异端类型三坐标测量机结构原理及误差修正技术研究
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摘要
三坐标测量机是一种高效率的三维测量仪器，它集成了机械、光学、电子、计算机等技术。随着现代制造业的发展，MEMS器件的出现对测量机提出更高的精度要求。本文对一台用于生产现场的大量程低精度要求的悬臂式坐标测量机，和一台实验室环境下的新型小行程纳米级精度的坐标测量机进行了研究，围绕这两种不同类型的三坐标测量机的结构布局、误差分析及误差修正问题而展开。
悬臂式测量机为传统结构，用于工字钢结晶器内腔现场测量，测量范围为600×600×800mm。本文详细分析了该测量机的各主要误差源，对常用的三坐标测量机21项几何误差修正模型加以改进，增加光栅零位修正量和长悬臂非刚性修正量，使用齐次坐标转换理论建立了测量机的机构误差修正模型。使用双频激光干涉仪、激光跟踪仪对测量机误差进行了分离，修正后的测量结果表明，测量机的最大位移误差由原来最大600μm降低到50μm。
对国内外现有的纳米级精度三坐标测量机进行研究后，总结获得影响测量精度的一些关键因素，在此基础上提出了三轴测量线垂直共点、x-y导轨导向面与测量面三面共面、测点与三面重合的纳米三坐标测量机“331”结构构建原则。这种结构可以有效消除三维运动系统中阿贝误差的影响，降低导轨运动直线度误差对三维运动台定位精度的影响。
文章详细介绍了一台基于“331”原则的纳米三坐标测量机，测量范围为50×50×50mm，各轴激光干涉仪测长的分辨率为1nm，纳米三维测头分辨率为1nm，适用于微器件和小尺寸量的测量。测量机三维工作台使用低热膨胀系数的铟钢作为主体材料，x、y轴采用了共平面、对称式设计。文中创新性的提出了一种力支撑点可跟随工作台沿x-y二维游动的力平衡系统，该结构能有效克服因工作台三维运动而导致自身作用力无法平衡的问题，可保证测量机各关键部件力变形较小，降低电机驱动阻力。在装调完成后，测量机各轴导轨的直线度误差在±1u以内，角运动误差均在30角秒以内。
误差建模和误差修正是纳米坐标测量机研制的关键技术。本文首先使用现代精度理论分析了纳米测量机的误差影响因素，推导获得误差修正模型。误差模型的分析结果表明，x、y导轨的不完善性并不会对测量带来影响，测量机的主要误差项为激光器测长误差和反射镜的垂直度与平面度误差。然后使用激光干涉仪和几何量标准件对测量机的各项误差进行了分离，使用插值算法计算获得误差修正函数，并建立了纳米测量机z轴基于三次样条插值方法的三维误差模型。在完成插值修正后，使用激光干涉仪和标准件对修正结果进行了检验，测量结果表明：测量机沿对角线的最大位移误差由修正前的3500nm降低到150nm以内；台阶高度和量块长度测量的最大偏差小于100nm，标准差小于30nm。
CMM is a kind of efficient three-dimensional measuring instrument, which integratesmechanical, optical, electronic, computer and other technology. With the development of modernmanufacturing, the emergence of MEMS devices require the higher accuracy on the measuringmachines. In this paper, a cantilever-type coordinate measuring machine for the production site witha large number of range and low accuracy requirements and a coordinate measuring machine withsmall trip nanoscale precision under the laboratory environment was studied. The main contents ofthis thesis are revolving around structure and layout, error analysis and error correction.
This cantilever measuring machine has a traditional structure which was designed formeasuring continuous casting mold and it has a measuring range of600×600×800mm. In this paper,a self-designed cantilever Coordinate Measuring Machine(CMM) for measuring continuous castingmold was studied, main errors sources which have impact on measuring accuracy of measuringmachine were analyzed. The geometric error modal was founded by the theory of homogeneouscoordinate, which include non-rigid error compensation. Laser interferometer and laser tracker wereused to separate each error, then these errors were compensated after be calculated. Measured resultsdemonstrated that, when measuring machine move along the diagonal of measuring space, themaximum displacement error reduce to50μm from600μm after compensation.
Nano Coordinate Measuring Machine both at home and abroad were researched and analyzed,and then some of the key factors that affect the measurement accuracy were summed up. On thisbasis, the "331" principle for Nano-CMM was put forth: Three measuring line intersect to one point;x、y plane of guide overlap with measuring plane; The intersection point of three measuring lines ison the measuring plane. This type of distribution can eliminate the influence of Abbe error fromprinciple and lower effect that rails’ movement errors bring to working table.
This paper introduces a Nano-CMM, the structure layout of it is based on the "331"construction principles. The machine has a measuring range of50×50×50mm, and the resolution is1nm, apply to the measurement of micro-devices and thin size. Measuring machine table used invarsteel with low thermal expansion coefficient as the main material. The x and y axis of workbenchtakes coplanar moving platform and symmetrical design. A special force balance system was putforward in this paper, the force support points of it can move with workbench along the x and ydirection. This structure can effectively balance the internal force of the measuring machine whichcaused by the three-dimensional movement of workbench, reduce the deformation of the keycomponents of the measuring machine, reduce the resistance of motor-driven. The straightness errorof each guide is within±1u, angular motion errors are less than30arcsec after the alignment of Nano-CMM.
Error analysis, modeling, and separation of the interpolation correction are the key technologiesof developing Nano-measuring machine. In this paper, the error influencing factors of the modernprecision Nano-measuring machine was analyzed, and the error correction model was derived. Theresults show that the main sources of error of the measuring machine are laser measurement lengtherror and the flatness deviations and out-of-squareness error of the mirror, and x, y rail imperfectionsdo not affect the measurement results. Using the interpolation algorithm a one-dimensional errorfunction was calculated, and three-dimensional error models of z-axis of Nano-measuring machinewere established based on cubic spline interpolation method. And also the errors of the measuringmachine were isolated by using a laser interferometer and standard parts. After the interpolationcorrection, the corrected results were tested by using a laser interferometer and standard parts. Themeasurement results show that: Measuring machine the greatest displacement error along thediagonal of measuring machine were reduced from3500nm to150nm or less after correction, andThe maximum deviation of measured values of the step height and length of the gauge block are lessthan100nm, and the standard deviation are both30nm or less.
悬臂式测量机为传统结构，用于工字钢结晶器内腔现场测量，测量范围为600×600×800mm。本文详细分析了该测量机的各主要误差源，对常用的三坐标测量机21项几何误差修正模型加以改进，增加光栅零位修正量和长悬臂非刚性修正量，使用齐次坐标转换理论建立了测量机的机构误差修正模型。使用双频激光干涉仪、激光跟踪仪对测量机误差进行了分离，修正后的测量结果表明，测量机的最大位移误差由原来最大600μm降低到50μm。
对国内外现有的纳米级精度三坐标测量机进行研究后，总结获得影响测量精度的一些关键因素，在此基础上提出了三轴测量线垂直共点、x-y导轨导向面与测量面三面共面、测点与三面重合的纳米三坐标测量机“331”结构构建原则。这种结构可以有效消除三维运动系统中阿贝误差的影响，降低导轨运动直线度误差对三维运动台定位精度的影响。
文章详细介绍了一台基于“331”原则的纳米三坐标测量机，测量范围为50×50×50mm，各轴激光干涉仪测长的分辨率为1nm，纳米三维测头分辨率为1nm，适用于微器件和小尺寸量的测量。测量机三维工作台使用低热膨胀系数的铟钢作为主体材料，x、y轴采用了共平面、对称式设计。文中创新性的提出了一种力支撑点可跟随工作台沿x-y二维游动的力平衡系统，该结构能有效克服因工作台三维运动而导致自身作用力无法平衡的问题，可保证测量机各关键部件力变形较小，降低电机驱动阻力。在装调完成后，测量机各轴导轨的直线度误差在±1u以内，角运动误差均在30角秒以内。
误差建模和误差修正是纳米坐标测量机研制的关键技术。本文首先使用现代精度理论分析了纳米测量机的误差影响因素，推导获得误差修正模型。误差模型的分析结果表明，x、y导轨的不完善性并不会对测量带来影响，测量机的主要误差项为激光器测长误差和反射镜的垂直度与平面度误差。然后使用激光干涉仪和几何量标准件对测量机的各项误差进行了分离，使用插值算法计算获得误差修正函数，并建立了纳米测量机z轴基于三次样条插值方法的三维误差模型。在完成插值修正后，使用激光干涉仪和标准件对修正结果进行了检验，测量结果表明：测量机沿对角线的最大位移误差由修正前的3500nm降低到150nm以内；台阶高度和量块长度测量的最大偏差小于100nm，标准差小于30nm。
CMM is a kind of efficient three-dimensional measuring instrument, which integratesmechanical, optical, electronic, computer and other technology. With the development of modernmanufacturing, the emergence of MEMS devices require the higher accuracy on the measuringmachines. In this paper, a cantilever-type coordinate measuring machine for the production site witha large number of range and low accuracy requirements and a coordinate measuring machine withsmall trip nanoscale precision under the laboratory environment was studied. The main contents ofthis thesis are revolving around structure and layout, error analysis and error correction.
This cantilever measuring machine has a traditional structure which was designed formeasuring continuous casting mold and it has a measuring range of600×600×800mm. In this paper,a self-designed cantilever Coordinate Measuring Machine(CMM) for measuring continuous castingmold was studied, main errors sources which have impact on measuring accuracy of measuringmachine were analyzed. The geometric error modal was founded by the theory of homogeneouscoordinate, which include non-rigid error compensation. Laser interferometer and laser tracker wereused to separate each error, then these errors were compensated after be calculated. Measured resultsdemonstrated that, when measuring machine move along the diagonal of measuring space, themaximum displacement error reduce to50μm from600μm after compensation.
Nano Coordinate Measuring Machine both at home and abroad were researched and analyzed,and then some of the key factors that affect the measurement accuracy were summed up. On thisbasis, the "331" principle for Nano-CMM was put forth: Three measuring line intersect to one point;x、y plane of guide overlap with measuring plane; The intersection point of three measuring lines ison the measuring plane. This type of distribution can eliminate the influence of Abbe error fromprinciple and lower effect that rails’ movement errors bring to working table.
This paper introduces a Nano-CMM, the structure layout of it is based on the "331"construction principles. The machine has a measuring range of50×50×50mm, and the resolution is1nm, apply to the measurement of micro-devices and thin size. Measuring machine table used invarsteel with low thermal expansion coefficient as the main material. The x and y axis of workbenchtakes coplanar moving platform and symmetrical design. A special force balance system was putforward in this paper, the force support points of it can move with workbench along the x and ydirection. This structure can effectively balance the internal force of the measuring machine whichcaused by the three-dimensional movement of workbench, reduce the deformation of the keycomponents of the measuring machine, reduce the resistance of motor-driven. The straightness errorof each guide is within±1u, angular motion errors are less than30arcsec after the alignment of Nano-CMM.
Error analysis, modeling, and separation of the interpolation correction are the key technologiesof developing Nano-measuring machine. In this paper, the error influencing factors of the modernprecision Nano-measuring machine was analyzed, and the error correction model was derived. Theresults show that the main sources of error of the measuring machine are laser measurement lengtherror and the flatness deviations and out-of-squareness error of the mirror, and x, y rail imperfectionsdo not affect the measurement results. Using the interpolation algorithm a one-dimensional errorfunction was calculated, and three-dimensional error models of z-axis of Nano-measuring machinewere established based on cubic spline interpolation method. And also the errors of the measuringmachine were isolated by using a laser interferometer and standard parts. After the interpolationcorrection, the corrected results were tested by using a laser interferometer and standard parts. Themeasurement results show that: Measuring machine the greatest displacement error along thediagonal of measuring machine were reduced from3500nm to150nm or less after correction, andThe maximum deviation of measured values of the step height and length of the gauge block are lessthan100nm, and the standard deviation are both30nm or less.
引文
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