数字图象处理技术在平面等倾干涉测量中的应用
摘要
在等倾干涉测量中，不断变化的明暗相交的圆环形干涉条纹，反映了被测件的平面度信息，因此对干涉条纹的变化进行记录和分析显得至关重要。但是由于传统测试系统的局限性，使得使用平面等倾干涉仪进行测量的过程烦琐，从而导致效率低下，而且测量精度不高。随着近代电子技术和计算机图像处理技术的发展，把新兴的图像传感技术、计算机控制和数字图像处理技术相结合是新一代自动化、高精度、高效率等倾干涉测试系统的最佳解决方案。
本课题主要研究了应用数字图像处理技术对等倾干涉测量系统进行改进。该系统利用CCD摄像机实时获取被测件的干涉圆环信息，然后用数字图像处理技术对干涉图像进行滤波平滑、条纹细化、中心条纹提取、干涉环直径测量等操作。通过详实周密的数据处理，实现了测量结果的优化。针对图像测量系统普遍存在的测量误差，本论文还探讨了CCD等倾干涉测试系统的测量误差产生的原因和消除的途径。
通过大量的测试实验证明，CCD等倾干涉测试系统能够应用数字图像处理技术对等倾干涉条纹进行实时采集和测量，提高了平面度测量的精确度；提高了工作效率，降低了劳动强度，具有实用推广价值。
In the Equal Inclination Interference (EIIT) measurement, the flatness characteristics of detected optics can be extracted from its fringe in the interferogram, which is white alternating with black. It is important to record and analyze the interference fringes. But the traditional measuring process was very onerous and weary because the instrument has limitation. It resulted in lowly efficiency and lowly accuracy. With the development of modern electronic technology and computer and image processing technique, the method of combining with the technique based on image sensor, computer control, image processing is the best solution of the Equal Inclination Interference measuring system which combining with full-automation, high precision and high efficiency.
This paper puts forward a novel method of Equal Inclination Interference measurement by applying image processing technique. The
system, based on the theory of EIIT, can be applied to grasp the changing
fringe information through the CCD camera. The data processing of the interference fringe consists of image smoothing, frame thinning, fringe center extracting and fringe diameter measurement. Through the full and accurate data processing we present the measurement result. As for the image calibration and measuring system always have measurement errors, this paper also analyzes the reason of errors in the CCD EIIT measurement and presents the method of erasing errors.
A great deal of measuring experiments have proved that CCD EIIT measuring system is the guarantee of automatic measuring of interference fringe in real time. Based on image processing technique, automatic real-time CCD EIIT measuring system is useful in metrology department for the high-precision flatness standard unit, which is helpful to control the product cost for enterprise with practical value.
本课题主要研究了应用数字图像处理技术对等倾干涉测量系统进行改进。该系统利用CCD摄像机实时获取被测件的干涉圆环信息，然后用数字图像处理技术对干涉图像进行滤波平滑、条纹细化、中心条纹提取、干涉环直径测量等操作。通过详实周密的数据处理，实现了测量结果的优化。针对图像测量系统普遍存在的测量误差，本论文还探讨了CCD等倾干涉测试系统的测量误差产生的原因和消除的途径。
通过大量的测试实验证明，CCD等倾干涉测试系统能够应用数字图像处理技术对等倾干涉条纹进行实时采集和测量，提高了平面度测量的精确度；提高了工作效率，降低了劳动强度，具有实用推广价值。
In the Equal Inclination Interference (EIIT) measurement, the flatness characteristics of detected optics can be extracted from its fringe in the interferogram, which is white alternating with black. It is important to record and analyze the interference fringes. But the traditional measuring process was very onerous and weary because the instrument has limitation. It resulted in lowly efficiency and lowly accuracy. With the development of modern electronic technology and computer and image processing technique, the method of combining with the technique based on image sensor, computer control, image processing is the best solution of the Equal Inclination Interference measuring system which combining with full-automation, high precision and high efficiency.
This paper puts forward a novel method of Equal Inclination Interference measurement by applying image processing technique. The
system, based on the theory of EIIT, can be applied to grasp the changing
fringe information through the CCD camera. The data processing of the interference fringe consists of image smoothing, frame thinning, fringe center extracting and fringe diameter measurement. Through the full and accurate data processing we present the measurement result. As for the image calibration and measuring system always have measurement errors, this paper also analyzes the reason of errors in the CCD EIIT measurement and presents the method of erasing errors.
A great deal of measuring experiments have proved that CCD EIIT measuring system is the guarantee of automatic measuring of interference fringe in real time. Based on image processing technique, automatic real-time CCD EIIT measuring system is useful in metrology department for the high-precision flatness standard unit, which is helpful to control the product cost for enterprise with practical value.
引文
[1]．雷玉堂．光电检测技术．北京：中国计量出版社，1997
[2]．童竞主编．几何量测量．机械工业出版社，1988
[3]．董文武．一种使用线阵CCD实现高精度二维位置测量的方法．光学技术，1998／(5)：42～45
[4]．耿春明．基于CCD和PC机的高精度刚度检测系统的研制．敏通科技．2001，14，10
[5]．孙晓军．线阵CCD在圆柱体表面检测系统中的应用．敏通科技．2001，14，26
[6]．谢兴．CCD摄像技术在大气光学传输特性监测研究上的应用．敏通科技．2001，14，34
[7]．王庆有．CCD应用技术．天津大学出版社．2000
[8]．李承业等．干涉仪的理论基础及应用．技术标准出版社．1982年；
[9]．曾延安．CCD在光谱分析系统中的应用研究．光学技术，1998(4) 3～4
[10]．(美)．T．帕夫利迪斯．计算机图形显示和图像处理的算法。科学出版社．1987年；
[11]．(美)．Eric Brierley．Anthony Prince．David Rinaldi．Visual Basic 6开发人指南．机械工业出版社．1996年；
[12]．阮秋琦．数字图像处理学．电子工业出版社．2001年；
[13]．国家质量技术监督局．JJF1059-1999．中华人民共和国国家计量技术规范——测量不确定度评定与表示．中国计量科学研究院．1999
[14]．中国计量科学研究院．JJ740-1991．研磨面平尺检定规程．中国计量出版社．1991
[15]．吴东楼．干涉条纹的处理方法研究[J]．光学学报，1999，19(1)：45—49．
[16]．尹志武，程维明，陈明仪．条纹图的图象处理方法[J]．光学精密工程，1999，7 (1)：51—58．
[17]．鄢静舟．干涉图特征信息自动采集方法[J]．光学技术，2000，26(1)：71—75．
[18]．周恕义等，采用图像处理技术的高精度干涉计量系统，仪器仪表学报，1993，Vol．14，No．1，81～84
[19]．张永林等，干涉条纹间距的自动检测，光学工程，1989，6，33～40
[20]．金观昌．计算机辅助光学测量．北京：清华大学出版社，1997：70～76
[21]．杨丽凤，韩冀皖，李元宗，面阵CCD高精度测量技术的应用，太原理工大学学报，2001，32(5)：455～458
[22]．王洪，王石刚，薛联，秦岚，基于平面等倾干涉原理的平面度视觉测量系统，重庆大学学报，2001，24 (3)：5～8
[23]．道克刚．计算机图像检测在干涉测量中的应用[J]．现代计量测试，1999，
(3)：17～22
[24]．周恕义，邬敏贤，金国藩．采用图像处理技术的高精度干涉计量系统[J]．仪器仪表学报，1993，14(1)：81～84
[25]．李介谷．计算机视觉的理论与应用[M]．上海：上海交通大学出版社，1991
[26]．肖国宏，黄丽清．用计算机细分干涉条纹技术的研究[J]．激光杂志，1999，24(1)：53
[27]．王文生．用泰曼干涉仪实时自动测厚度变化[J]．仪器仪表学报，1989，10(1)：43～45
[28]．章毓晋．图像理解与计算机视觉．北京．清华大学出版社．2000
[29]．章毓晋．图像处理和分析．北京．清华大学出版社．1999
[30]. Junko Yoshida. Race is on to Merge Image Processing, CCD Sensor. EE Time, 2000, 10:1-14
[31]. Chappell Brown. Low-end cameras turn to CCD Image Sensor. EE Time, 2001,1:77
[32]. Cover Story. Digital Still Camera Makers Favor Low-end Products. Electronics, 2000,12:270-276
[33]. Junko Yoshida. Eyeing i-mode, Phone Vendors go for Multimedia. EE Timer, 2001,3:4
[34]. Wang Qing you. Study on vibration measurement with the use of CCD. SPIE, 2000, (3558): 339～343
[35]. Li Kai ming. Study on measuring instant taneaus Planar motion of rigid body with a linear CCD. SPIE, 2001, (3558): 344～347
[36]. Hamilton. D. J and W. G. Howard. Basic Intearnted circuld Engineering. New York; MCGR. w—Hill. 2001
[37]. Funnell W R J. Image processing applied to the interactive analysis interferometric fringes. Appl Opt, 1981, 20(18): 3245～3250
[38]. Cheng Weiming, et al. Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST). Proc SPIE, 2860: 321～328
[39]. Chen Ming Yi, et al. Gaussian threshold for high-fidelity of digital wavefront reconstruction. Proc SPIE, 1993, 2003:348～352
[40]. Chert Hui, et al. A fast contour tracing mathing thinning algorithm. Journal of Electronics, 1996, 18(4):432～434
[41]. Schemn J B. Fringe Pattern Recognition and Interpolation Using Nonliner Regression Analysis[J].Applied Optics, 1983, 22(18):2850—2853.
[42]. Hilditch C J. Linear skeletons from square cupboards, Machine
Intelligence Ⅳ, B. Meltzer, Edinburgh: University Press, 403
[43]. L O Gorman. K K thinning. Computer Used in Graph and Image Process, 1990,51,195
[44]. Yatagai, et al. Automatic fringe analysis using digital image processing techniques. Opt Eng, 1982,21(3): 423～426
[45]. Peter W H, Ranson W F. Digital imaging technique in experimental stress analysis. Opt Eng, 1982,21(3):427～431
[46]. Ennos A E, Robinson D W, Williams D C. Automatic fringe analysis in holographic interferometry. Optical Acta, 1985,32(2):135～145
[47]. Reid G T. Automatic fringe pattern analysis: A review. Optics and lasers in engineering, 1986,7(1):37～68
[48]. Yatagai T. Automatic fringe analysis techniques in Japan. Optics and Lasers in Engineering, 1991, 15(2):79～91
[49]. David W R, Graeme T R. Interferogram analysis. London IOP Publishing, 1993:1～93
[50]. Ramesh K, Mangal S K. Data acquisition techniques in digital photoelasticity: A review. Optics and Lasers in Engineering, 1998,30(1):53～76
[51]. Gamal. AEI. Digital pixel image sensors [C]. ISL Industrial A filates Meeting. 1999:1-5.
[2]．童竞主编．几何量测量．机械工业出版社，1988
[3]．董文武．一种使用线阵CCD实现高精度二维位置测量的方法．光学技术，1998／(5)：42～45
[4]．耿春明．基于CCD和PC机的高精度刚度检测系统的研制．敏通科技．2001，14，10
[5]．孙晓军．线阵CCD在圆柱体表面检测系统中的应用．敏通科技．2001，14，26
[6]．谢兴．CCD摄像技术在大气光学传输特性监测研究上的应用．敏通科技．2001，14，34
[7]．王庆有．CCD应用技术．天津大学出版社．2000
[8]．李承业等．干涉仪的理论基础及应用．技术标准出版社．1982年；
[9]．曾延安．CCD在光谱分析系统中的应用研究．光学技术，1998(4) 3～4
[10]．(美)．T．帕夫利迪斯．计算机图形显示和图像处理的算法。科学出版社．1987年；
[11]．(美)．Eric Brierley．Anthony Prince．David Rinaldi．Visual Basic 6开发人指南．机械工业出版社．1996年；
[12]．阮秋琦．数字图像处理学．电子工业出版社．2001年；
[13]．国家质量技术监督局．JJF1059-1999．中华人民共和国国家计量技术规范——测量不确定度评定与表示．中国计量科学研究院．1999
[14]．中国计量科学研究院．JJ740-1991．研磨面平尺检定规程．中国计量出版社．1991
[15]．吴东楼．干涉条纹的处理方法研究[J]．光学学报，1999，19(1)：45—49．
[16]．尹志武，程维明，陈明仪．条纹图的图象处理方法[J]．光学精密工程，1999，7 (1)：51—58．
[17]．鄢静舟．干涉图特征信息自动采集方法[J]．光学技术，2000，26(1)：71—75．
[18]．周恕义等，采用图像处理技术的高精度干涉计量系统，仪器仪表学报，1993，Vol．14，No．1，81～84
[19]．张永林等，干涉条纹间距的自动检测，光学工程，1989，6，33～40
[20]．金观昌．计算机辅助光学测量．北京：清华大学出版社，1997：70～76
[21]．杨丽凤，韩冀皖，李元宗，面阵CCD高精度测量技术的应用，太原理工大学学报，2001，32(5)：455～458
[22]．王洪，王石刚，薛联，秦岚，基于平面等倾干涉原理的平面度视觉测量系统，重庆大学学报，2001，24 (3)：5～8
[23]．道克刚．计算机图像检测在干涉测量中的应用[J]．现代计量测试，1999，
(3)：17～22
[24]．周恕义，邬敏贤，金国藩．采用图像处理技术的高精度干涉计量系统[J]．仪器仪表学报，1993，14(1)：81～84
[25]．李介谷．计算机视觉的理论与应用[M]．上海：上海交通大学出版社，1991
[26]．肖国宏，黄丽清．用计算机细分干涉条纹技术的研究[J]．激光杂志，1999，24(1)：53
[27]．王文生．用泰曼干涉仪实时自动测厚度变化[J]．仪器仪表学报，1989，10(1)：43～45
[28]．章毓晋．图像理解与计算机视觉．北京．清华大学出版社．2000
[29]．章毓晋．图像处理和分析．北京．清华大学出版社．1999
[30]. Junko Yoshida. Race is on to Merge Image Processing, CCD Sensor. EE Time, 2000, 10:1-14
[31]. Chappell Brown. Low-end cameras turn to CCD Image Sensor. EE Time, 2001,1:77
[32]. Cover Story. Digital Still Camera Makers Favor Low-end Products. Electronics, 2000,12:270-276
[33]. Junko Yoshida. Eyeing i-mode, Phone Vendors go for Multimedia. EE Timer, 2001,3:4
[34]. Wang Qing you. Study on vibration measurement with the use of CCD. SPIE, 2000, (3558): 339～343
[35]. Li Kai ming. Study on measuring instant taneaus Planar motion of rigid body with a linear CCD. SPIE, 2001, (3558): 344～347
[36]. Hamilton. D. J and W. G. Howard. Basic Intearnted circuld Engineering. New York; MCGR. w—Hill. 2001
[37]. Funnell W R J. Image processing applied to the interactive analysis interferometric fringes. Appl Opt, 1981, 20(18): 3245～3250
[38]. Cheng Weiming, et al. Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST). Proc SPIE, 2860: 321～328
[39]. Chen Ming Yi, et al. Gaussian threshold for high-fidelity of digital wavefront reconstruction. Proc SPIE, 1993, 2003:348～352
[40]. Chert Hui, et al. A fast contour tracing mathing thinning algorithm. Journal of Electronics, 1996, 18(4):432～434
[41]. Schemn J B. Fringe Pattern Recognition and Interpolation Using Nonliner Regression Analysis[J].Applied Optics, 1983, 22(18):2850—2853.
[42]. Hilditch C J. Linear skeletons from square cupboards, Machine
Intelligence Ⅳ, B. Meltzer, Edinburgh: University Press, 403
[43]. L O Gorman. K K thinning. Computer Used in Graph and Image Process, 1990,51,195
[44]. Yatagai, et al. Automatic fringe analysis using digital image processing techniques. Opt Eng, 1982,21(3): 423～426
[45]. Peter W H, Ranson W F. Digital imaging technique in experimental stress analysis. Opt Eng, 1982,21(3):427～431
[46]. Ennos A E, Robinson D W, Williams D C. Automatic fringe analysis in holographic interferometry. Optical Acta, 1985,32(2):135～145
[47]. Reid G T. Automatic fringe pattern analysis: A review. Optics and lasers in engineering, 1986,7(1):37～68
[48]. Yatagai T. Automatic fringe analysis techniques in Japan. Optics and Lasers in Engineering, 1991, 15(2):79～91
[49]. David W R, Graeme T R. Interferogram analysis. London IOP Publishing, 1993:1～93
[50]. Ramesh K, Mangal S K. Data acquisition techniques in digital photoelasticity: A review. Optics and Lasers in Engineering, 1998,30(1):53～76
[51]. Gamal. AEI. Digital pixel image sensors [C]. ISL Industrial A filates Meeting. 1999:1-5.