扫描探针显微镜在多孔材料制备、纳米光刻以及高密度光存储中的应用
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摘要
扫描探针显微镜技术(Scanning probe microscopy, SPM)的出现,使对表面形貌特征的研究深入到了原子尺度。这项技术已经广泛应用在材料表面成像、表面特性分析、纳米医学、纳米测量以及生命科学等方面。SPM不仅可以作为测量分析工具,在对器件进行纳米加工、刻蚀等方面同样拥有广阔的应用前景。本论文分为五章,内容如下：
一、介绍了扫描探针显微镜的种类以及各自的工作原理和工作模式,概述了扫描探针显微镜在有机薄膜、纳米光刻以及近场光存储中的应用。
二、主要从压电陶瓷扫描头自身的非线性、反馈系统参数的设定以及针尖与样品间相互作用三个面,分析了原子力显微镜扫描成像过程中产生假象的原因,总结了辨别和消除假象的几种方法。
三、提出一种利用盐溶液对云母上的硬脂酸Langmuir-Blodgett(LB)单分子膜进行浸泡来制备多孔薄膜材料的新方法,并对多孔薄膜的形成机理进行了分析。利用原子力显微镜对不同实验参数下制备的多孔硬脂酸单分子膜进行表征,系统地研究了各参数对多孔薄膜孔径尺寸以及孔径总覆盖面积百分比的影响。实验中采用较低的盐溶液浓度,使溶质很难在云母基底表面结晶,因此整个多孔薄膜表面不会残留杂质,避免了模板法制备多孔材料时,由于模板材料去除不彻底而引入杂质的情况。
四、基于表面等离子体共振增强原理,提出两种利用扫描近场光学显微镜(SNOM)中无孔针尖来实现近场光存储的方案(背面照射、侧面照射)。以xilinx9572芯片为核心控制器,自制了纳秒级单脉冲信号发生器,满足了对光源进行纳秒级调制的要求。在背面照射方案中,成功利用膜片钳系统将液相外延法生长的GaAs金字塔形探针尖与原子力接触模式的探针悬臂相结合,解决了GaAs针尖与记录介质间近场距离控制的问题。在侧面照射的方案中,通过时域有限差分法(FDTD)分析了聚焦光斑尺寸以及入射角度对针尖增强效果的影响,讨论了实验中亟待解决的问题。
五、针对平头针尖力学反馈效果不佳的情况,将蝴蝶结孔与牛眼结构在SNOM针尖的三维模型中结合,利用FDTD的方法对该模型进行了数值模拟,分析了该模型的增强机理。针对光刻中常用的365nm波长,通过公式推导出了该波长入射光产生表面等离子共振时牛眼结构的周期参数,在此基础上,讨论了模型中各参数对探针尖端场增强因子的影响,优化了结构参数,并提出了新的改进方案。
Scanning probe microscopy (SPM) provides measurement of surface morphology on atomic scale. It has been widely applied to surface science, nanomedicine, nanomeasurement, life science and so on. Further, SPM has also been applied successfully to nanofabri cation and nanolithography. This paper is divided into five chapters:
1. The principle and working modes of various SPMs have been explained and its applications to nanolithography and near-field optical storage have been introduced.
2. AFM images are often subject to some artifacts arise from scanner nonlinearities, parameters of feedback loop and the interaction between probe and sample. The methods of identifying and eliminating the artifacts have been represented.
3. A new method of preparing porous monolayer film by immersing stearic acid Langmuir-Blodgett monolayer into salt solution has been proposed. The formation mechanism of the porous structure has been analyzed. The morphology images of porous films prepared with different experiment parameters (immersion time, concentration of the salt solution, cationic valence in salt solution, surface pressure of the SA LB film) are characterized by atomic force microscope (AFM). The influence factors on diameter and coverage percentage of the pores on porous film have been systematically studied. With lower concentration of the salt solution, the solute cannot crystallize on mica surface, which avoids the step of removing template materials in all template methods.
4. Based on the surface plasmon polariton (SPP) effects, utilizing near-field optical microscope (SNOM) tips, two recording methods of near-field optical storage have been proposed (back and lateral illumination). As the light source requires an external trigger signal to work, we have designed a nanosecond scale single trigger signal generator based on the xilinx9572chip. The GaAs pyramidal tip produced by liquid phase epitaxial method has been successfully integrated with AFM cantilever of contact mode for back illumination, which achieves the nano-scale control of GaAs tip and phase-change material. In the method of lateral illumination, the influences of incident angle and the focal spot size on enhancement factor have been researched with finite-difference time domain (FDTD) method. Meanwhile, the urgent issues in the experiment have been discussed.
5. Considering the poor feedback of crew-cut probe, the bowtie aperture surrounded by bull's eye structure has been integrated on thhree-dimensional SNOM tip model. This model has been investigated using FDTD method. Based on the common working wavelength of photolithography (365nm), the period of the bull's eye structure for SPP resonant effect are achieved with corresponding equations. The enhancement mechanism of the model has been represented according to the numerical simulation results. Meanwhile, the influences of structure parameters on enhancement factor have been analyzed and optimized. Further, we proposed a new improved method.
一、介绍了扫描探针显微镜的种类以及各自的工作原理和工作模式,概述了扫描探针显微镜在有机薄膜、纳米光刻以及近场光存储中的应用。
二、主要从压电陶瓷扫描头自身的非线性、反馈系统参数的设定以及针尖与样品间相互作用三个面,分析了原子力显微镜扫描成像过程中产生假象的原因,总结了辨别和消除假象的几种方法。
三、提出一种利用盐溶液对云母上的硬脂酸Langmuir-Blodgett(LB)单分子膜进行浸泡来制备多孔薄膜材料的新方法,并对多孔薄膜的形成机理进行了分析。利用原子力显微镜对不同实验参数下制备的多孔硬脂酸单分子膜进行表征,系统地研究了各参数对多孔薄膜孔径尺寸以及孔径总覆盖面积百分比的影响。实验中采用较低的盐溶液浓度,使溶质很难在云母基底表面结晶,因此整个多孔薄膜表面不会残留杂质,避免了模板法制备多孔材料时,由于模板材料去除不彻底而引入杂质的情况。
四、基于表面等离子体共振增强原理,提出两种利用扫描近场光学显微镜(SNOM)中无孔针尖来实现近场光存储的方案(背面照射、侧面照射)。以xilinx9572芯片为核心控制器,自制了纳秒级单脉冲信号发生器,满足了对光源进行纳秒级调制的要求。在背面照射方案中,成功利用膜片钳系统将液相外延法生长的GaAs金字塔形探针尖与原子力接触模式的探针悬臂相结合,解决了GaAs针尖与记录介质间近场距离控制的问题。在侧面照射的方案中,通过时域有限差分法(FDTD)分析了聚焦光斑尺寸以及入射角度对针尖增强效果的影响,讨论了实验中亟待解决的问题。
五、针对平头针尖力学反馈效果不佳的情况,将蝴蝶结孔与牛眼结构在SNOM针尖的三维模型中结合,利用FDTD的方法对该模型进行了数值模拟,分析了该模型的增强机理。针对光刻中常用的365nm波长,通过公式推导出了该波长入射光产生表面等离子共振时牛眼结构的周期参数,在此基础上,讨论了模型中各参数对探针尖端场增强因子的影响,优化了结构参数,并提出了新的改进方案。
Scanning probe microscopy (SPM) provides measurement of surface morphology on atomic scale. It has been widely applied to surface science, nanomedicine, nanomeasurement, life science and so on. Further, SPM has also been applied successfully to nanofabri cation and nanolithography. This paper is divided into five chapters:
1. The principle and working modes of various SPMs have been explained and its applications to nanolithography and near-field optical storage have been introduced.
2. AFM images are often subject to some artifacts arise from scanner nonlinearities, parameters of feedback loop and the interaction between probe and sample. The methods of identifying and eliminating the artifacts have been represented.
3. A new method of preparing porous monolayer film by immersing stearic acid Langmuir-Blodgett monolayer into salt solution has been proposed. The formation mechanism of the porous structure has been analyzed. The morphology images of porous films prepared with different experiment parameters (immersion time, concentration of the salt solution, cationic valence in salt solution, surface pressure of the SA LB film) are characterized by atomic force microscope (AFM). The influence factors on diameter and coverage percentage of the pores on porous film have been systematically studied. With lower concentration of the salt solution, the solute cannot crystallize on mica surface, which avoids the step of removing template materials in all template methods.
4. Based on the surface plasmon polariton (SPP) effects, utilizing near-field optical microscope (SNOM) tips, two recording methods of near-field optical storage have been proposed (back and lateral illumination). As the light source requires an external trigger signal to work, we have designed a nanosecond scale single trigger signal generator based on the xilinx9572chip. The GaAs pyramidal tip produced by liquid phase epitaxial method has been successfully integrated with AFM cantilever of contact mode for back illumination, which achieves the nano-scale control of GaAs tip and phase-change material. In the method of lateral illumination, the influences of incident angle and the focal spot size on enhancement factor have been researched with finite-difference time domain (FDTD) method. Meanwhile, the urgent issues in the experiment have been discussed.
5. Considering the poor feedback of crew-cut probe, the bowtie aperture surrounded by bull's eye structure has been integrated on thhree-dimensional SNOM tip model. This model has been investigated using FDTD method. Based on the common working wavelength of photolithography (365nm), the period of the bull's eye structure for SPP resonant effect are achieved with corresponding equations. The enhancement mechanism of the model has been represented according to the numerical simulation results. Meanwhile, the influences of structure parameters on enhancement factor have been analyzed and optimized. Further, we proposed a new improved method.
引文
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