非制冷红外焦平面探测器测试及验证成像技术研究
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摘要
非制冷红外焦平面探测器的诞生及发展是红外技术领域一次革命性的突破，它具有体积小、功耗低、成本低、可靠性高的特点，其衍生的非制冷红外热像技术具有广泛的应用前景，因此非制冷红外焦平面探测器及其应用技术正成为各国研究的热点。
本课题对非制冷红外焦平面探测器的测试验证技术进行了深入的研究，完成了微测辐射热计和非制冷红外焦平面探测器的测试验证技术的系统化设计，突破了测试验证技术中的各种关键技术，研制了的高速、高精度的红外焦平面探测器测试系统，同时基于项目组自主研发的320×240非制冷红外焦平面探测器，设计和开发了多功能、高性能的红外热成像仪并实现了验证成像。论文主要的研究内容和成果综述如下：
（1）在微测辐射热计测试技术方面，深入研究了微测辐射热计的传感机理，建立了微测辐射热计的光学、热学和电学的数学模型。基于数学模型提炼了微测辐射热计的关键指标，提出了通过锁相放大技术（LOCK-INAMP）测试微测辐射热计响应电压和噪声电压的方法，克服了微测辐射热计微弱信号提取的技术难题。在热学性能参数的测试方面采用了I-V测试热导的方法，发现了通过减小偏置电流的手段，可忽略有效热导和总热导误差的技术问题，同时提出了变频锁相放大技术测试响应时间的方法。对比测试结果与仿真结果数据，确认了该测试方法的准确性和有效性。
（2）非制冷红外焦平面探测器测试技术方面，研制了非制冷红外焦平面探测器测试系统，细阐述了该测试系统的组成结构、板级系统工作原理，各模块参数指标以及关键技术的解决方案，并利用标准探测器进行验证测试，主要指标测试精度可≤1%。在测试系统中，低噪声偏置电压源模块采用了网络反馈控制结构和数字电位器技术，解决了电压源的低噪声、高精度调节以及宽温度适应性的技术难题。同时，测试系统的数据采集部分还采用了PCIE总线技术和DMA的工作模式，解决了多规格、大规模、高帧频的红外图像实时采集的技术难题，克服了采集过程中由于CPU响应速度原因带来的数据丢失问题。
（3）非制冷红外焦平面探测器验证成像技术方面，研制了基于国产320×240非制冷红外焦平面探测器的热成像仪系统，系统采用了最新的FPGA+ARM的硬件结构，并实现了参数标定和实时成像一体化的集成设计理念。在图像算法设计中，本文提出了一种改进的神经网络非均匀性校正算法，克服了传统神经网络算法目标退化和伪像的不足。在图像增强算法中，本文采用了改进的二叉堆算法，本算法大大提高了图像增强算法的效率，克服了由于探测器状态变化而导致拉伸畸变的问题。为了更好地修饰细节，本文还提出了基于梯度信息自适应权值调整的红外图像细节增强（DDE）算法技术，通过去除噪，计算图像梯度信息，修正此梯度信息，计算灰度统计权值，细节图像直方图均衡达到图像细节增强的效果。通过测试，该热成像系统的NETD达到98mK。
The invention and development of the uncooled IRFPA (Infrared focal plane array)is a massive innovation of the infrared technology field. It has the advantages such assmall volume, low power consumption, low cost, and superior reliability. For the brightfuture, so many worldwide developments of the uncooled IRFPA and its applicationtechnologies are under progress.
In this dissertation, the testing and verification technologies for uncooled IRFPAhave been described in details. The fully parametric test system for the microbolometerand uncooled IRFPA detectors have been established, a variety of key technologies wasbroken through, and a high-speed, high-precision test bench adapt to the differentspecific uncooled IRFPA detectors was designed and realized. Meanwhile amulti-function, high-performance infrared thermal imaging system based on320×240uncooled IRFPA detectors was designed and realized. The research contents and resultsin this dissertation are summarized as follows:
(1) For microbolometer testing techniques: Microbolometer working mechanismwas deeply researched, and the microbolometer optical, thermal and electricalmathematical model was established. Based on the mathematical model, the keyparameters of microbolometer was refined, and the lock-in amplifier (LOCK-IN AMP)technique was applied to test the microbolometer response and noise, Through this way,the technical problems of small signal extraction were overcome. For testing thermalparameters of microbolometer, a method was introduced for thermal conductivity testbased on I-V measurement, and it was found that the effective thermal conductivity andtotal thermal conductivity error can be ignored by reducing the bias current, while thefrequency-conversion lock-in amplifier technology was used to test the thermal timeconstant. Through the comparion between the test results and the simulation results, theaccuracy and validity of the test method can be confirmed.
(2) For uncooled IRFPA detector test techniques: A test bench for uncooled IRFPAdetector has been developed, in this paper, the test bench is reported from design toverification, such as the structure of the composition, working principles, board level system design details, the parameter of each module and the key technology solutions,according to the results of a standard detector test, the error could be less than1%. Inthis bench, the bias voltage source module was designed by network feedback controlstructure and the digital potentiometer technology, in order to meet low-noise,high-precision adjustment and wide temperature adaptability requirements. Meanwhilein the acquisition module of the bench, PCIE bus technology and DMA mode is used tosolve the multi-specifications, large-scale, real-time acquisition of high frame rateinfrared image acquisition problem, and the data loss problem during the acquisitionprocess due to the CPU speed limitation was overcome.
(3) For uncooled IRFPA imaging techniques: An imaging system based on320×240uncooled IRFPA was designed, the system uses the latest hardware structureof FPGA+ARM, correction parameter calculation and real-time imaging function wereintegrated by the integration design concept. In the nonuniformity correction algorithmpart, an improved neural networks NUC algorithm is introduced. The edge detectiontechnique is applied to the neural network algorithm, to overcome the lack of smearingand target degradation in traditional neural network algorithm. The improved binaryheap algorithm was also applied to calculate the enhancement parameters for theimaging enhancement, it can greatly improves the calculation efficiency, and couldsolve the imaging enhancement distortion problem due to the detector working statechanges. At last, a new infrared image digital detail enhancement(DDE) technologybased on gradient information weight adaptive adjustment was introduced, by the stepof removing noise, calculating image gradient information, correcting this gradientinformation, calculating detail image histogram for image enhancement was applied forimaging detail enhancement. By the test, NETD of the thermal imaging system is98mK.
本课题对非制冷红外焦平面探测器的测试验证技术进行了深入的研究，完成了微测辐射热计和非制冷红外焦平面探测器的测试验证技术的系统化设计，突破了测试验证技术中的各种关键技术，研制了的高速、高精度的红外焦平面探测器测试系统，同时基于项目组自主研发的320×240非制冷红外焦平面探测器，设计和开发了多功能、高性能的红外热成像仪并实现了验证成像。论文主要的研究内容和成果综述如下：
（1）在微测辐射热计测试技术方面，深入研究了微测辐射热计的传感机理，建立了微测辐射热计的光学、热学和电学的数学模型。基于数学模型提炼了微测辐射热计的关键指标，提出了通过锁相放大技术（LOCK-INAMP）测试微测辐射热计响应电压和噪声电压的方法，克服了微测辐射热计微弱信号提取的技术难题。在热学性能参数的测试方面采用了I-V测试热导的方法，发现了通过减小偏置电流的手段，可忽略有效热导和总热导误差的技术问题，同时提出了变频锁相放大技术测试响应时间的方法。对比测试结果与仿真结果数据，确认了该测试方法的准确性和有效性。
（2）非制冷红外焦平面探测器测试技术方面，研制了非制冷红外焦平面探测器测试系统，细阐述了该测试系统的组成结构、板级系统工作原理，各模块参数指标以及关键技术的解决方案，并利用标准探测器进行验证测试，主要指标测试精度可≤1%。在测试系统中，低噪声偏置电压源模块采用了网络反馈控制结构和数字电位器技术，解决了电压源的低噪声、高精度调节以及宽温度适应性的技术难题。同时，测试系统的数据采集部分还采用了PCIE总线技术和DMA的工作模式，解决了多规格、大规模、高帧频的红外图像实时采集的技术难题，克服了采集过程中由于CPU响应速度原因带来的数据丢失问题。
（3）非制冷红外焦平面探测器验证成像技术方面，研制了基于国产320×240非制冷红外焦平面探测器的热成像仪系统，系统采用了最新的FPGA+ARM的硬件结构，并实现了参数标定和实时成像一体化的集成设计理念。在图像算法设计中，本文提出了一种改进的神经网络非均匀性校正算法，克服了传统神经网络算法目标退化和伪像的不足。在图像增强算法中，本文采用了改进的二叉堆算法，本算法大大提高了图像增强算法的效率，克服了由于探测器状态变化而导致拉伸畸变的问题。为了更好地修饰细节，本文还提出了基于梯度信息自适应权值调整的红外图像细节增强（DDE）算法技术，通过去除噪，计算图像梯度信息，修正此梯度信息，计算灰度统计权值，细节图像直方图均衡达到图像细节增强的效果。通过测试，该热成像系统的NETD达到98mK。
The invention and development of the uncooled IRFPA (Infrared focal plane array)is a massive innovation of the infrared technology field. It has the advantages such assmall volume, low power consumption, low cost, and superior reliability. For the brightfuture, so many worldwide developments of the uncooled IRFPA and its applicationtechnologies are under progress.
In this dissertation, the testing and verification technologies for uncooled IRFPAhave been described in details. The fully parametric test system for the microbolometerand uncooled IRFPA detectors have been established, a variety of key technologies wasbroken through, and a high-speed, high-precision test bench adapt to the differentspecific uncooled IRFPA detectors was designed and realized. Meanwhile amulti-function, high-performance infrared thermal imaging system based on320×240uncooled IRFPA detectors was designed and realized. The research contents and resultsin this dissertation are summarized as follows:
(1) For microbolometer testing techniques: Microbolometer working mechanismwas deeply researched, and the microbolometer optical, thermal and electricalmathematical model was established. Based on the mathematical model, the keyparameters of microbolometer was refined, and the lock-in amplifier (LOCK-IN AMP)technique was applied to test the microbolometer response and noise, Through this way,the technical problems of small signal extraction were overcome. For testing thermalparameters of microbolometer, a method was introduced for thermal conductivity testbased on I-V measurement, and it was found that the effective thermal conductivity andtotal thermal conductivity error can be ignored by reducing the bias current, while thefrequency-conversion lock-in amplifier technology was used to test the thermal timeconstant. Through the comparion between the test results and the simulation results, theaccuracy and validity of the test method can be confirmed.
(2) For uncooled IRFPA detector test techniques: A test bench for uncooled IRFPAdetector has been developed, in this paper, the test bench is reported from design toverification, such as the structure of the composition, working principles, board level system design details, the parameter of each module and the key technology solutions,according to the results of a standard detector test, the error could be less than1%. Inthis bench, the bias voltage source module was designed by network feedback controlstructure and the digital potentiometer technology, in order to meet low-noise,high-precision adjustment and wide temperature adaptability requirements. Meanwhilein the acquisition module of the bench, PCIE bus technology and DMA mode is used tosolve the multi-specifications, large-scale, real-time acquisition of high frame rateinfrared image acquisition problem, and the data loss problem during the acquisitionprocess due to the CPU speed limitation was overcome.
(3) For uncooled IRFPA imaging techniques: An imaging system based on320×240uncooled IRFPA was designed, the system uses the latest hardware structureof FPGA+ARM, correction parameter calculation and real-time imaging function wereintegrated by the integration design concept. In the nonuniformity correction algorithmpart, an improved neural networks NUC algorithm is introduced. The edge detectiontechnique is applied to the neural network algorithm, to overcome the lack of smearingand target degradation in traditional neural network algorithm. The improved binaryheap algorithm was also applied to calculate the enhancement parameters for theimaging enhancement, it can greatly improves the calculation efficiency, and couldsolve the imaging enhancement distortion problem due to the detector working statechanges. At last, a new infrared image digital detail enhancement(DDE) technologybased on gradient information weight adaptive adjustment was introduced, by the stepof removing noise, calculating image gradient information, correcting this gradientinformation, calculating detail image histogram for image enhancement was applied forimaging detail enhancement. By the test, NETD of the thermal imaging system is98mK.
引文
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