5G通信用MEMS表贴滤波器

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• 英文论文题名：A surface-mounted MEMS filter for 5G communications
• 论文作者：侯芳 ; 吴昊 ; 王文岩 ; 郁元卫
• 英文论文作者：HOU Fang ; WU Hao ; WANG Wenyan ; YU Yuanwei ; Nanjing Electronic Device Institute ; Science and Technology on Monolithic Integrated Circuits and Modules Laboratory
• 年：2017
• 作者机构：南京电子器件研究所;微波毫米波单片集成和模块电路重点实验室;
• 论文关键词：5G ; MEMS滤波器 ; 倒扣焊
• 英文论文关键词：5G ; MEMS filter ; flip-chip bonding
• 会议召开时间：2017-05-08
• 会议录名称：2017年全国微波毫米波会议论文集（中册）
• 英文会议录名称：Proceedings of 2017 National Conference on Microwave and Millimeter Waves(NCMMW2017)
• 语种：中文
• 分类号：TN713
• 学会代码：ZDWB
• 会议名称：2017年全国微波毫米波会议
• 会议地点：中国浙江杭州
• 主办单位：中国电子学会
• 学会名称：中国电子学会微波分会
• 页数：4
• 文件大小：1141k
• 原文格式：D
• 会议级别：全国

摘要

MEMS技术因工艺精度高、设计灵活,是未来5G基站用关键器件技术。本文介绍了MEMS滤波器在5G基站中的应用前景,针对5G重点候选频段,研制了一款小型化MEMS表贴滤波器,装配测试结果表明:该滤波器通带为27.6-29.1GHz,反射损耗优于12d B,通带插损约为1.7d B,在25.9GHz处带外抑制为32d B。在31.4GHz处带外抑制为44d B。芯片尺寸仅为:5.2mm×6.3mm×0.4mm。考虑工艺误差影响,设计与测试结果吻合良好,该芯片因体积小、性能优可广泛用于5G通信中。
MEMS(Microelectromechanical system) is one of key technology for future 5G communication for its high precision. In this paper, we demonstrate the progress of MEMS fiter for 5G base station and design a novel surface-mounted MEMS filter aimed at the prospective 5G candidate spectrum.The filter samples are fabricated, assembled and tested. The passband of the filter is 27.6-29.1GHz. Typical filter paramters are measured to be as follows: insertion loss < 1.7d B, reflection loss > 12 d B and isolation >44d B@31.4GHz, >32d B@25.9GHz. The fabricated filter is only 5.2mm×6.3mm ×0.4mm in size.The experimental results match well with the simulation. This filter can be extensively used in 5G communication for its small size and high performance.

引文

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