基于Mach-Zehnder干涉结构的振动加速度检测技术研究
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摘要
石油作为一种重要的战略资源,是国民经济和社会发展甚至国家安全的前提和保障,为了使石油供应能够满足经济建设的需要,寻找高储量、高质量的新油田成为了当今石油勘探行业的重要任务。地震勘探法是查明地下地质构造,寻求油田的一种物探方法。地震检波器作为地震勘探的第一道工序,它的性能对油田勘探有着直接的影响。
本论文针对上述背景,利用集成光波导器件高精度、高灵敏度、抗电磁干扰、和集成度高的优点,设计了一种基于Mach-Zehnder(M-Z)干涉结构的集成光波导地震波加速度传感器。首先利用光波导模式理论完成铌酸锂脊形光波导的单模结构设计,结合有限差分光束传播法(FD-BPM)完成双M-Z干涉仪的结构设计,并对光场传输和模场分布进行了仿真;其次利用铌酸锂晶体的光弹效应,理论分析了加速度作用下铌酸锂脊形波导受到应力作用后折射率及模场分布的变化,并对加速度作用下光波导基模的模场分布变化进行仿真;结合材料力学及机械振动原理对集成光波导传感器的传感单元进行受力特性分析,理论计算得到系统的灵敏度为0.0896rad/(m?s-2),工作频率范围是0~1.389×104Hz;通过微细加工技术探索了在X切Y传的铌酸锂基片上制作质子交换脊形波导的工艺,并分析了X切质子交换铌酸锂晶体的腐蚀机理;根据光纤光学及材料力学原理设计了双传感臂的光纤M-Z干涉光路结构及传感探头结构,理论计算得到传感探头中质量块为445g,弹性柱体直径27mm,高度30mm,系统灵敏度为366.9rad/g,工作频率范围是0~340.7Hz;按照理论设计的结构采用硫化硅橡胶及金属铁块制作了传感探头,并完成全光纤双传感臂M-Z干涉仪的制作,经过测量臂长差约为6.87mm,干涉可见度约为95.8%;最后搭建实验系统对不同频率及不同振幅的加速度振动信号进行检测,实验结果显示在50~400Hz的频率范围内,输出结果与理论分析相符;在800~6000Hz的频率范围内,输出信号幅度发生了失真,表明传感器不能工作在此频率范围内。文章最后对所做的工作进行总结,并对将来的研究工作进行了展望。
Petroleum, an important strategic resource, is the basis and safeguards of national economy, social progress, even the country itself. In order to make the petroleum supplies meet the requirements of economic construction, it is important to hunt for high reserves and high-quality new oilfields in the petroleum exploration industry. Seismic prospect method is to survey the geological structures underground or explore the oil fields. Seismic geophone, as the first process in the seismic prospect, decides the quality of the oil fields exploration.
Taking the advantages of integrated optical waveguide device into account, such as high sensitivity, high accuracy, high integration and anti-electro magnetic interference, an integrated optical waveguide acceleration seismic geophone is designed based on Mach-Zehnder (M-Z) interference structure. Firstly, it is utilized the optical waveguide mode theory to design the single-mode structure of lithium niobate ridge waveguide, which accomplishes the structure design of double M-Z interferometer and simulation of the optical field transmission and mode field distribution by FD-BPM; Then, based on the photoelastic effect of lithium niobate crystals, theoretical analysis of the changes of the optical waveguide refractive index and the mode field distribution under stress by acceleration effected, and simulation of the optical waveguide fundamental mode field distribution by different acceleration effected are well established; In addition to mechanics of materials and mechanical vibration principle, the stress on the integrated optical waveguide sensor unit is analyzed, the phase detection sensitivity is calculated as 0.0896rad/(m?s-2), and the working frequency range is 0~1.389×104Hz; Also, it uses the Micro-fabrication technology to fabricate the ridge waveguide in X cut Y propagation lithium niobate substrate by proton exchange technology, and analyzed the etch mechanism in X cut lithium niobate substrate; A dual sensing arm optical fiber M-Z interference structure and sensing probe structure based upon optical fiber of the light and mechanics of materials is designed, and also it calculated the mass of sensing probe is 445g, the elastic cylinder diameter is 27mm, the height is 30mm, the system sensitivity is 366.9rad/g, and the working frequency range is 0~340.7Hz; According to the theoretical design structure, it uses the sensing probe made by the silicone rubber and iron block to complete the all-fiber optical dual sensing arm M-Z interferometer, and measured the arm length difference is about 6.87mm, and the interfere visibility is about 95.8%; It is to build the experimental system and detect different frequencies and different amplitudes of the acceleration vibration signal, these illustrates that there is an output consistent with the theoretical analysis when the vibration frequency between 50~400Hz, whereas there is a significant distortion output beyond 400~6000Hz, so the sensor can not work in this frequency range. At last, it concludes all the research and looks forward the future work.
本论文针对上述背景,利用集成光波导器件高精度、高灵敏度、抗电磁干扰、和集成度高的优点,设计了一种基于Mach-Zehnder(M-Z)干涉结构的集成光波导地震波加速度传感器。首先利用光波导模式理论完成铌酸锂脊形光波导的单模结构设计,结合有限差分光束传播法(FD-BPM)完成双M-Z干涉仪的结构设计,并对光场传输和模场分布进行了仿真;其次利用铌酸锂晶体的光弹效应,理论分析了加速度作用下铌酸锂脊形波导受到应力作用后折射率及模场分布的变化,并对加速度作用下光波导基模的模场分布变化进行仿真;结合材料力学及机械振动原理对集成光波导传感器的传感单元进行受力特性分析,理论计算得到系统的灵敏度为0.0896rad/(m?s-2),工作频率范围是0~1.389×104Hz;通过微细加工技术探索了在X切Y传的铌酸锂基片上制作质子交换脊形波导的工艺,并分析了X切质子交换铌酸锂晶体的腐蚀机理;根据光纤光学及材料力学原理设计了双传感臂的光纤M-Z干涉光路结构及传感探头结构,理论计算得到传感探头中质量块为445g,弹性柱体直径27mm,高度30mm,系统灵敏度为366.9rad/g,工作频率范围是0~340.7Hz;按照理论设计的结构采用硫化硅橡胶及金属铁块制作了传感探头,并完成全光纤双传感臂M-Z干涉仪的制作,经过测量臂长差约为6.87mm,干涉可见度约为95.8%;最后搭建实验系统对不同频率及不同振幅的加速度振动信号进行检测,实验结果显示在50~400Hz的频率范围内,输出结果与理论分析相符;在800~6000Hz的频率范围内,输出信号幅度发生了失真,表明传感器不能工作在此频率范围内。文章最后对所做的工作进行总结,并对将来的研究工作进行了展望。
Petroleum, an important strategic resource, is the basis and safeguards of national economy, social progress, even the country itself. In order to make the petroleum supplies meet the requirements of economic construction, it is important to hunt for high reserves and high-quality new oilfields in the petroleum exploration industry. Seismic prospect method is to survey the geological structures underground or explore the oil fields. Seismic geophone, as the first process in the seismic prospect, decides the quality of the oil fields exploration.
Taking the advantages of integrated optical waveguide device into account, such as high sensitivity, high accuracy, high integration and anti-electro magnetic interference, an integrated optical waveguide acceleration seismic geophone is designed based on Mach-Zehnder (M-Z) interference structure. Firstly, it is utilized the optical waveguide mode theory to design the single-mode structure of lithium niobate ridge waveguide, which accomplishes the structure design of double M-Z interferometer and simulation of the optical field transmission and mode field distribution by FD-BPM; Then, based on the photoelastic effect of lithium niobate crystals, theoretical analysis of the changes of the optical waveguide refractive index and the mode field distribution under stress by acceleration effected, and simulation of the optical waveguide fundamental mode field distribution by different acceleration effected are well established; In addition to mechanics of materials and mechanical vibration principle, the stress on the integrated optical waveguide sensor unit is analyzed, the phase detection sensitivity is calculated as 0.0896rad/(m?s-2), and the working frequency range is 0~1.389×104Hz; Also, it uses the Micro-fabrication technology to fabricate the ridge waveguide in X cut Y propagation lithium niobate substrate by proton exchange technology, and analyzed the etch mechanism in X cut lithium niobate substrate; A dual sensing arm optical fiber M-Z interference structure and sensing probe structure based upon optical fiber of the light and mechanics of materials is designed, and also it calculated the mass of sensing probe is 445g, the elastic cylinder diameter is 27mm, the height is 30mm, the system sensitivity is 366.9rad/g, and the working frequency range is 0~340.7Hz; According to the theoretical design structure, it uses the sensing probe made by the silicone rubber and iron block to complete the all-fiber optical dual sensing arm M-Z interferometer, and measured the arm length difference is about 6.87mm, and the interfere visibility is about 95.8%; It is to build the experimental system and detect different frequencies and different amplitudes of the acceleration vibration signal, these illustrates that there is an output consistent with the theoretical analysis when the vibration frequency between 50~400Hz, whereas there is a significant distortion output beyond 400~6000Hz, so the sensor can not work in this frequency range. At last, it concludes all the research and looks forward the future work.
引文
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[2] Brian Culshaw,John Dakin.光纤传感器,李少慧等译.武汉:华中理工大学出版社,1997
[3]李方泽,刘馥清,王正.工程振动测试与分析.北京:高等教育出版社,1992
[4]王惠文,娄英明,江先进.光纤加速度传感器研究进展.光学技术1997,4:15-20
[5] Kevin E.Burcham, Gregory N.De Brabander and Joseph T.Boyd. Micromachined silicon cantilever beam incorporating an integrated optical waveguide. Proc. SPIE, 1992, 1793: 12
[6] Eric Ollier, Paul Philippe, Claude Chabrol, et al. Micro-Opto-Mechanical Vibration Sensor Integrated on Silicon. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1999, 17(1): 26-29
[7] A. Llobera, J. A. Plaza, I. Salinas, et al. Characterization and Passivation Effects of an Optical Accelerometer Based on Antiresonant Waveguides. IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16(1): 233-235
[8] Jose A. Plaza, Andreu Llobera, Carlos Dominguez, et al. BESOI-Based Integrated Optical Silicon Accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13(2): 355-364
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