Highly Conductive and Flexible Nylon-6 Nonwoven Fiber Mats Formed using Tungsten Atomic Layer Deposition

详细信息    查看全文

• 作者：Ber莽 Kalanyan ; Christopher J. Oldham ; William J. Sweet ; III ; Gregory N. Parsons
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2013
• 出版时间：June 12, 2013
• 年：2013
• 卷：5
• 期：11
• 页码：5253-5259
• 全文大小：426K
• 年卷期：v.5,no.11(June 12, 2013)
• ISSN：1944-8252

文摘

Low-temperature vapor-phase tungsten atomic layer deposition (ALD) using WF₆ and dilute silane (SiH₄, 2% in Ar) can yield highly conductive coatings on nylon-6 microfiber mats, producing flexible and supple nonwovens with conductivity of 1000 S/cm. We find that an alumina nucleation layer, reactant exposure, and deposition temperature all influence the rate of W mass uptake on 3D fibers, and film growth rate is calibrated using high surface area anodic aluminum oxide. Transmission electron microscopy (TEM) reveals highly conformal tungsten coatings on nylon fibers with complex 鈥渨inged鈥?cross-section. Using reactant gas 鈥渉old鈥?sequences during the ALD process, we conclude that reactant species can transport readily to reactive sites throughout the fiber mat, consistent with conformal uniform coverage observed by TEM. The conductivity of 1000 S/cm for the W-coated nylon is much larger than found in other conductive nonwovens. We also find that the nylon mats maintain 90% of their conductivity after being flexed around cylinders with radii as small as 0.3 cm. Metal ALD coatings on nonwovens make possible the solvent-free functionalization of textiles for electronic applications.

Keywords:

tungsten; atomic layer deposition; conductive fibers; flexible electronics; nonwovens