阳极氧化制备硅基TiO_2纳米管阵列及形貌表征
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摘要
TiO_2纳米管因其具有独特的结构优势和优异的物理化学性质,受到了广泛的关注与研究。然而,TiO_2纳米管阵列(NTA)的制备主要以钛片为基底,很难与硅的微加工工艺相兼容,制约了其在微型电子设备中的应用。为将TiO_2纳米管阵列与硅衬底结合,首先以磁控溅射方法在硅基底上沉积一层金属钛薄膜,通过阳极氧化法制备硅基TiO_2纳米管阵列。采用扫描电子显微镜(SEM)分别探究了阳极氧化过程中外加电压、电解液组成、阳极氧化时间对纳米管形貌的影响,并得到了优化的实验参数。实验发现:50 V恒压条件下,在含有质量分数0.5%氟化铵的乙二醇电解液中对金属钛薄膜进行阳极氧化,成功制备出直径约110 nm、高2.00μm的TiO_2纳米管阵列。高比表面积的TiO_2纳米管可根据需要负载不同的物质材料,应用于传感器、药物传输、超级电容器等领域,极大拓展了其在微电子器件方面的应用。
TiO_2 nanotubes have received extensive attention and researches because of their unique structural advantages and physicochemical properties.However,the preparation of TiO_2 nanotube arrays(NTAs)is mainly based on titanium substrate and is difficult to integrate with micromachining process of silicon,restricting its application in miniature electronic equipment.In order to integrate the TiO_2 NTAs and silicon substrate,the titanium thin film was deposited on the silicon substrate by magnetron sputtering technology.The silicon-based TiO_2 NTAs were fabricated by anodic oxidation.The effects of the applied voltage,electrolyte composition and anodic oxidation time on the morphology of the nanotubes were investigated by scanning electron microscopy(SEM),and the optimized experimental parameters were obtained.The experimental results show that through the anodic oxidation of the titanium thin film in ethylene glycol electrolyte containing ammonium fluoride with a mass fraction of 0.5% at constant voltage of50 V,the TiO_2 NTAs with a diameter of about 110 nm and a height of 2.00μm were prepared.The TiO_2 nanotubes with high specific surface area can be decorated with various materials according to application requirement and used in the fields of sensors,drug delivery,super-capacitors and so on,greatly expanding its application in micro-electronic devices.
TiO_2 nanotubes have received extensive attention and researches because of their unique structural advantages and physicochemical properties.However,the preparation of TiO_2 nanotube arrays(NTAs)is mainly based on titanium substrate and is difficult to integrate with micromachining process of silicon,restricting its application in miniature electronic equipment.In order to integrate the TiO_2 NTAs and silicon substrate,the titanium thin film was deposited on the silicon substrate by magnetron sputtering technology.The silicon-based TiO_2 NTAs were fabricated by anodic oxidation.The effects of the applied voltage,electrolyte composition and anodic oxidation time on the morphology of the nanotubes were investigated by scanning electron microscopy(SEM),and the optimized experimental parameters were obtained.The experimental results show that through the anodic oxidation of the titanium thin film in ethylene glycol electrolyte containing ammonium fluoride with a mass fraction of 0.5% at constant voltage of50 V,the TiO_2 NTAs with a diameter of about 110 nm and a height of 2.00μm were prepared.The TiO_2 nanotubes with high specific surface area can be decorated with various materials according to application requirement and used in the fields of sensors,drug delivery,super-capacitors and so on,greatly expanding its application in micro-electronic devices.
引文
[1]马宗敏,谢艳娜,石云波,等.TiO2纳米管的阳极氧化制备及改性应用研究综述[J].表面技术,2015,44(9):61-71.
[2] ZHOU M Q,GLUSHENKOV A M,KARTACHOVA O,et al.Titanium dioxide nanotube films for electrochemical supercapacitors:biocompatibility and operation in an electrolyte based on a physiological fluid[J].Journal of the Electrochemical Society,2015,162(5):A5065-A5069.
[3] LU X H,WANG G M,ZHAI T,et al.Hydrogenated TiO2nanotube arrays for supercapacitors[J].Nano Letters,2012,12(3):1690-1696.
[4] ENACHI M,LUPAN O,BRANISTE T,et al.Integration of individual TiO2nanotube on the chip:nanodevice for hydrogen sensing[J].Physica Status Solidi(RRL)-Rapid Research Letters,2015,9(3):171-174.
[5] GUO W X,XUE X Y,WANG S H,et al.An integrated power pack of dye-sensitized solar cell and Li battery based on double-sided TiO2nanotube arrays[J].Nano Letters,2012,12(5):2520-2523.
[6] ZHANG M,YAO G,CHENG Y L,et al.Temperature-dependent differences in wettability and photocatalysis of TiO2nanotube arrays thin films[J].Applied Surface Science,2015,356:546-552.
[7]刘非拉,肖鹏,周明,等.二氧化钛纳米管阵列的制备、改性及应用[J].无机化学学报,2012,28(5):861-872.
[8] FANG W C,CHYAN O,SUN C L,et al.Arrayed CNx NTRuO2nanocomposites directly grown on Ti-buffered Si substrate for supercapacitor applications[J].Electrochemistry Communications,2007,9(2):239-244.
[9] MARIA CHONG A S,TAN L K,DENG J,et al.Soft imprinting:creating highly ordered porous anodic alumina templates on substrates for nanofabrication[J].Advanced Functional Materials,2007,17(10):1629-1635.
[10]杨铭杰,刘伟,孙家林.硅基底TiO2纳米管阵列的制备[J].金属功能材料,2012,19(5):6-9.
[11] UHM S H,SONG D H,KWON J S,et al.Time-dependent growth of TiO2nanotubes from a magnetron sputtered Ti thin film[J].Thin Solid Films,2013,547:181-187.
[12] SONG J N,ZHENG M J,ZHANG B,et al.Fast growth of highly ordered TiO2 nanotube arrays on Si substrate under high-field anodization[J].Nano-Micro Letters,2017,9(2):13-1-13-11.
[13] PˇRIKRYLOV K,DRBOHLAVOV J,SVATOV,et al.Fabrication of highly ordered short free-standing titania nanotubes[J].Monatshefte für Chemie-Chemical Monthly,2016,147(5):943-949.
[14] CHAPPANDA K N,SMITH Y R,MOHANTY S K,et al.Growth and characterization of TiO2 nanotubes from sputtered Ti film on Si substrate[J].Nanoscale Research Letters,2012,7(1):388.
[15]王亚兰,赵丽,王世敏,等.TiO2纳米管的研究进展[J].胶体与聚合物,2016,34(2):85-88.
[16]田甜,王凡,袁永健,等.TiO2纳米管阵列阳极氧化制备的研究进展[J].材料导报,2013,27(7):11-15.
[17]管东升,方海涛,逯好峰,等.阳极氧化TiO2纳米管阵列的制备与掺杂[J].化学进展,2008,20(12):1868-1879.
[2] ZHOU M Q,GLUSHENKOV A M,KARTACHOVA O,et al.Titanium dioxide nanotube films for electrochemical supercapacitors:biocompatibility and operation in an electrolyte based on a physiological fluid[J].Journal of the Electrochemical Society,2015,162(5):A5065-A5069.
[3] LU X H,WANG G M,ZHAI T,et al.Hydrogenated TiO2nanotube arrays for supercapacitors[J].Nano Letters,2012,12(3):1690-1696.
[4] ENACHI M,LUPAN O,BRANISTE T,et al.Integration of individual TiO2nanotube on the chip:nanodevice for hydrogen sensing[J].Physica Status Solidi(RRL)-Rapid Research Letters,2015,9(3):171-174.
[5] GUO W X,XUE X Y,WANG S H,et al.An integrated power pack of dye-sensitized solar cell and Li battery based on double-sided TiO2nanotube arrays[J].Nano Letters,2012,12(5):2520-2523.
[6] ZHANG M,YAO G,CHENG Y L,et al.Temperature-dependent differences in wettability and photocatalysis of TiO2nanotube arrays thin films[J].Applied Surface Science,2015,356:546-552.
[7]刘非拉,肖鹏,周明,等.二氧化钛纳米管阵列的制备、改性及应用[J].无机化学学报,2012,28(5):861-872.
[8] FANG W C,CHYAN O,SUN C L,et al.Arrayed CNx NTRuO2nanocomposites directly grown on Ti-buffered Si substrate for supercapacitor applications[J].Electrochemistry Communications,2007,9(2):239-244.
[9] MARIA CHONG A S,TAN L K,DENG J,et al.Soft imprinting:creating highly ordered porous anodic alumina templates on substrates for nanofabrication[J].Advanced Functional Materials,2007,17(10):1629-1635.
[10]杨铭杰,刘伟,孙家林.硅基底TiO2纳米管阵列的制备[J].金属功能材料,2012,19(5):6-9.
[11] UHM S H,SONG D H,KWON J S,et al.Time-dependent growth of TiO2nanotubes from a magnetron sputtered Ti thin film[J].Thin Solid Films,2013,547:181-187.
[12] SONG J N,ZHENG M J,ZHANG B,et al.Fast growth of highly ordered TiO2 nanotube arrays on Si substrate under high-field anodization[J].Nano-Micro Letters,2017,9(2):13-1-13-11.
[13] PˇRIKRYLOV K,DRBOHLAVOV J,SVATOV,et al.Fabrication of highly ordered short free-standing titania nanotubes[J].Monatshefte für Chemie-Chemical Monthly,2016,147(5):943-949.
[14] CHAPPANDA K N,SMITH Y R,MOHANTY S K,et al.Growth and characterization of TiO2 nanotubes from sputtered Ti film on Si substrate[J].Nanoscale Research Letters,2012,7(1):388.
[15]王亚兰,赵丽,王世敏,等.TiO2纳米管的研究进展[J].胶体与聚合物,2016,34(2):85-88.
[16]田甜,王凡,袁永健,等.TiO2纳米管阵列阳极氧化制备的研究进展[J].材料导报,2013,27(7):11-15.
[17]管东升,方海涛,逯好峰,等.阳极氧化TiO2纳米管阵列的制备与掺杂[J].化学进展,2008,20(12):1868-1879.
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