheory of errors. The results show that the total line centering errors of optical lensesis0.77μm, and that the total angle centering errors of optical lenses is1.6arc-seconds, and that the total errors of lens centre thicknesses and airgap distancesis2.30μm.
7. Experiments are made to measure the lens centering errors, lens centrethicknesses and airgap distances of known lenses using the apparatus. During theseexperiments, the measurement accuracy can be obtained. The results show that themeasurement accuracy of line centering errors of sphere surface is better than1μm,and the measurement accuracy of angle centering errors of plane surface is betterthan2.4arc-seconds, and the measurement accuracy of lens centre thicknesses andairgap distances is better than3μm.
引文
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