角度偏移对微机械陀螺系统响应特性的影响

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英文篇名：Influences of angular deviation on response characteristic of a MEMS Gyroscope System 作者：张利娟 ; 李欣业 ; 张华彪 英文作者：ZHANG Lijuan;LI Xinye;ZHANG Huabiao;School of Mechanical Engineering,Hebei Unviersity of Technology;School of Mechanical Engineering,Tianjin Unviersity of Commerce; 关键词：微机械陀螺 ; 角度偏移 ; 零偏 ; 机械灵敏度 ; 非线性度 英文关键词：MEMS gyroscope;;angular deviation;;zero bias;;mechanical sensitivity;;nonlinearity 中文刊名：ZDCJ 英文刊名：Journal of Vibration and Shock 机构：河北工业大学机械工程学院;天津商业大学机械工程学院; 出版日期：2019-04-15 出版单位：振动与冲击 年：2019 期：v.38;No.339 基金：国家自然科学基金(10872063; 11302223) 语种：中文; 页：ZDCJ201907011 页数：7 CN：07 ISSN：31-1316/TU 分类号：73-78+93

摘要

微机械陀螺敏感结构加工误差的存在使得微机械陀螺的弹性主轴和驱动/敏感轴不能完全重合,将导致信号出现误差。针对加工误差引起的角度偏移,即弹性主轴和驱动/敏感轴的不重合对微陀螺系统响应特性的影响进行研究。同时考虑系统的刚度非线性,基于拉格朗日方程建立了系统的动力学方程,利用平均法进行求解,得到了关于定常解的代数方程。利用同伦延拓方法研究了角度偏差对系统零偏、机械灵敏度和非线性度的影响。结果表明只有一个角度偏移时,随着偏移角度绝对值的增大,零偏和非线性度增加,机械灵敏度降低。当驱动和敏感方向同时有角度偏移时,两方向偏移角度相反时,零偏、机械灵敏度和非线性度随偏移角度大小的变化非常剧烈,而偏移角度相近时,偏移角度大小的影响较为平缓。给出了系统零偏和非线性度取极小值,机械灵敏度取极大值时,两个方向偏移角度的关系曲线,为工程中微陀螺敏感结构的修型提供了一定的理论依据。
        The manufacturing error's existence of a MEMS gyro sensitive structure makes that its elastic principal axis and its driving/sensitive axis can't completely coincide to cause its signals with errors. Here, the effects of angular deviation caused by manufacturing error, i.e., the inconsistency of the two axes mentioned above on response characteristics of the micro-gyro system were studied. Considering both stiffness nonlinearity of the system and angular deviation between the two axes, the system's dynamic equations were established using Lagrange equation and solved with the averaging method to deduce the algebraic equation for the system's steady solution. The homotopy continuation method was used to study effects of angular deviation on system zero bias, mechanical sensitivity and nonlinearity. It was shown that when there is only one angular deviation, with increase in absolute value of deviation angle, zero bias and nonlinearity increase, while mechanical sensitivity decreases; when there are two angular deviations in both driving direction and sensitive one, if both deviation angles are opposite, zero bias, mechanical sensitivity and nonlinearity change very acutely with variation of deviation angles' magnitude, if both deviation angles are close to each other, the effect of deviation angles' magnitude is more gentle; when zero bias and nonlinearity are the minimum and mechanical sensitivity are the maximum, the relation curve between two deviation angles is derived to provide a theoretical basis for modification of MEMS gyro sensitive structures in engineering.

引文

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