阵列微坑的固态微细电解加工工艺试验
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摘要
针对传统微细电解加工存在的不足,提出了一种固态微细电解加工方法.使用PEO与Na NO3制备固态电解质,其表面用热压印加工出复杂的微细形貌.研究了不同的加工电压、加工时间对于阵列微坑形貌的影响.研究表明在直流加工电压3,V、加工时间20,min的加工参数下,在阳极表面得到了6行6列形状精度较高的阵列微坑结构.固态微细电解加工方法提高了表面精度及加工质量,具有良好的发展前景和研究价值.
A new solid-state electrochemical micromachining(EMM) technique is proposed that overcomes the disadvantages of conventional electrochemical micromachining. A novel solid-state electrolyte with complex micromorphologies is produced via hot embossing,and a specialized electrochemical processing system is developed. The effects of different voltages and processing times on the morphology of micro-dimple arrays have been carefully researched. Based on the results thus obtained,the optimum parameters are:3 V DC power and 20 min processing time under indoor temperature and humidity, which shows that under such parameters, micro-dimple arrays(6×6)with high precision and little spurious corrosion will exist on the anode's surface. Solid-state EMM has improved accuracy and surface-processing quality,and shows good prospects for future developments.
A new solid-state electrochemical micromachining(EMM) technique is proposed that overcomes the disadvantages of conventional electrochemical micromachining. A novel solid-state electrolyte with complex micromorphologies is produced via hot embossing,and a specialized electrochemical processing system is developed. The effects of different voltages and processing times on the morphology of micro-dimple arrays have been carefully researched. Based on the results thus obtained,the optimum parameters are:3 V DC power and 20 min processing time under indoor temperature and humidity, which shows that under such parameters, micro-dimple arrays(6×6)with high precision and little spurious corrosion will exist on the anode's surface. Solid-state EMM has improved accuracy and surface-processing quality,and shows good prospects for future developments.
引文
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[3]徐家文,王建业,田继安.21世纪初电解加工的发展和应用[J].电加工与模具,2001,35(6):1-5.Xu Jiawen,Wang Jianye,Tian Ji’an.The research and application of electrochemical machining in 21st century[J].Electromachining&Mould,2001,35(6):1-5(in Chinese).
[4]钱双庆.表面织构电解加工技术的基础研究与应用[D].南京:南京航空航天大学,2011.Qian Shuangqing.Fundamental Research on Electrochemical Micromachining of Surface Texture and Applications[D].Nanjing:NUAA,2011(in Chinese).
[5]Kai K,Tokutomi M,Enomoto N,et al.Electrochemical micromachining using a solid electrochemical reaction at the metal/β″-Al2O3 microcontact[J].Electrochimica Acta,2007,52(11):3739-3745.
[6]Kamada K,Tokutomi M,Inada M,et al.Solid electrochemical micromachining using a tungsten microelectrode coated with a polymer electrolyte[J].Journal Ceramic Society Japan,2007,115(1346):672-677.
[7]Lee M,Ohayre R,Prinz F B,et al.Electrochemical nanopatterning of Ag on solid-state ionic conductor RbAg4I5 using atomic force microscopy[J].Applied Physics Letters,2004,85(16):3552-3554.
[8]Hsu K H,Schultz P L,And P M F,et al.Electrochemical nanoimprinting with solid-state superionic stamps[J].Nano Letters,2007,7(2):446-451.
[9]Jiang L M,Du Y J,Jia J,et al.Three dimensional micromachining on aluminum surface by electrochemical wet stamping technique[J].Electrochemistry Communications,2013,33(8):119-122.
[10]Lai L J,Zhou H,Zhu L M.Fabrication of microlens array on silicon surface using electrochemical wet stamping technique[J].Applied Surface Science,2016,364:442-445.
[11]刘骥驰.掺杂液晶离聚物的PEO基固态聚合物电解质导电性研究[D].沈阳:沈阳工业大学,2016.Liu Jichi.Research on Conductivity of PEO Base Solid Polymer Electrolyte Doping LCl[D].Shenyang:Shenyang University of Technology,2016(in Chinese).
[12]杜艳芬,韩卿.聚环氧乙烷的合成及应用[J].西南造纸,2003,4(1):23-26.Du Yanfen,Han Qing.Synthesis and application of polyethylene oxide[J].Southwest Paper,2003,4(1):23-26(in Chinese).