白光干涉型光纤法珀腔传感器的研究
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摘要
干涉型光纤法珀腔(FP)传感器作为一种高精度的干涉型光纤传感器有着广泛的应用前景。按照信号解调装置的不同该种传感器可分为三类：强度调制解调型、相位调制解调型和白光干涉仪调制解调型光纤FP传感器，其中后两种采用宽光谱光源，是白光干涉型光纤FP传感器。白光干涉型光纤FP传感器解决了传统光纤FP传感器只能进行相对测量的缺陷，因此可以埋入材料结构内部，对结构内部的状态进行长期实时监测，被认为是一种最有发展前途的用于智能结构的灵巧传感器。
本文首先利用光的干涉理论、多光束干涉理论和白光干涉理论分析了白光干涉型光纤FP传感器的工作机理，由此得到了白光干涉型光纤FP传感器的两种解调方法：直接解调的相位调制解调法和间接解调的白光干涉仪调制解调法。通过理论分析建立了这两种传感器的理论模型。
其次，讨论了光纤FP传感头的制作工艺中的一些关键问题。我们通过理论分析得到了确定光纤FP腔原始腔长的方法，并据此设计出了两套测量光纤FP腔腔长的方法。通过理论计算得到了构成光纤FP腔的光纤端面的镀膜参数要求，深入的分析了白光干涉仪光纤FP传感器的模型，并设计出了一套观察白光干涉现象的实验装置。接着对光纤FP传感头的制作过程作了具体介绍。
最后讨论了白光干涉型光纤FP传感器信号解调装置的设计，提出了改进该种传感器性能的方法，并对该传感器系统与电阻应变片作了对比实验，将该种传感器用于了碳纤维材料的温度性能实验中。
Fiber-optic Fabry-Perot sensor is a kind of high precision interferometric fiber-optic sensor, so this kind of sensor has a bright future. This sensor can be classified into 3 kinds of sensors by their demodulation device. These are intensity modulation/demodulation fiber-optic Fabry-Perot sensor, phase
modulation/demodulation fiber-optic Fabry-Perot sensor and white-light interferometer modulation/demodulation fiber-optic Fabry-Perot sensor. The later two kinds of sensors are white-light interferometric fiber-optic Fabry-Perot sensor because of their broad-spectrum light source. White-light interferometric fiber-optic Fabry-Perot sensor solved the problem that the conventional fiber-optic Fabry-Perot sensor only measure relatively, so it can be buried into material structure to monitor the inner state of material structure. Therefore this kind of sensor is best sensor for smart structure.
At first, we studied the theory of light interferometry, multi-light interfeormetry and white-light interferometry. Then we analysed the working principle of white-light interferometric fiber-optic Fabry-Perot sensor, and get two kinds of ways for demodulation: directive(phase) and inderective(white-light interferometer) modulation/demodulation ways.
Secondly, we discussed key technics of manufacture of fiber-optic Fabry-Perot sensing head. We get the ways to decide the primitive length of fiber-optic Fabry-Perot cavity by use of theory, and designed two systems to measure the length of fiber-optic Fabry-Perot cavity. We get the film reflectivity of fiber-optic Fabry-Perot cavity by calculation, and designed a experimental device to observe white-light interferometry. Then we introduced the manufacture process of of fiber-optic Fabry-Perot sensing head in detail.
At last, we introduced the design of demodulation device of white-light interferometer modulation/demodulation fiber-optic Fabry-Perot sensor. We provide the ways to improve the property of sensor. We performed a experiment to test the capability of our sensor to strain gauge, and applied our sensor into study on carbon fiber material temperature property.
本文首先利用光的干涉理论、多光束干涉理论和白光干涉理论分析了白光干涉型光纤FP传感器的工作机理，由此得到了白光干涉型光纤FP传感器的两种解调方法：直接解调的相位调制解调法和间接解调的白光干涉仪调制解调法。通过理论分析建立了这两种传感器的理论模型。
其次，讨论了光纤FP传感头的制作工艺中的一些关键问题。我们通过理论分析得到了确定光纤FP腔原始腔长的方法，并据此设计出了两套测量光纤FP腔腔长的方法。通过理论计算得到了构成光纤FP腔的光纤端面的镀膜参数要求，深入的分析了白光干涉仪光纤FP传感器的模型，并设计出了一套观察白光干涉现象的实验装置。接着对光纤FP传感头的制作过程作了具体介绍。
最后讨论了白光干涉型光纤FP传感器信号解调装置的设计，提出了改进该种传感器性能的方法，并对该传感器系统与电阻应变片作了对比实验，将该种传感器用于了碳纤维材料的温度性能实验中。
Fiber-optic Fabry-Perot sensor is a kind of high precision interferometric fiber-optic sensor, so this kind of sensor has a bright future. This sensor can be classified into 3 kinds of sensors by their demodulation device. These are intensity modulation/demodulation fiber-optic Fabry-Perot sensor, phase
modulation/demodulation fiber-optic Fabry-Perot sensor and white-light interferometer modulation/demodulation fiber-optic Fabry-Perot sensor. The later two kinds of sensors are white-light interferometric fiber-optic Fabry-Perot sensor because of their broad-spectrum light source. White-light interferometric fiber-optic Fabry-Perot sensor solved the problem that the conventional fiber-optic Fabry-Perot sensor only measure relatively, so it can be buried into material structure to monitor the inner state of material structure. Therefore this kind of sensor is best sensor for smart structure.
At first, we studied the theory of light interferometry, multi-light interfeormetry and white-light interferometry. Then we analysed the working principle of white-light interferometric fiber-optic Fabry-Perot sensor, and get two kinds of ways for demodulation: directive(phase) and inderective(white-light interferometer) modulation/demodulation ways.
Secondly, we discussed key technics of manufacture of fiber-optic Fabry-Perot sensing head. We get the ways to decide the primitive length of fiber-optic Fabry-Perot cavity by use of theory, and designed two systems to measure the length of fiber-optic Fabry-Perot cavity. We get the film reflectivity of fiber-optic Fabry-Perot cavity by calculation, and designed a experimental device to observe white-light interferometry. Then we introduced the manufacture process of of fiber-optic Fabry-Perot sensing head in detail.
At last, we introduced the design of demodulation device of white-light interferometer modulation/demodulation fiber-optic Fabry-Perot sensor. We provide the ways to improve the property of sensor. We performed a experiment to test the capability of our sensor to strain gauge, and applied our sensor into study on carbon fiber material temperature property.
引文
[1]陶宝祺，智能材料结构，国防工业出版社，1997
[2] Lagakes N etc, Multimode Optical Fiber Displacement Sensor, Appl.,1981:167～168
[3] Jonathan Weiss D. Fiber-Optic Strain Gauge. Journal of Lightwave Technology, 1989,7(9)
[4] Pan Weiet al, Fiber Bragg grating strain sensorfor Smart Structures, SPIE,1996,2895:166～170
[5] M. Martinelli et al , Fiber- Optic Interferometric Detection of Slow Phenomena, SPIE, 1985,586(Fiber Optic Sensor):104～108
[6] Valis Tomas et al, Passive- quadrature demodulated localized- Michelson fiber-optic strain sensor embedded in composite materials, Journal of L ightwave Technology,1991,9(4):535～544
[7] Norbert Furstennau et al , Fiber- Optic Interferometric Strain Gauge Producing Asymmetric Fringes by Using Nonlinear Feedback, IEEE Journal of Quantun Electronics, 1995,31(8):1461～1464
[8] Tanaka Satoshiet al, Fiber- optic strain sensor using a dual Mach- Zehnder interferometric configuration, Optics Communications, 1991,81 (5):267～272
[9] J. Sirkis et al, In- line fiber etalon (IL FE)fiber-optic strain sensors. Journal of L ightwave Technology, 1995,13(7):1256～1263
[10] Kent A. Murohy et al, Fabry- Perot fiber- optic sensor in full- scale fatigue testing on an F- 15 aircraft, Applied Optics, 1992,31(4):431～433
[11] R. Kistet al, The Fiber Fabry- Perot and its Applications as a Fiber- Optic Sensor Element, SPIE, 1985,586 (Fiber Optic Sensors): 126～133
[12] S. F. Masriet al, Experimental study of embedded fiber- optic strain gauges in concrete structures, Journal of Engineering Mechanics, 1994,20 (8): 1696～1717
[13] Belleville Claude et al, White- light interferometric multimode fiber- optic strain sensor, Optics L etters, 1993,18(1):78～80
[14] Chang Chiachen et al, Multiplexed Optical Fiber Sensor using a Single Fabry- Perot Resonater for Phase Modulation, Journal of L ightwave Technology, 1996,14(7): 1653～1663
[15]高巍，基于光纤传感器的大坝监测仪器，大坝观测与土工测量，2000，24(4)：53～54
[16] Wang Anbo et al, Split- spectrum intensity- based optical fiber sensor for measurement of micro-displacement,strain, and pressure., Applied Optics,1996,35(15):2595～2601
[17] W. C. Michieet al, Fiber- optic technique for simultaneous measurement of strain and temperature variations in composite materials, Proceedings of SPIE - The International Society for Op tical Engineering, USA, 1588:342～355
[18] Nadarajah Narendran et al, High temperature fiber- optic strain and temperature sensor for structural health monitoring, Instrumentation, Control and Automation in the Power Industry, Proceedings Instrument Society of America, Research Triangle Park,NC,USA. 1995,38:273～282
[19] Mitsuru Kihara et al, Return Loss Characteristics of Optical Fiber Connectors, Journal of Lightwave Technology, 1996,14(9): 1986～1991
[20] Zhang Kuiwei et al, A Fiber Optic for the Measurement of Surface Roughness and Displacement Using Artificial Neural Networks, IEEE Trans. On Instrumen-tation and Measurement, 1997,46 (4):899～902
[21] Jin Wei et al, Simultaneous measurement of strain and temperature:error analysis, Opt. Eng, 1997,36(2):598～609
[22]王勇等，光纤干涉位移传感器相位估计的一种精确方法，光学技术，1999,(1)：38～44
[23]毕卫红，光纤应变传感器的研究现状与发展，激光与光电子学进展，1999，No．12：1～8
[24]殷纯水主编，现代干涉测量技术，天津大学出版社，1999．7
[25]何永辉，蒋剑峰，赵万生，基于扫描白光干涉仪的表面三维轮廓仪，光学技术，2001，27(2)：150～155
[26][英]B．Culshaw等著，李少惠等译，光纤传感器，华中理工大学出版社，1997
[27]李东，虞沪生，干涉仪光程差的遥测及其应用研究，仪器与仪表，1999,No6：17～19
[28] P Choquet, F Dadoun, New Generation of Fiber-Optic Sensors for Dam Monitoring, Proceedings of the 99 International Conference on Dam Safety and Monitoring, 19-22 October 1999, Three Gorge Site, Yichang, Hubei, China
[29] H.C.Lefevre, "White-light Interferometry in Optical Fiber sensors",Proceedings of OFS 90,345-351(1990)
[30]张志鹏，(英)W．A．Gambling，光纤传感器原理，中国计量出版社，1991
[31]郭凤珍，于长泰，光纤传感技术与应用，浙江大学出版社，1992
[32]黄章永，光纤通信用光电子器件和组件，北京邮电大学出版社，2001
[33] C E Lee, Optical fiber Fabry-Perot embedded sensor, Opt Lett, 1989;14(21):1225-1227
[34]何斌，马天予等编，Visual C++数字图像处理，人民邮电出版社，2001
[35] L Yuan, White-light interrerometric fiber-optic strain sensor from three-peak-wavelength broadband LED source, Appl. Optics, 1997,36(25):6246～6250
[36]封君，光纤珐珀应变仪的精度研究及其在桥梁结构健康监测中的应用，D．重庆大学博士学位论文，2000，12
[37] C E Lee, H F Taylor, Fiber optic sensor research at Texas A&M University, SPIE, 1989; 1170:456～463
[38]宋彦军，王金娥，光纤法布里-珀罗传感器，激光与光电子学进展，1998，10：1～5
[39] T A Tran, R O Claus, Extrinsic Fabry-Perot fiber optic sensor for surface acoustic wave detection, SPIE, 1991; 1584: 336-342.
[2] Lagakes N etc, Multimode Optical Fiber Displacement Sensor, Appl.,1981:167～168
[3] Jonathan Weiss D. Fiber-Optic Strain Gauge. Journal of Lightwave Technology, 1989,7(9)
[4] Pan Weiet al, Fiber Bragg grating strain sensorfor Smart Structures, SPIE,1996,2895:166～170
[5] M. Martinelli et al , Fiber- Optic Interferometric Detection of Slow Phenomena, SPIE, 1985,586(Fiber Optic Sensor):104～108
[6] Valis Tomas et al, Passive- quadrature demodulated localized- Michelson fiber-optic strain sensor embedded in composite materials, Journal of L ightwave Technology,1991,9(4):535～544
[7] Norbert Furstennau et al , Fiber- Optic Interferometric Strain Gauge Producing Asymmetric Fringes by Using Nonlinear Feedback, IEEE Journal of Quantun Electronics, 1995,31(8):1461～1464
[8] Tanaka Satoshiet al, Fiber- optic strain sensor using a dual Mach- Zehnder interferometric configuration, Optics Communications, 1991,81 (5):267～272
[9] J. Sirkis et al, In- line fiber etalon (IL FE)fiber-optic strain sensors. Journal of L ightwave Technology, 1995,13(7):1256～1263
[10] Kent A. Murohy et al, Fabry- Perot fiber- optic sensor in full- scale fatigue testing on an F- 15 aircraft, Applied Optics, 1992,31(4):431～433
[11] R. Kistet al, The Fiber Fabry- Perot and its Applications as a Fiber- Optic Sensor Element, SPIE, 1985,586 (Fiber Optic Sensors): 126～133
[12] S. F. Masriet al, Experimental study of embedded fiber- optic strain gauges in concrete structures, Journal of Engineering Mechanics, 1994,20 (8): 1696～1717
[13] Belleville Claude et al, White- light interferometric multimode fiber- optic strain sensor, Optics L etters, 1993,18(1):78～80
[14] Chang Chiachen et al, Multiplexed Optical Fiber Sensor using a Single Fabry- Perot Resonater for Phase Modulation, Journal of L ightwave Technology, 1996,14(7): 1653～1663
[15]高巍，基于光纤传感器的大坝监测仪器，大坝观测与土工测量，2000，24(4)：53～54
[16] Wang Anbo et al, Split- spectrum intensity- based optical fiber sensor for measurement of micro-displacement,strain, and pressure., Applied Optics,1996,35(15):2595～2601
[17] W. C. Michieet al, Fiber- optic technique for simultaneous measurement of strain and temperature variations in composite materials, Proceedings of SPIE - The International Society for Op tical Engineering, USA, 1588:342～355
[18] Nadarajah Narendran et al, High temperature fiber- optic strain and temperature sensor for structural health monitoring, Instrumentation, Control and Automation in the Power Industry, Proceedings Instrument Society of America, Research Triangle Park,NC,USA. 1995,38:273～282
[19] Mitsuru Kihara et al, Return Loss Characteristics of Optical Fiber Connectors, Journal of Lightwave Technology, 1996,14(9): 1986～1991
[20] Zhang Kuiwei et al, A Fiber Optic for the Measurement of Surface Roughness and Displacement Using Artificial Neural Networks, IEEE Trans. On Instrumen-tation and Measurement, 1997,46 (4):899～902
[21] Jin Wei et al, Simultaneous measurement of strain and temperature:error analysis, Opt. Eng, 1997,36(2):598～609
[22]王勇等，光纤干涉位移传感器相位估计的一种精确方法，光学技术，1999,(1)：38～44
[23]毕卫红，光纤应变传感器的研究现状与发展，激光与光电子学进展，1999，No．12：1～8
[24]殷纯水主编，现代干涉测量技术，天津大学出版社，1999．7
[25]何永辉，蒋剑峰，赵万生，基于扫描白光干涉仪的表面三维轮廓仪，光学技术，2001，27(2)：150～155
[26][英]B．Culshaw等著，李少惠等译，光纤传感器，华中理工大学出版社，1997
[27]李东，虞沪生，干涉仪光程差的遥测及其应用研究，仪器与仪表，1999,No6：17～19
[28] P Choquet, F Dadoun, New Generation of Fiber-Optic Sensors for Dam Monitoring, Proceedings of the 99 International Conference on Dam Safety and Monitoring, 19-22 October 1999, Three Gorge Site, Yichang, Hubei, China
[29] H.C.Lefevre, "White-light Interferometry in Optical Fiber sensors",Proceedings of OFS 90,345-351(1990)
[30]张志鹏，(英)W．A．Gambling，光纤传感器原理，中国计量出版社，1991
[31]郭凤珍，于长泰，光纤传感技术与应用，浙江大学出版社，1992
[32]黄章永，光纤通信用光电子器件和组件，北京邮电大学出版社，2001
[33] C E Lee, Optical fiber Fabry-Perot embedded sensor, Opt Lett, 1989;14(21):1225-1227
[34]何斌，马天予等编，Visual C++数字图像处理，人民邮电出版社，2001
[35] L Yuan, White-light interrerometric fiber-optic strain sensor from three-peak-wavelength broadband LED source, Appl. Optics, 1997,36(25):6246～6250
[36]封君，光纤珐珀应变仪的精度研究及其在桥梁结构健康监测中的应用，D．重庆大学博士学位论文，2000，12
[37] C E Lee, H F Taylor, Fiber optic sensor research at Texas A&M University, SPIE, 1989; 1170:456～463
[38]宋彦军，王金娥，光纤法布里-珀罗传感器，激光与光电子学进展，1998，10：1～5
[39] T A Tran, R O Claus, Extrinsic Fabry-Perot fiber optic sensor for surface acoustic wave detection, SPIE, 1991; 1584: 336-342.
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