估计系统点扩展函数以降低相位测量轮廓术误差

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英文篇名：Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry 作者：田懿 ; 包国琦 ; 刘凯 英文作者：Tian Yi;Bao Guoqi;Liu Kai;College of Electrical Engineering and Information Technology, Sichuan University;Guangdong Provincial Public Security; 关键词：测量 ; 相位测量轮廓术 ; 点扩展函数 ; 卷积效应 ; 相位误差 ; 相位校正 英文关键词：measurement;;phase measuring profilometry;;point spread function;;convolution effect;;phase error;;phase correction 中文刊名：JJZZ 英文刊名：Chinese Journal of Lasers 机构：四川大学电气信息学院;广东省公安厅; 出版日期：2019-02-25 08:29 出版单位：中国激光 年：2019 期：v.46;No.509 基金：国家自然科学基金(NSFC61473198);; 四川省科技厅重点研发项目(2018GZ0198);; 成都市科技局重点研发支撑计划(2018-YFYF-00029-GX);; 四川大学自贡市校地科技合作重点研发项目(2018CDZG-12) 语种：中文; 页：JJZZ201905039 页数：7 CN：05 ISSN：31-1339/TN 分类号：373-379

摘要

针对相位测量轮廓术中由光学成像设备的点扩展函数引起的卷积效应,提出了一种估计点扩展函数卷积模型参数的方法。该方法利用卷积效应对相位测量轮廓术中光强调制度参数的影响,通过计算基频与更高空间频率之间的光强调制比率,实现了对点扩展函数参数的估计,利用估计的参数建立卷积模型对误差区域进行相位校正,从而提高三维重建精度。仿真及实验结果均验证了所提方法的有效性,与校正前相比,相位的均方根误差减小了30.55%。
        The convolution effect in phase measuring profilometry, which is caused by the point spread function in optical imaging devices, is investigated, and a method for estimating the convolution parameters of the point spread function is proposed. This method can be used to assess the point spread function parameters by utilizing the influence of convolution effect on the intensity modulation parameters in phase measuring profilometry, wherein the modulation ratio of the base frequency to the other higher spatial frequency is calculated. By adopting the resulting estimated parameter, a convolution model is established for phase correction in error areas; thus, the 3 D reconstruction accuracy is improved. The simulation and experimental results both verify the efficiency of the method. Compared with that obtained before correction, the root-mean-square error of phase is decreased by 30.55%.

引文

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