微波管电子枪真空除气系统设计

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英文篇名：Design on vaccum degassing system of electron gun for microwave tubes 作者：王博锋 ; 胡旭华 ; 周冠丽 ; 李宏宇 ; 周健勇 ; 王小霞 ; 张兆传 英文作者：WANG Bo-feng;HU Xu-hua;ZHOU Guan-Li;LI Hong-yu;ZHOU Jian-yong;WANG Xiao-xia;ZHANG Zhao-chuan;Key Laboratory of High Power Microwave Sources and Technologies, Institute of Electronics, Chinese Academy of Sciences;University of Chinese Academy of Sciences;Shanghai Institute of Spacecraft Equipment; 关键词：微波管 ; 电子枪 ; 真空除气系统 ; 超高真空 ; 测量 英文关键词：microwave tubes;;electron gun;;vacuum degassing system;;ultrahigh vacuum;;measuring 中文刊名：ZKZK 英文刊名：Vacuum 机构：中国科学院电子学研究所中国科学院高功率微波源与技术实验室;中国科学院大学;上海卫星装备研究所; 出版日期：2019-01-25 出版单位：真空 年：2019 期：v.56;No.285 语种：中文; 页：ZKZK201901005 页数：5 CN：01 ISSN：21-1174/TB 分类号：16-20

摘要

在微波管研制过程中,电子枪真空除气过程的主要作用是对阴极进行加热,获得灯丝电流电压与温度的关系曲线、检验电子枪正常工作时灯丝的电流电压,测试电子枪快速启动参数,测量阴极、聚束极热膨胀量和阴极高温时电子枪材料充分预蒸散从而减少电子枪的蒸散物。根据微波管电子枪结构特点和性能要求,设计和开发了极限真空度2×10~(-7)Pa且具有温度、膨胀量等性能测试功能的双工位电子枪真空除气系统。除气系统由直联泵作为前级泵、分子泵和离子泵为主泵构成超高真空系统,采用阀门的切换可实现两工位在超高真空度下同时工作且互不干扰,有效提升了电子枪的品质,缩短了研制进度。每个工位均配置"分子泵启动允许"、"离子泵启动允许"、"分解电源开允许"及"真空异常"指示灯,防止误操作对电子枪部件或除气系统带来损坏。测试结果表明微波管电子枪真空除气系统的工作原理、结构设计合理,性能优良,适用于不同型号微波管电子枪,在电子枪研制生产过程中发挥了重要的作用。
        In the development process of the microwave tubes, the main purpose of vacuum degassing system for the electron gun is to obtain the data between current/voltage and temperature, to test the quick start parameter, to measure thermal expansion and to minimize the material evapotranspiration and outgassing. According to the relation between structure and property of the electron gun, two operating station vacuum degassing system was designed and developed with the function of temperature, thermal expansion and other measure property. The final system pressure is better than 2 ×10-7Pa. In the vacuum degassing system, mechanical pump is used as the backing up pump, while the molecular pump and the ion pump are the main pumps. Each operating station can work simultaneously to improve the quality and to save time for increasing the efficiency. Indicator lights are equiped with the system to prevent the potential problems for the electron guns or the vacuum system that is caused by misoperation. A large amount of data obtained from experiments verifies the working principal,structure design and good properties of the system. It is applicable to different types of electron guns for microwave tubes,which has important significance in the small amount production of klystrons.

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