超精密车削工艺研究
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摘要
本论文围绕超精密车削工艺中的关键技术:车削误差的分析、检测与补偿展开研究工作。
第一章:针对国内外超精密车削工艺的研究现状进行调研,结合当前研究的热点,难点以及技术发展趋势,引出本文的研究方向和研究内容。
第二章:对超精密车削中金刚石刀具偏置造成的车削误差展开理论分析,指出传统的刀具偏置校正方法由于缺乏理论指导,存在校正效率低,精度低的缺点,即使利用国外进口软件进行辅助校正,也存在一些问题。在理论分析的基础上,本文给出提高刀具偏置校正精度及效率的原则,最后提出新的刀具偏置校正方法,并用实验证明其准确性。
第三章:分析与归纳了超精密车削中的各种误差,指出刀具刃口误差与机床系统误差具有相同的表现形式,可以通过车削零件的面形检测结果进行综合补偿。实际补偿车削实验证明:根据干涉仪测量得到的面形误差泽尼克多项式球差及高级球差系数,对刀具刃口误差与机床系统误差进行综合补偿的方法,正确而高效。
其次,针对负前角刀具刃口的形状进行理论计算,并采用计算机模拟的方法对车削误差进行了仿真。根据自行编制的补偿软件模块重新规划负前角刀具的车削路径进行补偿,可以将负前角刃口形状对车削面形的影响大大降低。
第四章:展开与大数值孔径高次非球面的车削误差补偿技术紧密相关的检测工艺研究。为了弥补传统测量设备对大数值孔径高次非球面检测能力的不足,本文研究了利用基于微差原理的新型轮廓测量仪,对大数值孔径高次非球面的车削进行补偿的方法,实验证明:有效地解决了高陡度非球面的误差补偿难的问题。
第五章:开展自由曲面车削与检测工艺的研究,包括自由曲面的拟合方法,三坐标测头误差补偿及刀具路径的设计与补偿等。根据理论的指导,完成多个自由曲面的加工任务,利用坐标系旋转法对高陡度离轴抛物面进行超精密慢刀伺服车削,相比传统方法,不仅安全,而且加工效率高。
第六章:用实验方法研究了超精密车削中车削深度、刀具刃口圆弧半径、进给量和主轴转速等工艺参数对车削表面微观形貌的影响。根据实验结果,分析了所产生的原因。
第七章:总结了论文的所有研究内容及取得的理论成果,创新点。提出了工作中的不足之处,对今后的超精密车削技术研究进行了展望。
The thesis involves some key technologies of Single Diamond Turning: error analysis, error metrology and error compensation.
In the first chapter, the present situation of the development on techniques for Single Diamond Turning in the world was introduced, based on the current hot spots and difficulties of this field, the working direction and main contents of the thesis were given.
In the second chapter, the turning errors caused by the position of diamond tool were analyzed. For lacking of theoretical instruction, efficiency and accuracy of the traditional tool position correction are not high, even the imported software which helps us to do the correction has some problems. Based on the theoretical analysis, the principle for enhancing the accuracy and efficiency of correction was given. At the end of this chapter, a new tool position correction method was put forward, and verified validly by a practical experiment.
In the third chapter, normal diamond turning errors were analyzed and summed up. The errors from the diamond tool’s cutting edge and the error from the machine have the same format; both of them could be compensated according to the measurement result of surface shape after diamond turning. A new compensation method was firstly put forward, the correction of errors from diamond tool’s cutting edge and machine was done according to measurement result from digital interferometer. The experiment results proved the new compensation method was right, coinciding with predictive analysis, high accuracy and fast speed of error convergence. The geometrical error was calculated for the turning of diamond tool with negative
rake angle, the effect of the compensation for the error was simulated by computer. If the path of tool was reprogrammed according to the compensation software module made by ourselves, the influence by negative rake angle was greatly reduced.
In the fourth chapter, techniques of single diamond turning for complicated aspheric surface were investigated. For the demand of manufacturing aspheric surface with big numerical aperture and high order term, a new metrology instrument based on“small error”theory made by ourselves was explored. By compensation according to the profile measurement result from actual work piece with big numerical aperture and high order term after turning, high accuracy of surface shape was accomplished.
In the fifth chapter, techniques of single diamond turning for freeform surface were studied. Normal turning methods of off-axis parabolic surface were introduced. For high slope off-axis parabolic surface turning, a new method based on rotating coordinated system was firstly put forward, which is safer and more efficient than traditional method.
In the sixth chapter, based on the experiment, how much the cutting depth, tool radius, rotating speed of spindle, amount of feed effect the surface microscopic pattern were studied, and the possible reasons for these influences were analyzed.
In the seventh chapter, the research contents and the innovations of this thesis were summarized, and the insufficient section of research was also mentioned.
第一章:针对国内外超精密车削工艺的研究现状进行调研,结合当前研究的热点,难点以及技术发展趋势,引出本文的研究方向和研究内容。
第二章:对超精密车削中金刚石刀具偏置造成的车削误差展开理论分析,指出传统的刀具偏置校正方法由于缺乏理论指导,存在校正效率低,精度低的缺点,即使利用国外进口软件进行辅助校正,也存在一些问题。在理论分析的基础上,本文给出提高刀具偏置校正精度及效率的原则,最后提出新的刀具偏置校正方法,并用实验证明其准确性。
第三章:分析与归纳了超精密车削中的各种误差,指出刀具刃口误差与机床系统误差具有相同的表现形式,可以通过车削零件的面形检测结果进行综合补偿。实际补偿车削实验证明:根据干涉仪测量得到的面形误差泽尼克多项式球差及高级球差系数,对刀具刃口误差与机床系统误差进行综合补偿的方法,正确而高效。
其次,针对负前角刀具刃口的形状进行理论计算,并采用计算机模拟的方法对车削误差进行了仿真。根据自行编制的补偿软件模块重新规划负前角刀具的车削路径进行补偿,可以将负前角刃口形状对车削面形的影响大大降低。
第四章:展开与大数值孔径高次非球面的车削误差补偿技术紧密相关的检测工艺研究。为了弥补传统测量设备对大数值孔径高次非球面检测能力的不足,本文研究了利用基于微差原理的新型轮廓测量仪,对大数值孔径高次非球面的车削进行补偿的方法,实验证明:有效地解决了高陡度非球面的误差补偿难的问题。
第五章:开展自由曲面车削与检测工艺的研究,包括自由曲面的拟合方法,三坐标测头误差补偿及刀具路径的设计与补偿等。根据理论的指导,完成多个自由曲面的加工任务,利用坐标系旋转法对高陡度离轴抛物面进行超精密慢刀伺服车削,相比传统方法,不仅安全,而且加工效率高。
第六章:用实验方法研究了超精密车削中车削深度、刀具刃口圆弧半径、进给量和主轴转速等工艺参数对车削表面微观形貌的影响。根据实验结果,分析了所产生的原因。
第七章:总结了论文的所有研究内容及取得的理论成果,创新点。提出了工作中的不足之处,对今后的超精密车削技术研究进行了展望。
The thesis involves some key technologies of Single Diamond Turning: error analysis, error metrology and error compensation.
In the first chapter, the present situation of the development on techniques for Single Diamond Turning in the world was introduced, based on the current hot spots and difficulties of this field, the working direction and main contents of the thesis were given.
In the second chapter, the turning errors caused by the position of diamond tool were analyzed. For lacking of theoretical instruction, efficiency and accuracy of the traditional tool position correction are not high, even the imported software which helps us to do the correction has some problems. Based on the theoretical analysis, the principle for enhancing the accuracy and efficiency of correction was given. At the end of this chapter, a new tool position correction method was put forward, and verified validly by a practical experiment.
In the third chapter, normal diamond turning errors were analyzed and summed up. The errors from the diamond tool’s cutting edge and the error from the machine have the same format; both of them could be compensated according to the measurement result of surface shape after diamond turning. A new compensation method was firstly put forward, the correction of errors from diamond tool’s cutting edge and machine was done according to measurement result from digital interferometer. The experiment results proved the new compensation method was right, coinciding with predictive analysis, high accuracy and fast speed of error convergence. The geometrical error was calculated for the turning of diamond tool with negative
rake angle, the effect of the compensation for the error was simulated by computer. If the path of tool was reprogrammed according to the compensation software module made by ourselves, the influence by negative rake angle was greatly reduced.
In the fourth chapter, techniques of single diamond turning for complicated aspheric surface were investigated. For the demand of manufacturing aspheric surface with big numerical aperture and high order term, a new metrology instrument based on“small error”theory made by ourselves was explored. By compensation according to the profile measurement result from actual work piece with big numerical aperture and high order term after turning, high accuracy of surface shape was accomplished.
In the fifth chapter, techniques of single diamond turning for freeform surface were studied. Normal turning methods of off-axis parabolic surface were introduced. For high slope off-axis parabolic surface turning, a new method based on rotating coordinated system was firstly put forward, which is safer and more efficient than traditional method.
In the sixth chapter, based on the experiment, how much the cutting depth, tool radius, rotating speed of spindle, amount of feed effect the surface microscopic pattern were studied, and the possible reasons for these influences were analyzed.
In the seventh chapter, the research contents and the innovations of this thesis were summarized, and the insufficient section of research was also mentioned.
引文
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