纳米Al_2O_3电泳沉积成膜的影响因素研究
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摘要
为研究电泳沉积薄膜沉积量分布特征及影响因素,对纳米Al_2O_3材料进行电泳沉积薄膜试验和仿真研究。试验过程中,对纳米Al_2O_3薄膜沉积的微观形貌、成分及沉积量与电压、沉积时间关系进行了研究;在仿真研究过程中,利用电场、流场、沉积场多场耦合技术研究分析了电场分布、流场特性、沉积时间等对电泳沉积纳米Al_2O_3薄膜的影响。结果表明:电场在阴极正、反两侧强弱分布使得正面沉积量明显大于反面,同时流场的涡流分布特征加速了粒子在阴极边缘沉积。仿真结果与试验结果吻合度较好,验证了仿真模型的有效性,为进一步研究电泳沉积流体流动特性和沉积过程提供了一种新的研究方法和手段。
In order to study the distribution characteristics and influencing factors of deposition mass for electrophoretic deposition films,the nano-Al_2O_3 films were prepared by electrophoretic deposition,which were analyzed by simulations. In the experimental study,the microstructure and composition of nano-Al_2O_3 films were detected and the relationship between deposition mass and deposition voltage or deposition time was studied. In the process of simulation research,the multi-field technologies coupled with electric field,flow field and deposition field were employed for analyzing the effects of electric field distribution,flow field characteristics,deposition time and others on nano-Al_2O_3 films prepared by electrophoretic deposition. Results showed that the mass of pros side deposition was obviously more than that of corns side deposition due to electric field distribution which was strong at pros side of the cathode but weak at corns one. At the same time,the eddy distribution characteristics of flow field accelerated the deposition of particles on the cathode edge. The simulation results were in good agreement with experiment results,which verified the validity of simulation model and provided a new research method and means for further studying the flow characteristics and deposition process of electrophoretic deposition.
In order to study the distribution characteristics and influencing factors of deposition mass for electrophoretic deposition films,the nano-Al_2O_3 films were prepared by electrophoretic deposition,which were analyzed by simulations. In the experimental study,the microstructure and composition of nano-Al_2O_3 films were detected and the relationship between deposition mass and deposition voltage or deposition time was studied. In the process of simulation research,the multi-field technologies coupled with electric field,flow field and deposition field were employed for analyzing the effects of electric field distribution,flow field characteristics,deposition time and others on nano-Al_2O_3 films prepared by electrophoretic deposition. Results showed that the mass of pros side deposition was obviously more than that of corns side deposition due to electric field distribution which was strong at pros side of the cathode but weak at corns one. At the same time,the eddy distribution characteristics of flow field accelerated the deposition of particles on the cathode edge. The simulation results were in good agreement with experiment results,which verified the validity of simulation model and provided a new research method and means for further studying the flow characteristics and deposition process of electrophoretic deposition.
引文
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[3] DHIFLAOUI H,JABER N B,LAZAR F S,et al. Effect of annealing temperature on the structural and mechanical properties of coatings prepared by electrophoretic deposition of Ti O2nanoparticles[J]. Thin Solid Films,2017,638:201-212.
[4]朱庆霞,韩丹,齐荟仟.钛合金表面电泳沉积氟羟基磷灰石涂层[J].硅酸盐学报,2018,46(3):394-401.
[5]颜世宇,曹亚萍,张智涛,等. MoSi2常温电泳沉积于碳/碳复合材料表面制备抗高温氧化涂层[J].稀有金属与硬质合金,2018,46(1):27-32.
[6] MOHAMMADI E,ALIOFKHAZRAEI M,ROUHAGHDAM A. In-situ study of electrophoretic deposition of zinc oxide nanosheets and nanorods[J]. Ceramics International,2018,44(2):1 471-1 482.
[7]肖张莹.电泳沉积制备氧化锌薄膜的研究[D].天津:天津大学,2007:15-23.
[8]唐爱贵.电泳-电沉积Ni-PTFE复合镀层的制备及其摩擦学行为研究[D].南京:南京航空航天大学,2015:13-18.
[9] KELLER F,NIRSCHL H,Drfler W,et al.Efficient numerical simulation and optimization in electrophoretic deposition processes[J]. Journal of the European Ceramic Society,2015,35:2 619-2 630.
[10]袁艳,张睿,戚栋明,等.纳米Si O2分散乙醇介质过程中的解团聚行为[J].浙江理工大学学报,2011,28(4):485-489.
[11]魏磊,杨胡坤,刘耀,等.沉积电压对电泳沉积成膜均匀性的影响[J].材料保护,2017,50(11):44-48.
[12]吴柏志,赵立新,蒋明虎,等.水力旋流器内颗粒受力与运动分析[J].大庆石油学院学报,2005,29(6):64-66.
[13]纪晓峰,纪国栋,冯松林,等.幂律流体中岩屑颗粒沉降速度实验[J].断块油气田,2016,23(1):120-124.
[14] ISHIHARA T,SHIMISE K,KUDO T,et al. Preparation of yttria-stabilised zirconia thin-films on strontium doped La MnO3cathode substrate via electrophoretic deposition for solid oxide fuel cells[J]. Journal of the American Ceramic Society,2000,83(8):1 921-1 927.
[15] CHEN F L,LIU M L. Preparation of yttria-stabilised zirconia(YSZ)films on La0. 85Sr0. 15MnO3(LSM)and LSMYSZ substrate using an electrophoretic deposition(EPD)process[J]. Journal of the European Ceramic Society,2001,21(2):127-134.
[16] LEE J S,TALBOT J B. Simulation of particle incorporation during electrodeposition process—Primary and secondary current distributions[J]. Journal of The Electrochemical Society,2005,152(10):C706-C715.