Coffee-Ring Defined Short Channels for Inkjet-Printed Metal Oxide Thin-Film Transistors

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• 作者：Yuzhi Li ; Linfeng Lan ; Peng Xiao ; Sheng Sun ; Zhenguo Lin ; Wei Song ; Erlong Song ; Peixiong Gao ; Weijing Wu ; Junbiao Peng
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2016
• 出版时间：August 3, 2016
• 年：2016
• 卷：8
• 期：30
• 页码：19643-19648
• 全文大小：389K
• 年卷期：0
• ISSN：1944-8252

文摘

Short-channel electronic devices several micrometers in length are difficult to implement by direct inkjet printing due to the limitation of position accuracy of the common inkjet printer system and the spread of functional ink on substrates. In this report, metal oxide thin-film transistors (TFTs) with channel lengths of 3.5 ± 0.7 μm were successfully fabricated with a common inkjet printer without any photolithography steps. Hydrophobic CYTOP coffee stripes, made by inkjet-printing and plasma-treating processes, were utilized to define the channel area of TFTs with channel lengths as short as ∼3.5 μm by dewetting the inks of the source/drain (S/D) precursors. Furthermore, by introduction of an ultrathin layer of PVA to modify the S/D surfaces, the spreading of precursor ink of the InO_x semiconductor layer was well-controlled. The inkjet-printed short-channel TFTs exhibited a maximum mobility of 4.9 cm² V^–1 s^–1 and an on/off ratio of larger than 10⁹. This approach of fabricating short-channel TFTs by inkjet printing will promote the large-area fabrication of short-channel TFTs in a cost-effective manner.