高性能快速控制反射镜研究
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摘要
快速控制反射镜是光学扫描器件的一种,是激光雷达、自适应光学、空间光通信等应用领域的关键器件之一。国内现有传统的激光扫描器由于频率、体积、功耗、控制等多方面因素结合的限制,不能满足现有高端应用领域对于激光扫描的需求。西方发达国家在诸多领域已经有很成熟的激光扫描器,但是在技术引进方面存在对国内的相关限制。因此我们需要开展面向高端应用的高性能激光扫描器的研究,为开发具有市场竞争力和自主创新的新系统奠定基础。
本论文概述了现有的各种激光扫描器,同时给出了国外现有音圈电机驱动和压电陶瓷驱动的快速控制反射镜的性能。介绍了快速控制反射镜的硬件结构和软件结构的组成和作用。开展了基于两种驱动器驱动的三种不同结构的快速控制反射镜的研究。主要研究内容和成果综述如下：
在机械结构方面,首先分别介绍了三种快速控制反射镜的总体结构,分析了各自的工作原理。然后围绕三种结构,对关键部件进行了仿真计算,主要包括音圈电机和压电位移放大结构,得出了适合需求的结构。为了将驱动器的输出成功转化为合适的扫描偏转,综合考虑频率、角度的需求,对柔性铰链进行了特殊的设计。针对不同反射镜,经过仿真、测试、修改与优化,设计了不同的高效的柔性铰链结构。并根据结构布局和空间尺寸要求,设计了不同的反馈装置用于扫描状态的实时探测。
在电学设计方面,首先设计了三种快速控制反射镜通用的控制电路。然后分别介绍了不同反射镜各自所特有的驱动电路和信号处理电路。对于音圈电机驱动二维反射镜：介绍了反馈信号的调理电路和基于音频功放芯片的驱动电路。为电机软启动设计了基于光耦的隔离电路,结合芯片的散热需求设计了散热模块。对于压电驱动一维反射镜：设计了基于电阻应变片的反馈电路和基于分离原件的高压驱动电路。搭建了抑制机械结构谐振的陷波电路,结合陷波电路的频率点和衰减幅度做了理论分析。对于压电驱动二维反射镜：研究了集成高压驱动电路和基于电容位移传感器的信号调理电路。
在控制算法方面,首先设计并优化了信号滤噪算法以消除信号采集过程中噪声对控制的影响。然后分别介绍了三种快速控制反射镜相应的控制算法。对于音圈电机驱动反射镜：通过对音圈电机进行建模,经由系统辨识得出传递函数,设计了闭环控制器抑制谐振对反射镜进行控制。对于压电驱动一维反射镜：针对压电固有的迟滞特性,分析了压电扫描器中迟滞回线的修正原理及方法,设计了自学习前馈控制补偿器,抑制了压电陶瓷的迟滞效应。对于压电驱动二维反射镜：针对其特有的三支撑结构,进行了驱动算法的解耦。模拟了三驱动器条件下的二维单镜面扫描,同时分析了入射光线和镜面法线夹角对于扫描视场的影响。
在测试方面,搭建了基于位敏探测器和数据采集卡的测试平台,设计了基于虚拟仪器的测试程序,介绍了测试的基本步骤。分别测试了三种快速控制反射镜的扫描角度、扫描频率、扫描线性度等基本性能。对于各自的测试结果进行了分析比较,经过控制的扫描结果在性能上得到了大幅提高。
最后,针对满足空间多目标探测干扰的需求提出了一种阵列式快速控制反射镜。
Fast steering mirror (FSM) is a kind of optical scanning device, which is one of the most important components in the applications of light detection and ranging (lidar), adaptive optics, space optical communications, and so on. Domestic traditional FSM cannot meet the requirements of the high-end applications because of the limitation of their frequency, sizes, power consumptions and control. Laser scanners abroad in many fields are very mature, but advanced equipments importing are restricted due to the technology blockade policy of the western developed countries. Therefore, the research of laser scanner system for the high-end applications is urgent.
This thesis gives an overview of the existing laser scanners. The performance of the existing foreign FSMs driven by voice coil actuator (VCA) and PbZrTiO3 (PZT) is presented. The composition and role of the hardware and software structure of the FSM is introduced. Three different FSMs based on two different actuators are fabricated. The primary content of the dissertation includes:
In the aspect of the mechanical structure, the overall structures of the FSM are introduced, and the work principles are analyzed respectively. Key components which include the VCAs and amplified piezo actuators are simulated and calculated based on these different structures. And the optimized structures are obtained. In order to convert the output of the actuators to the suitable scanning deflection successful, the special consideration of the flexible support is necessary with the requirements of the frequency and angle. Different efficient flexible support structures are designed after simulation, measurement, modification and optimization for different FSMs. Different feedback structures for the detection of scan status are designed with the requirements of different structural layout and space size.
In the aspect of the electrical design, common control circuits of the three FSMs are designed. Each unique drive circuit and signal processing circuit are set up for different FSMs. Feedback signal conditioning circuit and audio amplifier chip driver circuit for the two-dimensional (2D) FSM driven by VCAs are introduced. Isolation circuit based on the optical coupler for the soft start of VCA is designed. Cooling module is designed by the combination of demand of the chip cooling. Feedback circuit based on the resistance strain gauge and high-voltage driver circuit based on the separation device are introduced for the one-dimensional (1D) FSM driven by PZT. Notch circuit to restrain the resonant of the mechanical structure is set up. Corresponding to different frequency and the attenuation, the principle of the notch filter circuit is analyzed. Integrated high voltage driver circuit and signal conditioning circuit based on capacitive displacement sensor are achieved for the 2D FSMs driven by PZT.
In the aspect of control algorithm, the signal noise filtering algorithm is designed and optimized to eliminate the effects of the noise in the signal acquisition to the control process. Three different control algorithms for the FSMs are described. A controller based on the model of the VCA is designed to realize feedback control in 2D scanning. The controller is used to reduce the oscillation of the FSM driven by VCAs at resonance frequency. To design a qualified controller, the model of the FSM is set up. The transfer function of the model is identified based on the tested data. The principle and method of amending the piezoelectric scanner hysteresis loop are analyzed for the 1D FSMs. The control algorithm based on self-learning feed-forward controller is introduced. The hysteresis characteristics are well restrained. For the unique support structure of the 2D FSMs driven by PZT, the driving algorithm is decoupled. Single-mirror 2D scanning driven by three actuators is simulated. The impact of the angle between the incident light and the mirror normal on the field of the view is analyzed.
In the aspect of the performance measurement, a testing bench based on the position sensitive detector (PSD) and data acquisition card (DAQ) is built. Testing program based on virtual instrument is designed. The basic steps of the test are introduced. The scanning angle, scanning frequency and scanning linearity of three FSMs are testrd. The scanning performance of the FSMs is remarkably improved by controlling process.
Finally, an array FSM for the multi-target detection and interference is introduced. The thesis laid the foundation fot the development of the array FSM.
本论文概述了现有的各种激光扫描器,同时给出了国外现有音圈电机驱动和压电陶瓷驱动的快速控制反射镜的性能。介绍了快速控制反射镜的硬件结构和软件结构的组成和作用。开展了基于两种驱动器驱动的三种不同结构的快速控制反射镜的研究。主要研究内容和成果综述如下：
在机械结构方面,首先分别介绍了三种快速控制反射镜的总体结构,分析了各自的工作原理。然后围绕三种结构,对关键部件进行了仿真计算,主要包括音圈电机和压电位移放大结构,得出了适合需求的结构。为了将驱动器的输出成功转化为合适的扫描偏转,综合考虑频率、角度的需求,对柔性铰链进行了特殊的设计。针对不同反射镜,经过仿真、测试、修改与优化,设计了不同的高效的柔性铰链结构。并根据结构布局和空间尺寸要求,设计了不同的反馈装置用于扫描状态的实时探测。
在电学设计方面,首先设计了三种快速控制反射镜通用的控制电路。然后分别介绍了不同反射镜各自所特有的驱动电路和信号处理电路。对于音圈电机驱动二维反射镜：介绍了反馈信号的调理电路和基于音频功放芯片的驱动电路。为电机软启动设计了基于光耦的隔离电路,结合芯片的散热需求设计了散热模块。对于压电驱动一维反射镜：设计了基于电阻应变片的反馈电路和基于分离原件的高压驱动电路。搭建了抑制机械结构谐振的陷波电路,结合陷波电路的频率点和衰减幅度做了理论分析。对于压电驱动二维反射镜：研究了集成高压驱动电路和基于电容位移传感器的信号调理电路。
在控制算法方面,首先设计并优化了信号滤噪算法以消除信号采集过程中噪声对控制的影响。然后分别介绍了三种快速控制反射镜相应的控制算法。对于音圈电机驱动反射镜：通过对音圈电机进行建模,经由系统辨识得出传递函数,设计了闭环控制器抑制谐振对反射镜进行控制。对于压电驱动一维反射镜：针对压电固有的迟滞特性,分析了压电扫描器中迟滞回线的修正原理及方法,设计了自学习前馈控制补偿器,抑制了压电陶瓷的迟滞效应。对于压电驱动二维反射镜：针对其特有的三支撑结构,进行了驱动算法的解耦。模拟了三驱动器条件下的二维单镜面扫描,同时分析了入射光线和镜面法线夹角对于扫描视场的影响。
在测试方面,搭建了基于位敏探测器和数据采集卡的测试平台,设计了基于虚拟仪器的测试程序,介绍了测试的基本步骤。分别测试了三种快速控制反射镜的扫描角度、扫描频率、扫描线性度等基本性能。对于各自的测试结果进行了分析比较,经过控制的扫描结果在性能上得到了大幅提高。
最后,针对满足空间多目标探测干扰的需求提出了一种阵列式快速控制反射镜。
Fast steering mirror (FSM) is a kind of optical scanning device, which is one of the most important components in the applications of light detection and ranging (lidar), adaptive optics, space optical communications, and so on. Domestic traditional FSM cannot meet the requirements of the high-end applications because of the limitation of their frequency, sizes, power consumptions and control. Laser scanners abroad in many fields are very mature, but advanced equipments importing are restricted due to the technology blockade policy of the western developed countries. Therefore, the research of laser scanner system for the high-end applications is urgent.
This thesis gives an overview of the existing laser scanners. The performance of the existing foreign FSMs driven by voice coil actuator (VCA) and PbZrTiO3 (PZT) is presented. The composition and role of the hardware and software structure of the FSM is introduced. Three different FSMs based on two different actuators are fabricated. The primary content of the dissertation includes:
In the aspect of the mechanical structure, the overall structures of the FSM are introduced, and the work principles are analyzed respectively. Key components which include the VCAs and amplified piezo actuators are simulated and calculated based on these different structures. And the optimized structures are obtained. In order to convert the output of the actuators to the suitable scanning deflection successful, the special consideration of the flexible support is necessary with the requirements of the frequency and angle. Different efficient flexible support structures are designed after simulation, measurement, modification and optimization for different FSMs. Different feedback structures for the detection of scan status are designed with the requirements of different structural layout and space size.
In the aspect of the electrical design, common control circuits of the three FSMs are designed. Each unique drive circuit and signal processing circuit are set up for different FSMs. Feedback signal conditioning circuit and audio amplifier chip driver circuit for the two-dimensional (2D) FSM driven by VCAs are introduced. Isolation circuit based on the optical coupler for the soft start of VCA is designed. Cooling module is designed by the combination of demand of the chip cooling. Feedback circuit based on the resistance strain gauge and high-voltage driver circuit based on the separation device are introduced for the one-dimensional (1D) FSM driven by PZT. Notch circuit to restrain the resonant of the mechanical structure is set up. Corresponding to different frequency and the attenuation, the principle of the notch filter circuit is analyzed. Integrated high voltage driver circuit and signal conditioning circuit based on capacitive displacement sensor are achieved for the 2D FSMs driven by PZT.
In the aspect of control algorithm, the signal noise filtering algorithm is designed and optimized to eliminate the effects of the noise in the signal acquisition to the control process. Three different control algorithms for the FSMs are described. A controller based on the model of the VCA is designed to realize feedback control in 2D scanning. The controller is used to reduce the oscillation of the FSM driven by VCAs at resonance frequency. To design a qualified controller, the model of the FSM is set up. The transfer function of the model is identified based on the tested data. The principle and method of amending the piezoelectric scanner hysteresis loop are analyzed for the 1D FSMs. The control algorithm based on self-learning feed-forward controller is introduced. The hysteresis characteristics are well restrained. For the unique support structure of the 2D FSMs driven by PZT, the driving algorithm is decoupled. Single-mirror 2D scanning driven by three actuators is simulated. The impact of the angle between the incident light and the mirror normal on the field of the view is analyzed.
In the aspect of the performance measurement, a testing bench based on the position sensitive detector (PSD) and data acquisition card (DAQ) is built. Testing program based on virtual instrument is designed. The basic steps of the test are introduced. The scanning angle, scanning frequency and scanning linearity of three FSMs are testrd. The scanning performance of the FSMs is remarkably improved by controlling process.
Finally, an array FSM for the multi-target detection and interference is introduced. The thesis laid the foundation fot the development of the array FSM.
引文
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