高速精密气浮定位平台设计方法
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摘要
本文提出了一种面向IC封装的高速精密气浮定位平台。深入研究了以小孔节流静压气浮导轨支承高速精密定位平台的静态特性和设计方法。本文主要研究内容和研究成果可以概括为以下几个方面:
根据流体力学连续性方程和运动方程,研究了小孔节流静压气浮导轨的特性,分析了小孔节流器孔径和气膜厚度与静压气浮导轨承载能力、刚度和耗气量的内在关系,给出了静压气浮导轨结构设计方法。
通过模拟仿真给出了静压气浮导轨的一组优化参数,并校核了所设计的高速精密气浮平台的静态性能。
提出了一种基于音圈电机直接驱动,静压气浮导轨支承,静压气浮解耦的高速精密定位平台。该方案应用了音圈电机直接驱动,消除了现有精密定位平台常用的伺服电机-滚动丝杠-螺母机构形式存在返程间隙和摩擦的问题;应用了静压气浮导轨支承,消除了滚动导轨支承存在摩擦的问题;应用气浮解耦机构将驱动电机布置在基座上,减小了运动惯量。这些措施为高速精密定位平台性能的提高提供了可能。
设计和绘制了高速精密气浮定位平台整机装配图及零件图。以上研究丰富了高速精密气浮定位平台的设计和制造理论,具有较高的理论意义和工程应用价值,为高速精密气浮定位平台的制造和进一步研究奠定了良好的基础。
A high-speed and high-precision air-supported positioning table for IC packaging is presented in this dissertation. The static characteristic and the design method of the positioning table which supported by aerostatic guide using orifice restriction are studied intensively. The contents and outcomes of the study in the dissertation can be summarized as follows:
On the basis of the kinetics and continuous equations of the fluid mechanics, the law is studied about the static characteristics of the aerostatic guide using orifice restriction. The influence of the orifice and the thickness of the air film on the carrying capacity, rigidity and air consumption has been analyzed. The structure design method of the aerostatic guide is presented.
A group of optimized parameters about the aerostatic guide is presented, and the static characteristics of the positioning table are verified.
A high-speed and high-precision air-supported positioning table which is driven by voice coil actuators, supported and decoupled by aerostatic guide is presented. It applies voice coil actuators to replace the formal servo motors. This eliminates the backlash and friction between the lead screw and nut. It applies the aerostatic guide to eliminate friction. The two voice coil actuators are mounted on the base by using the air-supported decouple structure, so the inertia of the table can be reduced. These meanings make the precision positioning table enhance the performance possible.
The structure design and the blueprint of the high-speed and high-precision air-supported positioning table have been completed.
The achievements stated in this dissertation enrich the theory of the design and manufacture of the high-speed and high-precision air-supported positioning table. The study has important engineering significance and theoretical significance, and it builds solid foundation for the manufacture and advanced research about the high-speed and high-precision air-supported positioning table.
根据流体力学连续性方程和运动方程,研究了小孔节流静压气浮导轨的特性,分析了小孔节流器孔径和气膜厚度与静压气浮导轨承载能力、刚度和耗气量的内在关系,给出了静压气浮导轨结构设计方法。
通过模拟仿真给出了静压气浮导轨的一组优化参数,并校核了所设计的高速精密气浮平台的静态性能。
提出了一种基于音圈电机直接驱动,静压气浮导轨支承,静压气浮解耦的高速精密定位平台。该方案应用了音圈电机直接驱动,消除了现有精密定位平台常用的伺服电机-滚动丝杠-螺母机构形式存在返程间隙和摩擦的问题;应用了静压气浮导轨支承,消除了滚动导轨支承存在摩擦的问题;应用气浮解耦机构将驱动电机布置在基座上,减小了运动惯量。这些措施为高速精密定位平台性能的提高提供了可能。
设计和绘制了高速精密气浮定位平台整机装配图及零件图。以上研究丰富了高速精密气浮定位平台的设计和制造理论,具有较高的理论意义和工程应用价值,为高速精密气浮定位平台的制造和进一步研究奠定了良好的基础。
A high-speed and high-precision air-supported positioning table for IC packaging is presented in this dissertation. The static characteristic and the design method of the positioning table which supported by aerostatic guide using orifice restriction are studied intensively. The contents and outcomes of the study in the dissertation can be summarized as follows:
On the basis of the kinetics and continuous equations of the fluid mechanics, the law is studied about the static characteristics of the aerostatic guide using orifice restriction. The influence of the orifice and the thickness of the air film on the carrying capacity, rigidity and air consumption has been analyzed. The structure design method of the aerostatic guide is presented.
A group of optimized parameters about the aerostatic guide is presented, and the static characteristics of the positioning table are verified.
A high-speed and high-precision air-supported positioning table which is driven by voice coil actuators, supported and decoupled by aerostatic guide is presented. It applies voice coil actuators to replace the formal servo motors. This eliminates the backlash and friction between the lead screw and nut. It applies the aerostatic guide to eliminate friction. The two voice coil actuators are mounted on the base by using the air-supported decouple structure, so the inertia of the table can be reduced. These meanings make the precision positioning table enhance the performance possible.
The structure design and the blueprint of the high-speed and high-precision air-supported positioning table have been completed.
The achievements stated in this dissertation enrich the theory of the design and manufacture of the high-speed and high-precision air-supported positioning table. The study has important engineering significance and theoretical significance, and it builds solid foundation for the manufacture and advanced research about the high-speed and high-precision air-supported positioning table.
引文
[1]丁汉,朱利民,林忠钦,面向芯片封装的高加速度运动系统的精确定位和操作,自然科学进展,2003,13(6):568~574
[2]成立,李春明,王振宇等,IC产业链中的新技术应用与产业发展对策,半导体技术,2004,29(6):57~63
[3]王宏,微电子机械系统(MEMS)发展研究,微处理机,2003,(3):4~7
[4] M.F. Caggiano, E. Barkley, M. Sun, Electrical modeling of the chip scale ball grid array package at radio frequencies, Micoelectronics Journal, 2000, (31):701~709
[5]吴懿平,丁汉,吴丰顺等,电子制造技术基础,北京:机械工业出版社,2006:57~95
[6]李元升,引线键合机工艺技术分析,电子工业专用设备,2004,33 (3):78~81
[7]雷源忠,雒建斌,丁汉等,先进电子制造忠的重要科学问题,中国科学基金会,2002,(4):204~209
[8] R. Kyomasu, XY table for a semiconductor manufacturing apparatus, U.S.Patent, 6727666, 2004
[9] K. Yanagisawa, Two dimensional drive system, U.S.Patent, 6327929, 2001
[10] M. Okada, X-Y table, U.S.Patent, 5669600, 1997
[11] W. Chen, Driving means to position a load, U.S.Patent, 6983703, 2006
[12]冯晓梅,面向IC封装的两自由度高速定位系统研究:[博士学位论文],天津:天津大学,2005
[13]李树森,气体润滑轴承技术的应用及发展趋势,润滑与密封,1999,(2):9~10
[14]王云飞,气体润滑理论与气体轴承设计,北京:机械工业出版社,1997:2~14
[15]王元勋,气体润滑轴承的研究与发展,湖北工学院学报,1994,9(3):155~15
[16]丁振乾,流体静压支承设计,上海:上海科技出版社,1986:110~122
[17]朱煜等,步进投影光刻机双台轮换曝光超精密定位硅片台系统,中国发明专利,03156436.4,2003
[18]丁汉等,气浮XY两座标平面运动平台,中国发明专利,200410017014.0,2004
[19]张胜泉,面向IC封装的高速定位系统设计与研究:[硕士学位论文],天津:天津大学,2007
[20] W. Kim, D.L. Trumper, High-precision magnetic levitation stage for photo- lithography, Precision Engineering, 1999, 22(2): 66~77
[21] K. Jung, Y. Baek, Precision stage using a non-contact planar actuator based on magnetic suspension technology, Mechatronics, 2003, 13(8): 981~999
[22]十合晋一,气体轴承-设计、制作与应用(韩焕臣),北京:宇航出版社,1988:57~60
[23]刘暾,刘育华,陈世杰,静压气体润滑,哈尔滨:哈尔滨工业大学出版社,1990:51~78
[24]郭力,空气轴承的原理与应用,磨床与磨削,2000,(2):67~70
[25]张鸣,朱煜,段广洪,超精密气浮工件台的微振及其抑制,设计与研究,2005,(11):47~49
[26] J.W. Powell,空气静压轴承设计(丁维刚、林向群等),北京:国防工业出版社,1978:166~178
[27]杨志永,高速静电涡轮系统稳定性理论及结构动态特性分析:[博士学位论文],天津:天津大学,2000
[28]许毅,气浮主轴动静压特性分析及结构设计:[硕士学位论文],天津:天津大学,2005
[29]张恩龙,李锻能,马平,气体静压轴承技术及其在电主轴上的应用,机床与液压,2005,(5):13~15
[30]陈志凌,任建岳,空气静压导轨中几种常用静压垫结构特性的比较,机械设计与制造,2004,31(11):10~12
[31] S. Yoshimoto, J. Tamura, T. Nakamura, Dynamic tilt characteristics of aerostatic rectangular double-pad thrust bearings with compound restrictors, Tribology International, 1999, 32(12): 731~738
[32]贺大兴,周祖德,超精密机床技术状况与科技内涵,武汉理工大学学报?信息与管理工程版,2005,27(3):75~77
[33]陶家生,闭式双排节流孔矩形气浮导轨的计算方法(一),光学精密工程,1996,4(2):31~35
[34]陶家生,闭式双排节流孔矩形气浮导轨的计算方法(二),光学精密工程,1997,5(1):55~62
[35]吴起,径向空气静压轴承静态工作特性的数值分析,航空精密制造技术,1984,(2):7~9
[36]孙西芝,陈时锦,程凯,空气静压导轨静态性能的解析计算及分析,机械设计与制造,2005,(1):40~42
[37]齐乃明,陶加生,关英姿等,气浮导轨误差均化作用的探讨,1997,29(1):61~63
[38]荣烈润,超精密加工用的空气静压导轨,上海机床,1995,(4):24~25
[39]王贵林,李圣怡,粟时平,基于超精密应用的高刚度高阻尼空气静压导轨的研究,精密加工,2001,37(6):1~5
[40]张大卫,冯晓梅,音圈电机的技术原理,中北大学学报(自然科学版),2006,27(3):224~228
[41]庄夔,柴青,空气静压导轨的精度研究,光学机械,1989,(1):1~7
[42]庄夔,薛洪俊,柴青,空气静压导轨的应用研究,光学精密工程,1995,3(3):73~77
[43]候予,王秉琛,熊联友等,提高小孔供气静压气体径向轴承稳定性方法的探讨,润滑与密封,2004,(2):17~19
[44]候予,熊联友,王秉琛等,橡胶圈加稳切向小孔供气径向轴承的试验研究,润滑与密封,2004,(5):39~41
[45]候予,孙烨,黑丽民等,橡胶圈加稳径向气体轴承偏心率和偏位角的特性研究,润滑与密封,2005,(2):14~17
[2]成立,李春明,王振宇等,IC产业链中的新技术应用与产业发展对策,半导体技术,2004,29(6):57~63
[3]王宏,微电子机械系统(MEMS)发展研究,微处理机,2003,(3):4~7
[4] M.F. Caggiano, E. Barkley, M. Sun, Electrical modeling of the chip scale ball grid array package at radio frequencies, Micoelectronics Journal, 2000, (31):701~709
[5]吴懿平,丁汉,吴丰顺等,电子制造技术基础,北京:机械工业出版社,2006:57~95
[6]李元升,引线键合机工艺技术分析,电子工业专用设备,2004,33 (3):78~81
[7]雷源忠,雒建斌,丁汉等,先进电子制造忠的重要科学问题,中国科学基金会,2002,(4):204~209
[8] R. Kyomasu, XY table for a semiconductor manufacturing apparatus, U.S.Patent, 6727666, 2004
[9] K. Yanagisawa, Two dimensional drive system, U.S.Patent, 6327929, 2001
[10] M. Okada, X-Y table, U.S.Patent, 5669600, 1997
[11] W. Chen, Driving means to position a load, U.S.Patent, 6983703, 2006
[12]冯晓梅,面向IC封装的两自由度高速定位系统研究:[博士学位论文],天津:天津大学,2005
[13]李树森,气体润滑轴承技术的应用及发展趋势,润滑与密封,1999,(2):9~10
[14]王云飞,气体润滑理论与气体轴承设计,北京:机械工业出版社,1997:2~14
[15]王元勋,气体润滑轴承的研究与发展,湖北工学院学报,1994,9(3):155~15
[16]丁振乾,流体静压支承设计,上海:上海科技出版社,1986:110~122
[17]朱煜等,步进投影光刻机双台轮换曝光超精密定位硅片台系统,中国发明专利,03156436.4,2003
[18]丁汉等,气浮XY两座标平面运动平台,中国发明专利,200410017014.0,2004
[19]张胜泉,面向IC封装的高速定位系统设计与研究:[硕士学位论文],天津:天津大学,2007
[20] W. Kim, D.L. Trumper, High-precision magnetic levitation stage for photo- lithography, Precision Engineering, 1999, 22(2): 66~77
[21] K. Jung, Y. Baek, Precision stage using a non-contact planar actuator based on magnetic suspension technology, Mechatronics, 2003, 13(8): 981~999
[22]十合晋一,气体轴承-设计、制作与应用(韩焕臣),北京:宇航出版社,1988:57~60
[23]刘暾,刘育华,陈世杰,静压气体润滑,哈尔滨:哈尔滨工业大学出版社,1990:51~78
[24]郭力,空气轴承的原理与应用,磨床与磨削,2000,(2):67~70
[25]张鸣,朱煜,段广洪,超精密气浮工件台的微振及其抑制,设计与研究,2005,(11):47~49
[26] J.W. Powell,空气静压轴承设计(丁维刚、林向群等),北京:国防工业出版社,1978:166~178
[27]杨志永,高速静电涡轮系统稳定性理论及结构动态特性分析:[博士学位论文],天津:天津大学,2000
[28]许毅,气浮主轴动静压特性分析及结构设计:[硕士学位论文],天津:天津大学,2005
[29]张恩龙,李锻能,马平,气体静压轴承技术及其在电主轴上的应用,机床与液压,2005,(5):13~15
[30]陈志凌,任建岳,空气静压导轨中几种常用静压垫结构特性的比较,机械设计与制造,2004,31(11):10~12
[31] S. Yoshimoto, J. Tamura, T. Nakamura, Dynamic tilt characteristics of aerostatic rectangular double-pad thrust bearings with compound restrictors, Tribology International, 1999, 32(12): 731~738
[32]贺大兴,周祖德,超精密机床技术状况与科技内涵,武汉理工大学学报?信息与管理工程版,2005,27(3):75~77
[33]陶家生,闭式双排节流孔矩形气浮导轨的计算方法(一),光学精密工程,1996,4(2):31~35
[34]陶家生,闭式双排节流孔矩形气浮导轨的计算方法(二),光学精密工程,1997,5(1):55~62
[35]吴起,径向空气静压轴承静态工作特性的数值分析,航空精密制造技术,1984,(2):7~9
[36]孙西芝,陈时锦,程凯,空气静压导轨静态性能的解析计算及分析,机械设计与制造,2005,(1):40~42
[37]齐乃明,陶加生,关英姿等,气浮导轨误差均化作用的探讨,1997,29(1):61~63
[38]荣烈润,超精密加工用的空气静压导轨,上海机床,1995,(4):24~25
[39]王贵林,李圣怡,粟时平,基于超精密应用的高刚度高阻尼空气静压导轨的研究,精密加工,2001,37(6):1~5
[40]张大卫,冯晓梅,音圈电机的技术原理,中北大学学报(自然科学版),2006,27(3):224~228
[41]庄夔,柴青,空气静压导轨的精度研究,光学机械,1989,(1):1~7
[42]庄夔,薛洪俊,柴青,空气静压导轨的应用研究,光学精密工程,1995,3(3):73~77
[43]候予,王秉琛,熊联友等,提高小孔供气静压气体径向轴承稳定性方法的探讨,润滑与密封,2004,(2):17~19
[44]候予,熊联友,王秉琛等,橡胶圈加稳切向小孔供气径向轴承的试验研究,润滑与密封,2004,(5):39~41
[45]候予,孙烨,黑丽民等,橡胶圈加稳径向气体轴承偏心率和偏位角的特性研究,润滑与密封,2005,(2):14~17